New Method for Nanosecond Laser Machining
- Autores
- Toro Salazar, Cinthya Emma; Lasorsa, Carlos Alberto; Sánchez Aké, Citlali; Villagran Muñiz, Mayo; Rinaldi, Carlos Alberto
- Año de publicación
- 2012
- Idioma
- inglés
- Tipo de recurso
- artículo
- Estado
- versión publicada
- Descripción
- The technique of micro-machining assisted by laser is the most recent and flexible process for the design of complex devices. To be able to micro-machine hard materials with precision it is necessary to study the parameters that control and limit the capabilities of this laser process. Several articles have shown that if it applies a lot of energy in a localized area there are hot-affected zones (HAZ), even when a femtosecond laser is used. Hence, the challenge in the laserbased micromachining is to improve the quality of machining, i.e. depleting the HAZ in the prototypes. In this work, changing the optical properties of the substrate, good quality silicon micro-machining has been obtained with a nanosecond Q-switched laser.
Fil: Toro Salazar, Cinthya Emma. Comisión Nacional de Energía Atómica. Gerencia del Área de Investigación y Aplicaciones No Nucleares. Gerencia Física (Centro Atómico Constituyentes). Proyecto Tandar; Argentina
Fil: Lasorsa, Carlos Alberto. Comisión Nacional de Energía Atómica. Gerencia del Área de Investigación y Aplicaciones No Nucleares. Gerencia Física (Centro Atómico Constituyentes). Proyecto Tandar; Argentina. Universidad Tecnológica Nacional. Facultad Regional Haedo; Argentina
Fil: Sánchez Aké, Citlali. Universidad Nacional Autónoma de México; México
Fil: Villagran Muñiz, Mayo. Universidad Nacional Autónoma de México; México
Fil: Rinaldi, Carlos Alberto. Comisión Nacional de Energía Atómica. Gerencia del Área de Investigación y Aplicaciones No Nucleares. Gerencia Física (Centro Atómico Constituyentes). Proyecto Tandar; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina - Materia
-
NANOSECOND LASER
SILICON DIOXIDE AND SILICON (100)
SILICON NITRIDE
THIN FILMS - Nivel de accesibilidad
- acceso abierto
- Condiciones de uso
- https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
- Repositorio
- Institución
- Consejo Nacional de Investigaciones Científicas y Técnicas
- OAI Identificador
- oai:ri.conicet.gov.ar:11336/195350
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New Method for Nanosecond Laser MachiningToro Salazar, Cinthya EmmaLasorsa, Carlos AlbertoSánchez Aké, CitlaliVillagran Muñiz, MayoRinaldi, Carlos AlbertoNANOSECOND LASERSILICON DIOXIDE AND SILICON (100)SILICON NITRIDETHIN FILMShttps://purl.org/becyt/ford/1.4https://purl.org/becyt/ford/1The technique of micro-machining assisted by laser is the most recent and flexible process for the design of complex devices. To be able to micro-machine hard materials with precision it is necessary to study the parameters that control and limit the capabilities of this laser process. Several articles have shown that if it applies a lot of energy in a localized area there are hot-affected zones (HAZ), even when a femtosecond laser is used. Hence, the challenge in the laserbased micromachining is to improve the quality of machining, i.e. depleting the HAZ in the prototypes. In this work, changing the optical properties of the substrate, good quality silicon micro-machining has been obtained with a nanosecond Q-switched laser.Fil: Toro Salazar, Cinthya Emma. Comisión Nacional de Energía Atómica. Gerencia del Área de Investigación y Aplicaciones No Nucleares. Gerencia Física (Centro Atómico Constituyentes). Proyecto Tandar; ArgentinaFil: Lasorsa, Carlos Alberto. Comisión Nacional de Energía Atómica. Gerencia del Área de Investigación