Comb Drive Designs with Minimized Levitation

Autores
del Corro, Pablo Guillermo; Imoden, Matthias; Bishop, David J.; Pastoriza, Hernan
Año de publicación
2016
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
This paper presents two capacitive comb drive designs for electrostatic actuation of MEMS with the aim to eliminate the levitation effect often observed in such systems. By placing a shield over the comb drive fingers, it is possible to balance the electric field and suppress vertical forces while maintaining the desired lateral motion. By optimizing the comb geometry, we demonstrate that our approach is able to reduce the levitation by an order of magnitude and unwanted coupling of motion from out-of-plane to in-plane by a factor of 7 compared with standard comb architectures fabricated using PolyMUMPs technology, without the need of alternating comb finger polarities or additional control electrodes. Levitation was reduced to 160 nm, for 3.6 μm lateral displacement at a driving voltage of 80 V. [2016-0156]
Fil: del Corro, Pablo Guillermo. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Patagonia Norte; Argentina. Comisión Nacional de Energía Atómica. Gerencia del Area de Investigación y Aplicaciones No Nucleares. Gerencia de Física (Centro Atómico Bariloche). División Bajas Temperaturas; Argentina. Comisión Nacional de Energía Atómica. Gerencia del Área de Energía Nuclear. Instituto Balseiro; Argentina
Fil: Imoden, Matthias. École Polytechnique Fédérale de Lausanne; Suiza
Fil: Bishop, David J.. Boston University; Estados Unidos
Fil: Pastoriza, Hernan. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Patagonia Norte; Argentina. Comisión Nacional de Energía Atómica. Gerencia del Area de Investigación y Aplicaciones No Nucleares. Gerencia de Física (Centro Atómico Bariloche). División Bajas Temperaturas; Argentina. Comisión Nacional de Energía Atómica. Gerencia del Área de Energía Nuclear. Instituto Balseiro; Argentina
Materia
Actuators
Comb Drives
Levitation
Mems
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/79033
Acceder
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oai_identifier_str oai:ri.conicet.gov.ar:11336/79033
network_acronym_str CONICETDig
repository_id_str 3498
network_name_str CONICET Digital (CONICET)
spelling Comb Drive Designs with Minimized Levitationdel Corro, Pablo GuillermoImoden, MatthiasBishop, David J.Pastoriza, HernanActuatorsComb DrivesLevitationMemshttps://purl.org/becyt/ford/2.2https://purl.org/becyt/ford/2This paper presents two capacitive comb drive designs for electrostatic actuation of MEMS with the aim to eliminate the levitation effect often observed in such systems. By placing a shield over the comb drive fingers, it is possible to balance the electric field and suppress vertical forces while maintaining the desired lateral motion. By optimizing the comb geometry, we demonstrate that our approach is able to reduce the levitation by an order of magnitude and unwanted coupling of motion from out-of-plane to in-plane by a factor of 7 compared with standard comb architectures fabricated using PolyMUMPs technology, without the need of alternating comb finger polarities or additional control electrodes. Levitation was reduced to 160 nm, for 3.6 μm lateral displacement at a driving voltage of 80 V. [2016-0156]Fil: del Corro, Pablo Guillermo. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Patagonia Norte; Argentina. Comisión Nacional de Energía Atómica. Gerencia del Area de Investigación y Aplicaciones No Nucleares. Gerencia de Física (Centro Atómico Bariloche). División Bajas Temperaturas; Argentina. Comisión Nacional de Energía Atómica. Gerencia del Área de Energía Nuclear. Instituto Balseiro; ArgentinaFil: Imoden, Matthias. École Polytechnique Fédérale de Lausanne; SuizaFil: Bishop, David J.. Boston University; Estados UnidosFil: Pastoriza, Hernan. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Patagonia Norte; Argentina. Comisión Nacional de Energía Atómica. Gerencia del Area de Investigación y Aplicaciones No Nucleares. Gerencia de Física (Centro Atómico Bariloche). División Bajas Temperaturas; Argentina. Comisión Nacional de Energía Atómica. Gerencia del Área de Energía Nuclear. Instituto Balseiro; ArgentinaInstitute of Electrical and Electronics Engineers2016-12-21info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/79033del Corro, Pablo Guillermo; Imoden, Matthias; Bishop, David J.; Pastoriza, Hernan; Comb Drive Designs with Minimized Levitation; Institute of Electrical and Electronics Engineers; Journal Of Microelectromechanical Systems; 25; 6; 21-12-2016; 1025-10321057-71571941-0158CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/doi/10.1109/JMEMS.2016.2614965info:eu-repo/semantics/altIdentifier/url/https://ieeexplore.ieee.org/document/7605552info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-03T09:48:41Zoai:ri.conicet.gov.ar:11336/79033instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-03 09:48:42.206CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv Comb Drive Designs with Minimized Levitation
title Comb Drive Designs with Minimized Levitation
spellingShingle Comb Drive Designs with Minimized Levitation
del Corro, Pablo Guillermo
Actuators
Comb Drives
Levitation
Mems
title_short Comb Drive Designs with Minimized Levitation
title_full Comb Drive Designs with Minimized Levitation
title_fullStr Comb Drive Designs with Minimized Levitation
title_full_unstemmed Comb Drive Designs with Minimized Levitation
title_sort Comb Drive Designs with Minimized Levitation
dc.creator.none.fl_str_mv del Corro, Pablo Guillermo
Imoden, Matthias
Bishop, David J.
