Vacuum-enhanced nickel-induced crystallization of hydrogenated amorphous silicon
- Autores
- Budini, Nicolas; Rinaldi, Pablo Andres; Arce, Roberto Delio; Schmidt, Javier Alejandro; Koropecki, Roberto Roman; Buitrago, Roman Horacio
- Año de publicación
- 2012
- Idioma
- inglés
- Tipo de recurso
- artículo
- Estado
- versión publicada
- Descripción
- We report the results of enhanced nickel induced crystallization of intrinsic hydrogenated amorphous silicon thin films under vacuum conditions. Crystallization was performed by conventional furnace annealing at both atmospheric pressure and vacuum or low pressure conditions (≈10^?6 Torr) for comparison. We have investigated the influence of low pressure during annealing on the resulting polycrystalline films by means of optical microscopy, ultraviolet reflectance, and photoacoustic spectrometry measurements. A faster crystallization and a smaller grain size were observed when the process is carried out under vacuum, with an annealing time reduction of more than 50%. We discuss, from a thermodynamical viewpoint, some possible causes by which vacuum annealing influences incubation and nucleation stages due to the presence of mobile hydrogen atoms inside the amorphous silicon matrix. Large grains with diameters of 30 and 100 μm were obtained at vacuum and atmospheric pressure, respectively.
Fil: Budini, Nicolas. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Fil: Rinaldi, Pablo Andres. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Fil: Arce, Roberto Delio. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Fil: Schmidt, Javier Alejandro. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Fil: Koropecki, Roberto Roman. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Fil: Buitrago, Roman Horacio. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina - Materia
-
thin films
thin films
photoacoustic
photoacoustic
crystallization
crystallization
amorphous silicon
amorphous silicon - Nivel de accesibilidad
- acceso abierto
- Condiciones de uso
- https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
- Repositorio
.jpg)
- Institución
- Consejo Nacional de Investigaciones Científicas y Técnicas
- OAI Identificador
- oai:ri.conicet.gov.ar:11336/245988
Ver los metadatos del registro completo
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Vacuum-enhanced nickel-induced crystallization of hydrogenated amorphous siliconBudini, NicolasRinaldi, Pablo AndresArce, Roberto DelioSchmidt, Javier AlejandroKoropecki, Roberto RomanBuitrago, Roman Horaciothin filmsthin filmsphotoacousticphotoacousticcrystallizationcrystallizationamorphous siliconamorphous siliconhttps://purl.org/becyt/ford/1.3https://purl.org/becyt/ford/1We report the results of enhanced nickel induced crystallization of intrinsic hydrogenated amorphous silicon thin films under vacuum conditions. Crystallization was performed by conventional furnace annealing at both atmospheric pressure and vacuum or low pressure conditions (≈10^?6 Torr) for comparison. We have investigated the influence of low pressure during annealing on the resulting polycrystalline films by means of optical microscopy, ultraviolet reflectance, and photoacoustic spectrometry measurements. A faster crystallization and a smaller grain size were observed when the process is carried out under vacuum, with an annealing time reduction of more than 50%. We discuss, from a thermodynamical viewpoint, some possible causes by which vacuum annealing influences incubation and nucleation stages due to the presence of mobile hydrogen atoms inside the amorphous silicon matrix. Large grains with diameters of 30 and 100 μm were obtained at vacuum and atmospheric pressure, respectively.Fil: Budini, Nicolas. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; ArgentinaFil: Rinaldi, Pablo Andres. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; ArgentinaFil: Arce, Roberto Delio. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; ArgentinaFil: Schmidt, Javier Alejandro. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; ArgentinaFil: Koropecki, Roberto Roman. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; ArgentinaFil: Buitrago, Roman Horacio. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; ArgentinaAmerican Institute of Physics2012-09info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/245988Budini, Nicolas; Rinaldi, Pablo Andres; Arce, Roberto Delio; Schmidt, Javier Alejandro; Koropecki, Roberto Roman; et al.; Vacuum-enhanced nickel-induced crystallization of hydrogenated amorphous silicon; American Institute of Physics; Journal of Applied Physics; 112; 7; 9-2012; 73506-735130021-8979CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/url/http://jap.aip.org/resource/1/japiau/v112/i7/p073506_s1info:eu-repo/semantics/altIdentifier/doi/10.1063/1.4757574info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-29T10:06:59Zoai:ri.conicet.gov.ar:11336/245988instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-29 10:06:59.616CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse |
| dc.title.none.fl_str_mv |
Vacuum-enhanced nickel-induced crystallization of hydrogenated amorphous silicon |
| title |
Vacuum-enhanced nickel-induced crystallization of hydrogenated amorphous silicon |
| spellingShingle |
Vacuum-enhanced nickel-induced crystallization of hydrogenated amorphous silicon Budini, Nicolas thin films thin films photoacoustic photoacoustic crystallization crystallization amorphous silicon amorphous silicon |
