Single ended capacitive self-sensing system for comb drives driven XY nanopositioners

Autores
del Corro, Pablo Guillermo; Imboden, Matthias; Perez, Diego Javier; Bishop, David J.; Pastoriza, Hernan
Año de publicación
2018
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
This paper presents the implementation of a system to capacitively self-sense the position of a comb drive based MEMS XY nanopositioner from a single common node. The nanopositioner was fabricated using the multi-users PolyMUMPs process, on which comb capacitors fringe fields are large and out of plane forces cause considerable deflection. An extensive analysis of the comb-drive capacitance including the levitation effects and its correlation to the measurements is presented. Each axis is independently measured using frequency division multiplexing (FDM) techniques. Taking advantage of the symmetry of the nanopositioner itself, the sensitivity is doubled while eliminating the intrinsic capacitance of the device. The electrical measured noise is 2.5 aF/Hz, for a sensing voltage Vsen = 3Vrms and fsen = 150 kHz, which is equivalent to 1.1 nm/Hz lateral displacement noise. This scheme can also be extended to N-degree of freedom nanopositioners.
Fil: del Corro, Pablo Guillermo. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; Argentina
Fil: Imboden, Matthias. École Polytechnique Fédérale de Lausanne; Suiza
Fil: Perez, Diego Javier. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Boston University; Estados Unidos
Fil: Bishop, David J.. Boston University; Estados Unidos
Fil: Pastoriza, Hernan. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina
Materia
CAPACITIVE DETECTION
COMB DRIVES
NANOPOSITIONERS
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-nd/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/97999
Acceder
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oai_identifier_str oai:ri.conicet.gov.ar:11336/97999
network_acronym_str CONICETDig
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network_name_str CONICET Digital (CONICET)
spelling Single ended capacitive self-sensing system for comb drives driven XY nanopositionersdel Corro, Pablo GuillermoImboden, MatthiasPerez, Diego JavierBishop, David J.Pastoriza, HernanCAPACITIVE DETECTIONCOMB DRIVESNANOPOSITIONERShttps://purl.org/becyt/ford/1.3https://purl.org/becyt/ford/1This paper presents the implementation of a system to capacitively self-sense the position of a comb drive based MEMS XY nanopositioner from a single common node. The nanopositioner was fabricated using the multi-users PolyMUMPs process, on which comb capacitors fringe fields are large and out of plane forces cause considerable deflection. An extensive analysis of the comb-drive capacitance including the levitation effects and its correlation to the measurements is presented. Each axis is independently measured using frequency division multiplexing (FDM) techniques. Taking advantage of the symmetry of the nanopositioner itself, the sensitivity is doubled while eliminating the intrinsic capacitance of the device. The electrical measured noise is 2.5 aF/Hz, for a sensing voltage Vsen = 3Vrms and fsen = 150 kHz, which is equivalent to 1.1 nm/Hz lateral displacement noise. This scheme can also be extended to N-degree of freedom nanopositioners.Fil: del Corro, Pablo Guillermo. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; ArgentinaFil: Imboden, Matthias. École Polytechnique Fédérale de Lausanne; SuizaFil: Perez, Diego Javier. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Boston University; Estados UnidosFil: Bishop, David J.. Boston University; Estados UnidosFil: Pastoriza, Hernan. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; ArgentinaElsevier Science Sa2018-03info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/97999del Corro, Pablo Guillermo; Imboden, Matthias; Perez, Diego Javier; Bishop, David J.; Pastoriza, Hernan; Single ended capacitive self-sensing system for comb drives driven XY nanopositioners; Elsevier Science Sa; Sensors and Actuators A: Physical; 271; 3-2018; 409-4170924-4247CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/doi/10.1016/j.sna.2017.11.021info:eu-repo/semantics/altIdentifier/url/https://www.sciencedirect.com/science/article/pii/S0924424717313596info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-nd/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-29T09:39:40Zoai:ri.conicet.gov.ar:11336/97999instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-29 09:39:40.97CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv Single ended capacitive self-sensing system for comb drives driven XY nanopositioners
title Single ended capacitive self-sensing system for comb drives driven XY nanopositioners
spellingShingle Single ended capacitive self-sensing system for comb drives driven XY nanopositioners
del Corro, Pablo Guillermo
CAPACITIVE DETECTION
COMB DRIVES
NANOPOSITIONERS
title_short Single ended capacitive self-sensing system for comb drives driven XY nanopositioners
title_full Single ended capacitive self-sensing system for comb drives driven XY nanopositioners
title_fullStr Single ended capacitive self-sensing system for comb drives driven XY nanopositioners
title_full_unstemmed Single ended capacitive self-sensing system for comb drives driven XY nanopositioners
title_sort Single ended capacitive self-sensing system for comb drives driven XY nanopositioners
dc.creator.none.fl_str_mv del Corro, Pablo Guillermo
Imboden, Matthias
Perez, Diego Javier
Bishop, David J.
