Large-grained oriented polycrystalline silicon thin films prepared by nickel-silicide-induced crystallization

Autores
Schmidt, Javier Alejandro; Budini, Nicolas; Rinaldi, Pablo Andres; Arce, Roberto Delio; Buitrago, Roman Horacio
Año de publicación
2008
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
Nickel-silicide-induced crystallization of hydrogenated amorphous silicon thin films has been investigated. Intrinsic and doped films were deposited on glass substrates by HF-PECVD, and Ni was dc sputtered on top. Nucleation and growth of grains were followed by optical microscopy, scanning electron microscopy (SEM), UV reflectance and X-ray diffraction. Homogeneous, large and oriented grains, with diameters over 25 μm, were obtained in intrinsic and lightly boron-doped films. Phosphorous-doped films presented a random needle-like growing mechanism, instead of the disk shape shown by the other samples. The effect of doping elements on the crystallization process is discussed.
Fil: Schmidt, Javier Alejandro. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Fil: Budini, Nicolas. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Fil: Rinaldi, Pablo Andres. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Fil: Arce, Roberto Delio. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Fil: Buitrago, Roman Horacio. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Materia
Optical Microscopy
Recrystallization
X-Ray Diffraction
Seed Crystals
Semiconducting Silicon
Solar Cells
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/25381
Acceder
id CONICETDig_5d6b4af578e5be1799ef01cedb6c477b
oai_identifier_str oai:ri.conicet.gov.ar:11336/25381
network_acronym_str CONICETDig
repository_id_str 3498
network_name_str CONICET Digital (CONICET)
spelling Large-grained oriented polycrystalline silicon thin films prepared by nickel-silicide-induced crystallizationSchmidt, Javier AlejandroBudini, NicolasRinaldi, Pablo AndresArce, Roberto DelioBuitrago, Roman HoracioOptical MicroscopyRecrystallizationX-Ray DiffractionSeed CrystalsSemiconducting SiliconSolar Cellshttps://purl.org/becyt/ford/1.3https://purl.org/becyt/ford/1Nickel-silicide-induced crystallization of hydrogenated amorphous silicon thin films has been investigated. Intrinsic and doped films were deposited on glass substrates by HF-PECVD, and Ni was dc sputtered on top. Nucleation and growth of grains were followed by optical microscopy, scanning electron microscopy (SEM), UV reflectance and X-ray diffraction. Homogeneous, large and oriented grains, with diameters over 25 μm, were obtained in intrinsic and lightly boron-doped films. Phosphorous-doped films presented a random needle-like growing mechanism, instead of the disk shape shown by the other samples. The effect of doping elements on the crystallization process is discussed.Fil: Schmidt, Javier Alejandro. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; ArgentinaFil: Budini, Nicolas. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; ArgentinaFil: Rinaldi, Pablo Andres. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; ArgentinaFil: Arce, Roberto Delio. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; ArgentinaFil: Buitrago, Roman Horacio. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; ArgentinaElsevier Science2008-12info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/25381Schmidt, Javier Alejandro; Budini, Nicolas; Rinaldi, Pablo Andres; Arce, Roberto Delio; Buitrago, Roman Horacio; Large-grained oriented polycrystalline silicon thin films prepared by nickel-silicide-induced crystallization; Elsevier Science; Journal of Crystal Growth; 311; 1; 12-2008; 54-580022-0248CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/doi/10.1016/j.jcrysgro.2008.10.027info:eu-repo/semantics/altIdentifier/url/http://www.sciencedirect.com/science/article/pii/S0022024808010889info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-03T09:50:07Zoai:ri.conicet.gov.ar:11336/25381instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-03 09:50:07.719CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv Large-grained oriented polycrystalline silicon thin films prepared by nickel-silicide-induced crystallization
title Large-grained oriented polycrystalline silicon thin films prepared by nickel-silicide-induced crystallization
