New Method for Nanosecond Laser Machining

Autores
Toro Salazar, Cinthya Emma; Lasorsa, Carlos Alberto; Sánchez Aké, Citlali; Villagran Muñiz, Mayo; Rinaldi, Carlos Alberto
Año de publicación
2012
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
The technique of micro-machining assisted by laser is the most recent and flexible process for the design of complex devices. To be able to micro-machine hard materials with precision it is necessary to study the parameters that control and limit the capabilities of this laser process. Several articles have shown that if it applies a lot of energy in a localized area there are hot-affected zones (HAZ), even when a femtosecond laser is used. Hence, the challenge in the laserbased micromachining is to improve the quality of machining, i.e. depleting the HAZ in the prototypes. In this work, changing the optical properties of the substrate, good quality silicon micro-machining has been obtained with a nanosecond Q-switched laser.
Fil: Toro Salazar, Cinthya Emma. Comisión Nacional de Energía Atómica. Gerencia del Área de Investigación y Aplicaciones No Nucleares. Gerencia Física (Centro Atómico Constituyentes). Proyecto Tandar; Argentina
Fil: Lasorsa, Carlos Alberto. Comisión Nacional de Energía Atómica. Gerencia del Área de Investigación y Aplicaciones No Nucleares. Gerencia Física (Centro Atómico Constituyentes). Proyecto Tandar; Argentina. Universidad Tecnológica Nacional. Facultad Regional Haedo; Argentina
Fil: Sánchez Aké, Citlali. Universidad Nacional Autónoma de México; México
Fil: Villagran Muñiz, Mayo. Universidad Nacional Autónoma de México; México
Fil: Rinaldi, Carlos Alberto. Comisión Nacional de Energía Atómica. Gerencia del Área de Investigación y Aplicaciones No Nucleares. Gerencia Física (Centro Atómico Constituyentes). Proyecto Tandar; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina
Materia
NANOSECOND LASER
SILICON DIOXIDE AND SILICON (100)
SILICON NITRIDE
THIN FILMS
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/195350
Acceder
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oai_identifier_str oai:ri.conicet.gov.ar:11336/195350
network_acronym_str CONICETDig
repository_id_str 3498
network_name_str CONICET Digital (CONICET)
spelling New Method for Nanosecond Laser MachiningToro Salazar, Cinthya EmmaLasorsa, Carlos AlbertoSánchez Aké, CitlaliVillagran Muñiz, MayoRinaldi, Carlos AlbertoNANOSECOND LASERSILICON DIOXIDE AND SILICON (100)SILICON NITRIDETHIN FILMShttps://purl.org/becyt/ford/1.4https://purl.org/becyt/ford/1The technique of micro-machining assisted by laser is the most recent and flexible process for the design of complex devices. To be able to micro-machine hard materials with precision it is necessary to study the parameters that control and limit the capabilities of this laser process. Several articles have shown that if it applies a lot of energy in a localized area there are hot-affected zones (HAZ), even when a femtosecond laser is used. Hence, the challenge in the laserbased micromachining is to improve the quality of machining, i.e. depleting the HAZ in the prototypes. In this work, changing the optical properties of the substrate, good quality silicon micro-machining has been obtained with a nanosecond Q-switched laser.Fil: Toro Salazar, Cinthya Emma. Comisión Nacional de Energía Atómica. Gerencia del Área de Investigación y Aplicaciones No Nucleares. Gerencia Física (Centro Atómico Constituyentes). Proyecto Tandar; ArgentinaFil: Lasorsa, Carlos Alberto. Comisión Nacional de Energía Atómica. Gerencia del Área de Investigación y Aplicaciones No Nucleares. Gerencia Física (Centro Atómico Constituyentes). Proyecto Tandar; Argentina. Universidad Tecnológica Nacional. Facultad Regional Haedo; ArgentinaFil: Sánchez Aké, Citlali. Universidad Nacional Autónoma de México; MéxicoFil: Villagran Muñiz, Mayo. Universidad Nacional Autónoma de México; MéxicoFil: Rinaldi, Carlos Alberto. Comisión Nacional de Energía Atómica. Gerencia del Área de Investigación y Aplicaciones No Nucleares. Gerencia Física (Centro Atómico Constituyentes). Proyecto Tandar; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; ArgentinaJapan Laser Processing Soc2012-11info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/195350Toro Salazar, Cinthya Emma; Lasorsa, Carlos Alberto; Sánchez Aké, Citlali; Villagran Muñiz, Mayo; Rinaldi, Carlos Alberto; New Method for Nanosecond Laser Machining; Japan Laser Processing Soc; Journal Of Laser Micro/nanoengineering; 7; 3; 11-2012; 269-2731880-06881880-0688CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/url/http://www.jlps.gr.jp/jlmn/archive/07/07_03/info:eu-repo/semantics/altIdentifier/doi/10.2961/jlmn.2012.03.0007info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-10-22T11:56:09Zoai:ri.conicet.gov.ar:11336/195350instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-10-22 11:56:10.248CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv New Method for Nanosecond Laser Machining