y Aplicaciones No Nucleares. Gerencia Física (Centro Atómico Constituyentes). Proyecto Tandar; Argentina. Universidad Tecnológica Nacional. Facultad Regional Haedo; ArgentinaFil: Sánchez Aké, Citlali. Universidad Nacional Autónoma de México; MéxicoFil: Villagran Muñiz, Mayo. Universidad Nacional Autónoma de México; MéxicoFil: Rinaldi, Carlos Alberto. Comisión Nacional de Energía Atómica. Gerencia del Área de Investigación y Aplicaciones No Nucleares. Gerencia Física (Centro Atómico Constituyentes). Proyecto Tandar; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; ArgentinaJapan Laser Processing Soc2012-11info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/195350Toro Salazar, Cinthya Emma; Lasorsa, Carlos Alberto; Sánchez Aké, Citlali; Villagran Muñiz, Mayo; Rinaldi, Carlos Alberto; New Method for Nanosecond Laser Machining; Japan Laser Processing Soc; Journal Of Laser Micro/nanoengineering; 7; 3; 11-2012; 269-2731880-06881880-0688CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/url/http://www.jlps.gr.jp/jlmn/archive/07/07_03/info:eu-repo/semantics/altIdentifier/doi/10.2961/jlmn.2012.03.0007info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-29T10:23:23Zoai:ri.conicet.gov.ar:11336/195350instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-29 10:23:23.331CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse |
dc.title.none.fl_str_mv |
New Method for Nanosecond Laser Machining |
title |
New Method for Nanosecond Laser Machining |
spellingShingle |
New Method for Nanosecond Laser Machining Toro Salazar, Cinthya Emma NANOSECOND LASER SILICON DIOXIDE AND SILICON (100) SILICON NITRIDE THIN FILMS |
title_short |
New Method for Nanosecond Laser Machining |
title_full |
New Method for Nanosecond Laser Machining |
title_fullStr |
New Method for Nanosecond Laser Machining |
title_full_unstemmed |
New Method for Nanosecond Laser Machining |
title_sort |
New Method for Nanosecond Laser Machining |
dc.creator.none.fl_str_mv |
Toro Salazar, Cinthya Emma Lasorsa, Carlos Alberto Sánchez Aké, Citlali Villagran Muñiz, Mayo Rinaldi, Carlos Alberto |
author |
Toro Salazar, Cinthya Emma |
author_facet |
Toro Salazar, Cinthya Emma Lasorsa, Carlos Alberto Sánchez Aké, Citlali Villagran Muñiz, Mayo Rinaldi, Carlos Alberto |
author_role |
author |
author2 |
Lasorsa, Carlos Alberto Sánchez Aké, Citlali Villagran Muñiz, Mayo Rinaldi, Carlos Alberto |
author2_role |
author author author author |
dc.subject.none.fl_str_mv |
NANOSECOND LASER SILICON DIOXIDE AND SILICON (100) SILICON NITRIDE THIN FILMS |
topic |
NANOSECOND LASER SILICON DIOXIDE AND SILICON (100) SILICON NITRIDE THIN FILMS |
purl_subject.fl_str_mv |
https://purl.org/becyt/ford/1.4 https://purl.org/becyt/ford/1 |
dc.description.none.fl_txt_mv |
The technique of micro-machining assisted by laser is the most recent and flexible process for the design of complex devices. To be able to micro-machine hard materials with precision it is necessary to study the parameters that control and limit the capabilities of this laser process. Several articles have shown that if it applies a lot of energy in a localized area there are hot-affected zones (HAZ), even when a femtosecond laser is used. Hence, the challenge in the laserbased micromachining is to improve the quality of machining, i.e. depleting the HAZ in the prototypes. In this work, changing the optical properties of the substrate, good quality silicon micro-machining has been obtained with a nanosecond Q-switched laser. Fil: Toro Salazar, Cinthya Emma. Comisión Nacional de Energía Atómica. Gerencia del Área de Investigación y Aplicaciones No Nucleares. Gerencia Física (Centro Atómico