Single ended capacitive self-sensing system for comb drives driven XY nanopositioners
- Autores
- del Corro, Pablo Guillermo; Imboden, Matthias; Perez, Diego Javier; Bishop, David J.; Pastoriza, Hernan
- Año de publicación
- 2018
- Idioma
- inglés
- Tipo de recurso
- artículo
- Estado
- versión publicada
- Descripción
- This paper presents the implementation of a system to capacitively self-sense the position of a comb drive based MEMS XY nanopositioner from a single common node. The nanopositioner was fabricated using the multi-users PolyMUMPs process, on which comb capacitors fringe fields are large and out of plane forces cause considerable deflection. An extensive analysis of the comb-drive capacitance including the levitation effects and its correlation to the measurements is presented. Each axis is independently measured using frequency division multiplexing (FDM) techniques. Taking advantage of the symmetry of the nanopositioner itself, the sensitivity is doubled while eliminating the intrinsic capacitance of the device. The electrical measured noise is 2.5 aF/Hz, for a sensing voltage Vsen = 3Vrms and fsen = 150 kHz, which is equivalent to 1.1 nm/Hz lateral displacement noise. This scheme can also be extended to N-degree of freedom nanopositioners.
Fil: del Corro, Pablo Guillermo. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; Argentina
Fil: Imboden, Matthias. École Polytechnique Fédérale de Lausanne; Suiza
Fil: Perez, Diego Javier. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Boston University; Estados Unidos
Fil: Bishop, David J.. Boston University; Estados Unidos
Fil: Pastoriza, Hernan. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina - Materia
-
CAPACITIVE DETECTION
COMB DRIVES
NANOPOSITIONERS - Nivel de accesibilidad
- acceso abierto
- Condiciones de uso
- https://creativecommons.org/licenses/by-nc-nd/2.5/ar/
- Repositorio
- Institución
- Consejo Nacional de Investigaciones Científicas y Técnicas
- OAI Identificador
- oai:ri.conicet.gov.ar:11336/97999
Ver los metadatos del registro completo
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Single ended capacitive self-sensing system for comb drives driven XY nanopositionersdel Corro, Pablo GuillermoImboden, MatthiasPerez, Diego JavierBishop, David J.Pastoriza, HernanCAPACITIVE DETECTIONCOMB DRIVESNANOPOSITIONERShttps://purl.org/becyt/ford/1.3https://purl.org/becyt/ford/1This paper presents the implementation of a system to capacitively self-sense the position of a comb drive based MEMS XY nanopositioner from a single common node. The nanopositioner was fabricated using the multi-users PolyMUMPs process, on which comb capacitors fringe fields are large and out of plane forces cause considerable deflection. An extensive analysis of the comb-drive capacitance including the levitation effects and its correlation to the measurements is presented. Each axis is independently measured using frequency division multiplexing (FDM) techniques. Taking advantage of the symmetry of the nanopositioner itself, the sensitivity is doubled while eliminating the intrinsic capacitance of the device. The electrical measured noise is 2.5 aF/Hz, for a sensing voltage Vsen = 3Vrms and fsen = 150 kHz, which is equivalent to 1.1 nm/Hz lateral displacement noise. This scheme can also be extended to N-degree of freedom nanopositioners.Fil: del Corro, Pablo Guillermo. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; ArgentinaFil: Imboden, Matthias. École Polytechnique Fédérale de Lausanne; SuizaFil: Perez, Diego Javier. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Boston University; Estados UnidosFil: Bishop, David J.. Boston University; Estados UnidosFil: Pastoriza, Hernan. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; ArgentinaElsevier Science Sa2018-03info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/97999del Corro, Pablo Guillermo; Imboden, Matthias; Perez, Diego Javier; Bishop, David J.; Pastoriza, Hernan; Single ended capacitive self-sensing system for comb drives driven XY nanopositioners; Elsevier Science Sa; Sensors and Actuators A: Physical; 271; 3-2018; 409-4170924-4247CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/doi/10.1016/j.sna.2017.11.021info:eu-repo/semantics/altIdentifier/url/https://www.sciencedirect.com/science/article/pii/S0924424717313596info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-nd/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-03T09:47:30Zoai:ri.conicet.gov.ar:11336/97999instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-03 09:47:31.09CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse |
dc.title.none.fl_str_mv |
Single ended capacitive self-sensing system for comb drives driven XY nanopositioners |
title |
Single ended capacitive self-sensing system for comb drives driven XY nanopositioners |
spellingShingle |
Single ended capacitive self-sensing system for comb drives driven XY nanopositioners del Corro, Pablo Guillermo CAPACITIVE DETECTION COMB DRIVES NANOPOSITIONERS |
title_short |
Single ended capacitive self-sensing system for comb drives driven XY nanopositioners |
title_full |
Single ended capacitive self-sensing system for comb drives driven XY nanopositioners |
title_fullStr |
Single ended capacitive self-sensing system for comb drives driven XY nanopositioners |
title_full_unstemmed |