Pastoriza, Hernan
author del Corro, Pablo Guillermo
author_facet del Corro, Pablo Guillermo
Imoden, Matthias
Bishop, David J.
Pastoriza, Hernan
author_role author
author2 Imoden, Matthias
Bishop, David J.
Pastoriza, Hernan
author2_role author
author
author
dc.subject.none.fl_str_mv Actuators
Comb Drives
Levitation
Mems
topic Actuators
Comb Drives
Levitation
Mems
purl_subject.fl_str_mv https://purl.org/becyt/ford/2.2
https://purl.org/becyt/ford/2
dc.description.none.fl_txt_mv This paper presents two capacitive comb drive designs for electrostatic actuation of MEMS with the aim to eliminate the levitation effect often observed in such systems. By placing a shield over the comb drive fingers, it is possible to balance the electric field and suppress vertical forces while maintaining the desired lateral motion. By optimizing the comb geometry, we demonstrate that our approach is able to reduce the levitation by an order of magnitude and unwanted coupling of motion from out-of-plane to in-plane by a factor of 7 compared with standard comb architectures fabricated using PolyMUMPs technology, without the need of alternating comb finger polarities or additional control electrodes. Levitation was reduced to 160 nm, for 3.6 μm lateral displacement at a driving voltage of 80 V. [2016-0156]
Fil: del Corro, Pablo Guillermo. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Patagonia Norte; Argentina. Comisión Nacional de Energía Atómica. Gerencia del Area de Investigación y Aplicaciones No Nucleares. Gerencia de Física (Centro Atómico Bariloche). División Bajas Temperaturas; Argentina. Comisión Nacional de Energía Atómica. Gerencia del Área de Energía Nuclear. Instituto Balseiro; Argentina
Fil: Imoden, Matthias. École Polytechnique Fédérale de Lausanne; Suiza
Fil: Bishop, David J.. Boston University; Estados Unidos
Fil: Pastoriza, Hernan. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Patagonia Norte; Argentina. Comisión Nacional de Energía Atómica. Gerencia del Area de Investigación y Aplicaciones No Nucleares. Gerencia de Física (Centro Atómico Bariloche). División Bajas Temperaturas; Argentina. Comisión Nacional de Energía Atómica. Gerencia del Área de Energía Nuclear. Instituto Balseiro; Argentina
description This paper presents two capacitive comb drive designs for electrostatic actuation of MEMS with the aim to eliminate the levitation effect often observed in such systems. By placing a shield over the comb drive fingers, it is possible to balance the electric field and suppress vertical forces while maintaining the desired lateral motion. By optimizing the comb geometry, we demonstrate that our approach is able to reduce the levitation by an order of magnitude and unwanted coupling of motion from out-of-plane to in-plane by a factor of 7 compared with standard comb architectures fabricated using PolyMUMPs technology, without the need of alternating comb finger polarities or additional control electrodes. Levitation was reduced to 160 nm, for 3.6 μm lateral displacement at a driving voltage of 80 V. [2016-0156]
publishDate 2016
dc.date.none.fl_str_mv 2016-12-21
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/79033
del Corro, Pablo Guillermo; Imoden, Matthias; Bishop, David J.; Pastoriza, Hernan; Comb Drive Designs with Minimized Levitation; Institute of Electrical and Electronics Engineers; Journal Of Microelectromechanical Systems; 25; 6; 21-12-2016; 1025-1032
1057-7157
1941-0158
CONICET Digital
CONICET
url http://hdl.handle.net/11336/79033
identifier_str_mv del Corro, Pablo Guillermo; Imoden, Matthias; Bishop, David J.; Pastoriza, Hernan; Comb Drive Designs with Minimized Levitation; Institute of Electrical and Electronics Engineers; Journal Of Microelectromechanical Systems; 25; 6; 21-12-2016; 1025-1032
1057-7157
1941-0158
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/doi/10.1109/JMEMS.2016.2614965
info:eu-repo/semantics/altIdentifier/url/https://ieeexplore.ieee.org/document/7605552
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
dc.publisher.none.fl_str_mv Institute of Electrical and Electronics Engineers
publisher.none.fl_str_mv Institute of Electrical and Electronics Engineers
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
_version_ 1842268935325483008
score 13.13397

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