Constituyentes). Proyecto Tandar; Argentina Fil: Lasorsa, Carlos Alberto. Comisión Nacional de Energía Atómica. Gerencia del Área de Investigación y Aplicaciones No Nucleares. Gerencia Física (Centro Atómico Constituyentes). Proyecto Tandar; Argentina. Universidad Tecnológica Nacional. Facultad Regional Haedo; Argentina Fil: Sánchez Aké, Citlali. Universidad Nacional Autónoma de México; México Fil: Villagran Muñiz, Mayo. Universidad Nacional Autónoma de México; México Fil: Rinaldi, Carlos Alberto. Comisión Nacional de Energía Atómica. Gerencia del Área de Investigación y Aplicaciones No Nucleares. Gerencia Física (Centro Atómico Constituyentes). Proyecto Tandar; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina |
description |
The technique of micro-machining assisted by laser is the most recent and flexible process for the design of complex devices. To be able to micro-machine hard materials with precision it is necessary to study the parameters that control and limit the capabilities of this laser process. Several articles have shown that if it applies a lot of energy in a localized area there are hot-affected zones (HAZ), even when a femtosecond laser is used. Hence, the challenge in the laserbased micromachining is to improve the quality of machining, i.e. depleting the HAZ in the prototypes. In this work, changing the optical properties of the substrate, good quality silicon micro-machining has been obtained with a nanosecond Q-switched laser. |
publishDate |
2012 |
dc.date.none.fl_str_mv |
2012-11 |
dc.type.none.fl_str_mv |
info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion http://purl.org/coar/resource_type/c_6501 info:ar-repo/semantics/articulo |
format |
article |
status_str |
publishedVersion |
dc.identifier.none.fl_str_mv |
http://hdl.handle.net/11336/195350 Toro Salazar, Cinthya Emma; Lasorsa, Carlos Alberto; Sánchez Aké, Citlali; Villagran Muñiz, Mayo; Rinaldi, Carlos Alberto; New Method for Nanosecond Laser Machining; Japan Laser Processing Soc; Journal Of Laser Micro/nanoengineering; 7; 3; 11-2012; 269-273 1880-0688 1880-0688 CONICET Digital CONICET |
url |
http://hdl.handle.net/11336/195350 |
identifier_str_mv |
Toro Salazar, Cinthya Emma; Lasorsa, Carlos Alberto; Sánchez Aké, Citlali; Villagran Muñiz, Mayo; Rinaldi, Carlos Alberto; New Method for Nanosecond Laser Machining; Japan Laser Processing Soc; Journal Of Laser Micro/nanoengineering; 7; 3; 11-2012; 269-273 1880-0688 CONICET Digital CONICET |
dc.language.none.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
info:eu-repo/semantics/altIdentifier/url/http://www.jlps.gr.jp/jlmn/archive/07/07_03/ info:eu-repo/semantics/altIdentifier/doi/10.2961/jlmn.2012.03.0007 |
dc.rights.none.fl_str_mv |
info:eu-repo/semantics/openAccess https://creativecommons.org/licenses/by-nc-sa/2.5/ar/ |
eu_rights_str_mv |
openAccess |
rights_invalid_str_mv |
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/ |
dc.format.none.fl_str_mv |
application/pdf application/pdf application/pdf |
dc.publisher.none.fl_str_mv |
Japan Laser Processing Soc |
publisher.none.fl_str_mv |
Japan Laser Processing Soc |
dc.source.none.fl_str_mv |
reponame:CONICET Digital (CONICET) instname:Consejo Nacional de Investigaciones Científicas y Técnicas |
reponame_str |
CONICET Digital (CONICET) |
collection |
CONICET Digital (CONICET) |
instname_str |
Consejo Nacional de Investigaciones Científicas y Técnicas |
repository.name.fl_str_mv |
CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas |
repository.mail.fl_str_mv |
dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar |
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1844614228342734848 |
score |
13.070432 |