Single ended capacitive self-sensing system for comb drives driven XY nanopositioners |
title_sort |
Single ended capacitive self-sensing system for comb drives driven XY nanopositioners |
dc.creator.none.fl_str_mv |
del Corro, Pablo Guillermo Imboden, Matthias Perez, Diego Javier Bishop, David J. Pastoriza, Hernan |
author |
del Corro, Pablo Guillermo |
author_facet |
del Corro, Pablo Guillermo Imboden, Matthias Perez, Diego Javier Bishop, David J. Pastoriza, Hernan |
author_role |
author |
author2 |
Imboden, Matthias Perez, Diego Javier Bishop, David J. Pastoriza, Hernan |
author2_role |
author author author author |
dc.subject.none.fl_str_mv |
CAPACITIVE DETECTION COMB DRIVES NANOPOSITIONERS |
topic |
CAPACITIVE DETECTION COMB DRIVES NANOPOSITIONERS |
purl_subject.fl_str_mv |
https://purl.org/becyt/ford/1.3 https://purl.org/becyt/ford/1 |
dc.description.none.fl_txt_mv |
This paper presents the implementation of a system to capacitively self-sense the position of a comb drive based MEMS XY nanopositioner from a single common node. The nanopositioner was fabricated using the multi-users PolyMUMPs process, on which comb capacitors fringe fields are large and out of plane forces cause considerable deflection. An extensive analysis of the comb-drive capacitance including the levitation effects and its correlation to the measurements is presented. Each axis is independently measured using frequency division multiplexing (FDM) techniques. Taking advantage of the symmetry of the nanopositioner itself, the sensitivity is doubled while eliminating the intrinsic capacitance of the device. The electrical measured noise is 2.5 aF/Hz, for a sensing voltage Vsen = 3Vrms and fsen = 150 kHz, which is equivalent to 1.1 nm/Hz lateral displacement noise. This scheme can also be extended to N-degree of freedom nanopositioners. Fil: del Corro, Pablo Guillermo. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; Argentina Fil: Imboden, Matthias. École Polytechnique Fédérale de Lausanne; Suiza Fil: Perez, Diego Javier. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Boston University; Estados Unidos Fil: Bishop, David J.. Boston University; Estados Unidos Fil: Pastoriza, Hernan. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina |
description |
This paper presents the implementation of a system to capacitively self-sense the position of a comb drive based MEMS XY nanopositioner from a single common node. The nanopositioner was fabricated using the multi-users PolyMUMPs process, on which comb capacitors fringe fields are large and out of plane forces cause considerable deflection. An extensive analysis of the comb-drive capacitance including the levitation effects and its correlation to the measurements is presented. Each axis is independently measured using frequency division multiplexing (FDM) techniques. Taking advantage of the symmetry of the nanopositioner itself, the sensitivity is doubled while eliminating the intrinsic capacitance of the device. The electrical measured noise is 2.5 aF/Hz, for a sensing voltage Vsen = 3Vrms and fsen = 150 kHz, which is equivalent to 1.1 nm/Hz lateral displacement noise. This scheme can also be extended to N-degree of freedom nanopositioners. |
publishDate |
2018 |
dc.date.none.fl_str_mv |
2018-03 |
dc.type.none.fl_str_mv |
info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion http://purl.org/coar/resource_type/c_6501 info:ar-repo/semantics/articulo |
format |
article |
status_str |
publishedVersion |
dc.identifier.none.fl_str_mv |
http://hdl.handle.net/11336/97999 del Corro, Pablo Guillermo; Imboden, Matthias; Perez, Diego Javier; Bishop, David J.; Pastoriza, Hernan; Single ended capacitive self-sensing system for comb drives driven XY nanopositioners; Elsevier Science Sa; Sensors and Actuators A: Physical; 271; 3-2018; 409-417 0924-4247 CONICET Digital CONICET |
url |
http://hdl.handle.net/11336/97999 |
identifier_str_mv |
del Corro, Pablo Guillermo; Imboden, Matthias; Perez, Diego Javier; Bishop, David J.; Pastoriza, Hernan; Single ended capacitive self-sensing system for comb drives driven XY nanopositioners; Elsevier Science Sa; Sensors and Actuators A: Physical; 271; 3-2018; 409-417 0924-4247 CONICET Digital CONICET |
dc.language.none.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.sna.2017.11.021 info:eu-repo/semantics/altIdentifier/url/https://www.sciencedirect.com/science/article/pii/S0924424717313596 |
dc.rights.none.fl_str_mv |
info:eu-repo/semantics/openAccess https://creativecommons.org/licenses/by-nc-nd/2.5/ar/ |
eu_rights_str_mv |
openAccess |
rights_invalid_str_mv |
https://creativecommons.org/licenses/by-nc-nd/2.5/ar/ |
dc.format.none.fl_str_mv |
application/pdf application/pdf |
dc.publisher.none.fl_str_mv |
Elsevier Science Sa |
publisher.none.fl_str_mv |
Elsevier Science Sa |
dc.source.none.fl_str_mv |
reponame:CONICET Digital (CONICET) instname:Consejo Nacional de Investigaciones Científicas y Técnicas |
reponame_str |
CONICET Digital (CONICET) |
collection |
CONICET Digital (CONICET) |
instname_str |
Consejo Nacional de Investigaciones Científicas y Técnicas |
repository.name.fl_str_mv |
CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas |
repository.mail.fl_str_mv |
dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar |
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1842268864558137344 |
score |
13.13397 |