Pastoriza, Hernan
author del Corro, Pablo Guillermo
author_facet del Corro, Pablo Guillermo
Imboden, Matthias
Perez, Diego Javier
Bishop, David J.
Pastoriza, Hernan
author_role author
author2 Imboden, Matthias
Perez, Diego Javier
Bishop, David J.
Pastoriza, Hernan
author2_role author
author
author
author
dc.subject.none.fl_str_mv CAPACITIVE DETECTION
COMB DRIVES
NANOPOSITIONERS
topic CAPACITIVE DETECTION
COMB DRIVES
NANOPOSITIONERS
purl_subject.fl_str_mv https://purl.org/becyt/ford/1.3
https://purl.org/becyt/ford/1
dc.description.none.fl_txt_mv This paper presents the implementation of a system to capacitively self-sense the position of a comb drive based MEMS XY nanopositioner from a single common node. The nanopositioner was fabricated using the multi-users PolyMUMPs process, on which comb capacitors fringe fields are large and out of plane forces cause considerable deflection. An extensive analysis of the comb-drive capacitance including the levitation effects and its correlation to the measurements is presented. Each axis is independently measured using frequency division multiplexing (FDM) techniques. Taking advantage of the symmetry of the nanopositioner itself, the sensitivity is doubled while eliminating the intrinsic capacitance of the device. The electrical measured noise is 2.5 aF/Hz, for a sensing voltage Vsen = 3Vrms and fsen = 150 kHz, which is equivalent to 1.1 nm/Hz lateral displacement noise. This scheme can also be extended to N-degree of freedom nanopositioners.
Fil: del Corro, Pablo Guillermo. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; Argentina
Fil: Imboden, Matthias. École Polytechnique Fédérale de Lausanne; Suiza
Fil: Perez, Diego Javier. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Boston University; Estados Unidos
Fil: Bishop, David J.. Boston University; Estados Unidos
Fil: Pastoriza, Hernan. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina
description This paper presents the implementation of a system to capacitively self-sense the position of a comb drive based MEMS XY nanopositioner from a single common node. The nanopositioner was fabricated using the multi-users PolyMUMPs process, on which comb capacitors fringe fields are large and out of plane forces cause considerable deflection. An extensive analysis of the comb-drive capacitance including the levitation effects and its correlation to the measurements is presented. Each axis is independently measured using frequency division multiplexing (FDM) techniques. Taking advantage of the symmetry of the nanopositioner itself, the sensitivity is doubled while eliminating the intrinsic capacitance of the device. The electrical measured noise is 2.5 aF/Hz, for a sensing voltage Vsen = 3Vrms and fsen = 150 kHz, which is equivalent to 1.1 nm/Hz lateral displacement noise. This scheme can also be extended to N-degree of freedom nanopositioners.
publishDate 2018
dc.date.none.fl_str_mv 2018-03
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/97999
del Corro, Pablo Guillermo; Imboden, Matthias; Perez, Diego Javier; Bishop, David J.; Pastoriza, Hernan; Single ended capacitive self-sensing system for comb drives driven XY nanopositioners; Elsevier Science Sa; Sensors and Actuators A: Physical; 271; 3-2018; 409-417
0924-4247
CONICET Digital
CONICET
url http://hdl.handle.net/11336/97999
identifier_str_mv del Corro, Pablo Guillermo; Imboden, Matthias; Perez, Diego Javier; Bishop, David J.; Pastoriza, Hernan; Single ended capacitive self-sensing system for comb drives driven XY nanopositioners; Elsevier Science Sa; Sensors and Actuators A: Physical; 271; 3-2018; 409-417
0924-4247
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/doi/10.1016/j.sna.2017.11.021
info:eu-repo/semantics/altIdentifier/url/https://www.sciencedirect.com/science/article/pii/S0924424717313596
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-nd/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-nd/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
dc.publisher.none.fl_str_mv Elsevier Science Sa
publisher.none.fl_str_mv Elsevier Science Sa
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
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score 13.069144

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