title New Method for Nanosecond Laser Machining
spellingShingle New Method for Nanosecond Laser Machining
Toro Salazar, Cinthya Emma
NANOSECOND LASER
SILICON DIOXIDE AND SILICON (100)
SILICON NITRIDE
THIN FILMS
title_short New Method for Nanosecond Laser Machining
title_full New Method for Nanosecond Laser Machining
title_fullStr New Method for Nanosecond Laser Machining
title_full_unstemmed New Method for Nanosecond Laser Machining
title_sort New Method for Nanosecond Laser Machining
dc.creator.none.fl_str_mv Toro Salazar, Cinthya Emma
Lasorsa, Carlos Alberto
Sánchez Aké, Citlali
Villagran Muñiz, Mayo
Rinaldi, Carlos Alberto
author Toro Salazar, Cinthya Emma
author_facet Toro Salazar, Cinthya Emma
Lasorsa, Carlos Alberto
Sánchez Aké, Citlali
Villagran Muñiz, Mayo
Rinaldi, Carlos Alberto
author_role author
author2 Lasorsa, Carlos Alberto
Sánchez Aké, Citlali
Villagran Muñiz, Mayo
Rinaldi, Carlos Alberto
author2_role author
author
author
author
dc.subject.none.fl_str_mv NANOSECOND LASER
SILICON DIOXIDE AND SILICON (100)
SILICON NITRIDE
THIN FILMS
topic NANOSECOND LASER
SILICON DIOXIDE AND SILICON (100)
SILICON NITRIDE
THIN FILMS
purl_subject.fl_str_mv https://purl.org/becyt/ford/1.4
https://purl.org/becyt/ford/1
dc.description.none.fl_txt_mv The technique of micro-machining assisted by laser is the most recent and flexible process for the design of complex devices. To be able to micro-machine hard materials with precision it is necessary to study the parameters that control and limit the capabilities of this laser process. Several articles have shown that if it applies a lot of energy in a localized area there are hot-affected zones (HAZ), even when a femtosecond laser is used. Hence, the challenge in the laserbased micromachining is to improve the quality of machining, i.e. depleting the HAZ in the prototypes. In this work, changing the optical properties of the substrate, good quality silicon micro-machining has been obtained with a nanosecond Q-switched laser.
Fil: Toro Salazar, Cinthya Emma. Comisión Nacional de Energía Atómica. Gerencia del Área de Investigación y Aplicaciones No Nucleares. Gerencia Física (Centro Atómico Constituyentes). Proyecto Tandar; Argentina
Fil: Lasorsa, Carlos Alberto. Comisión Nacional de Energía Atómica. Gerencia del Área de Investigación y Aplicaciones No Nucleares. Gerencia Física (Centro Atómico Constituyentes). Proyecto Tandar; Argentina. Universidad Tecnológica Nacional. Facultad Regional Haedo; Argentina
Fil: Sánchez Aké, Citlali. Universidad Nacional Autónoma de México; México
Fil: Villagran Muñiz, Mayo. Universidad Nacional Autónoma de México; México
Fil: Rinaldi, Carlos Alberto. Comisión Nacional de Energía Atómica. Gerencia del Área de Investigación y Aplicaciones No Nucleares. Gerencia Física (Centro Atómico Constituyentes). Proyecto Tandar; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina
description The technique of micro-machining assisted by laser is the most recent and flexible process for the design of complex devices. To be able to micro-machine hard materials with precision it is necessary to study the parameters that control and limit the capabilities of this laser process. Several articles have shown that if it applies a lot of energy in a localized area there are hot-affected zones (HAZ), even when a femtosecond laser is used. Hence, the challenge in the laserbased micromachining is to improve the quality of machining, i.e. depleting the HAZ in the prototypes. In this work, changing the optical properties of the substrate, good quality silicon micro-machining has been obtained with a nanosecond Q-switched laser.
publishDate 2012
dc.date.none.fl_str_mv 2012-11
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/195350
Toro Salazar, Cinthya Emma; Lasorsa, Carlos Alberto; Sánchez Aké, Citlali; Villagran Muñiz, Mayo; Rinaldi, Carlos Alberto; New Method for Nanosecond Laser Machining; Japan Laser Processing Soc; Journal Of Laser Micro/nanoengineering; 7; 3; 11-2012; 269-273
1880-0688
1880-0688
CONICET Digital
CONICET
url http://hdl.handle.net/11336/195350
identifier_str_mv Toro Salazar, Cinthya Emma; Lasorsa, Carlos Alberto; Sánchez Aké, Citlali; Villagran Muñiz, Mayo; Rinaldi, Carlos Alberto; New Method for Nanosecond Laser Machining; Japan Laser Processing Soc; Journal Of Laser Micro/nanoengineering; 7; 3; 11-2012; 269-273
1880-0688
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/url/http://www.jlps.gr.jp/jlmn/archive/07/07_03/
info:eu-repo/semantics/altIdentifier/doi/10.2961/jlmn.2012.03.0007
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
application/pdf
dc.publisher.none.fl_str_mv Japan Laser Processing Soc
publisher.none.fl_str_mv Japan Laser Processing Soc
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
_version_ 1846782267344551936
score 12.982451

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