| title_short |
Vacuum-enhanced nickel-induced crystallization of hydrogenated amorphous silicon |
| title_full |
Vacuum-enhanced nickel-induced crystallization of hydrogenated amorphous silicon |
| title_fullStr |
Vacuum-enhanced nickel-induced crystallization of hydrogenated amorphous silicon |
| title_full_unstemmed |
Vacuum-enhanced nickel-induced crystallization of hydrogenated amorphous silicon |
| title_sort |
Vacuum-enhanced nickel-induced crystallization of hydrogenated amorphous silicon |
| dc.creator.none.fl_str_mv |
Budini, Nicolas Rinaldi, Pablo Andres Arce, Roberto Delio Schmidt, Javier Alejandro Koropecki, Roberto Roman Buitrago, Roman Horacio |
| author |
Budini, Nicolas |
| author_facet |
Budini, Nicolas Rinaldi, Pablo Andres Arce, Roberto Delio Schmidt, Javier Alejandro Koropecki, Roberto Roman Buitrago, Roman Horacio |
| author_role |
author |
| author2 |
Rinaldi, Pablo Andres Arce, Roberto Delio Schmidt, Javier Alejandro Koropecki, Roberto Roman Buitrago, Roman Horacio |
| author2_role |
author author author author author |
| dc.subject.none.fl_str_mv |
thin films thin films photoacoustic photoacoustic crystallization crystallization amorphous silicon amorphous silicon |
| topic |
thin films thin films photoacoustic photoacoustic crystallization crystallization amorphous silicon amorphous silicon |
| purl_subject.fl_str_mv |
https://purl.org/becyt/ford/1.3 https://purl.org/becyt/ford/1 |
| dc.description.none.fl_txt_mv |
We report the results of enhanced nickel induced crystallization of intrinsic hydrogenated amorphous silicon thin films under vacuum conditions. Crystallization was performed by conventional furnace annealing at both atmospheric pressure and vacuum or low pressure conditions (≈10^?6 Torr) for comparison. We have investigated the influence of low pressure during annealing on the resulting polycrystalline films by means of optical microscopy, ultraviolet reflectance, and photoacoustic spectrometry measurements. A faster crystallization and a smaller grain size were observed when the process is carried out under vacuum, with an annealing time reduction of more than 50%. We discuss, from a thermodynamical viewpoint, some possible causes by which vacuum annealing influences incubation and nucleation stages due to the presence of mobile hydrogen atoms inside the amorphous silicon matrix. Large grains with diameters of 30 and 100 μm were obtained at vacuum and atmospheric pressure, respectively. Fil: Budini, Nicolas. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina Fil: Rinaldi, Pablo Andres. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina Fil: Arce, Roberto Delio. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina Fil: Schmidt, Javier Alejandro. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina Fil: Koropecki, Roberto Roman. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina Fil: Buitrago, Roman Horacio. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina |
| description |
We report the results of enhanced nickel induced crystallization of intrinsic hydrogenated amorphous silicon thin films under vacuum conditions. Crystallization was performed by conventional furnace annealing at both atmospheric pressure and vacuum or low pressure conditions (≈10^?6 Torr) for comparison. We have investigated the influence of low pressure during annealing on the resulting polycrystalline films by means of optical microscopy, ultraviolet reflectance, and photoacoustic spectrometry measurements. A faster crystallization and a smaller grain size were observed when the process is carried out under vacuum, with an annealing time reduction of more than 50%. We discuss, from a thermodynamical viewpoint, some possible causes by which vacuum annealing influences incubation and nucleation stages due to the presence of mobile hydrogen atoms inside the amorphous silicon matrix. Large grains with diameters of 30 and 100 μm were obtained at vacuum and atmospheric pressure, respectively. |
| publishDate |
2012 |
| dc.date.none.fl_str_mv |
2012-09 |
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info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion http://purl.org/coar/resource_type/c_6501 info:ar-repo/semantics/articulo |
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article |
| status_str |
publishedVersion |
| dc.identifier.none.fl_str_mv |
http://hdl.handle.net/11336/245988 Budini, Nicolas; Rinaldi, Pablo Andres; Arce, Roberto Delio; Schmidt, Javier Alejandro; Koropecki, Roberto Roman; et al.; Vacuum-enhanced nickel-induced crystallization of hydrogenated amorphous silicon; American Institute of Physics; Journal of Applied Physics; 112; 7; 9-2012; 73506-73513 0021-8979 CONICET Digital CONICET |
| url |
http://hdl.handle.net/11336/245988 |
| identifier_str_mv |
Budini, Nicolas; Rinaldi, Pablo Andres; Arce, Roberto Delio; Schmidt, Javier Alejandro; Koropecki, Roberto Roman; et al.; Vacuum-enhanced nickel-induced crystallization of hydrogenated amorphous silicon; American Institute of Physics; Journal of Applied Physics; 112; 7; 9-2012; 73506-73513 0021-8979 CONICET Digital CONICET |
| dc.language.none.fl_str_mv |
eng |
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eng |
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American Institute of Physics |
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American Institute of Physics |
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