spellingShingle Large-grained oriented polycrystalline silicon thin films prepared by nickel-silicide-induced crystallization
Schmidt, Javier Alejandro
Optical Microscopy
Recrystallization
X-Ray Diffraction
Seed Crystals
Semiconducting Silicon
Solar Cells
title_short Large-grained oriented polycrystalline silicon thin films prepared by nickel-silicide-induced crystallization
title_full Large-grained oriented polycrystalline silicon thin films prepared by nickel-silicide-induced crystallization
title_fullStr Large-grained oriented polycrystalline silicon thin films prepared by nickel-silicide-induced crystallization
title_full_unstemmed Large-grained oriented polycrystalline silicon thin films prepared by nickel-silicide-induced crystallization
title_sort Large-grained oriented polycrystalline silicon thin films prepared by nickel-silicide-induced crystallization
dc.creator.none.fl_str_mv Schmidt, Javier Alejandro
Budini, Nicolas
Rinaldi, Pablo Andres
Arce, Roberto Delio
Buitrago, Roman Horacio
author Schmidt, Javier Alejandro
author_facet Schmidt, Javier Alejandro
Budini, Nicolas
Rinaldi, Pablo Andres
Arce, Roberto Delio
Buitrago, Roman Horacio
author_role author
author2 Budini, Nicolas
Rinaldi, Pablo Andres
Arce, Roberto Delio
Buitrago, Roman Horacio
author2_role author
author
author
author
dc.subject.none.fl_str_mv Optical Microscopy
Recrystallization
X-Ray Diffraction
Seed Crystals
Semiconducting Silicon
Solar Cells
topic Optical Microscopy
Recrystallization
X-Ray Diffraction
Seed Crystals
Semiconducting Silicon
Solar Cells
purl_subject.fl_str_mv https://purl.org/becyt/ford/1.3
https://purl.org/becyt/ford/1
dc.description.none.fl_txt_mv Nickel-silicide-induced crystallization of hydrogenated amorphous silicon thin films has been investigated. Intrinsic and doped films were deposited on glass substrates by HF-PECVD, and Ni was dc sputtered on top. Nucleation and growth of grains were followed by optical microscopy, scanning electron microscopy (SEM), UV reflectance and X-ray diffraction. Homogeneous, large and oriented grains, with diameters over 25 μm, were obtained in intrinsic and lightly boron-doped films. Phosphorous-doped films presented a random needle-like growing mechanism, instead of the disk shape shown by the other samples. The effect of doping elements on the crystallization process is discussed.
Fil: Schmidt, Javier Alejandro. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Fil: Budini, Nicolas. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Fil: Rinaldi, Pablo Andres. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Fil: Arce, Roberto Delio. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Fil: Buitrago, Roman Horacio. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
description Nickel-silicide-induced crystallization of hydrogenated amorphous silicon thin films has been investigated. Intrinsic and doped films were deposited on glass substrates by HF-PECVD, and Ni was dc sputtered on top. Nucleation and growth of grains were followed by optical microscopy, scanning electron microscopy (SEM), UV reflectance and X-ray diffraction. Homogeneous, large and oriented grains, with diameters over 25 μm, were obtained in intrinsic and lightly boron-doped films. Phosphorous-doped films presented a random needle-like growing mechanism, instead of the disk shape shown by the other samples. The effect of doping elements on the crystallization process is discussed.
publishDate 2008
dc.date.none.fl_str_mv 2008-12
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/25381
Schmidt, Javier Alejandro; Budini, Nicolas; Rinaldi, Pablo Andres; Arce, Roberto Delio; Buitrago, Roman Horacio; Large-grained oriented polycrystalline silicon thin films prepared by nickel-silicide-induced crystallization; Elsevier Science; Journal of Crystal Growth; 311; 1; 12-2008; 54-58
0022-0248
CONICET Digital
CONICET
url http://hdl.handle.net/11336/25381
identifier_str_mv Schmidt, Javier Alejandro; Budini, Nicolas; Rinaldi, Pablo Andres; Arce, Roberto Delio; Buitrago, Roman Horacio; Large-grained oriented polycrystalline silicon thin films prepared by nickel-silicide-induced crystallization; Elsevier Science; Journal of Crystal Growth; 311; 1; 12-2008; 54-58
0022-0248
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/doi/10.1016/j.jcrysgro.2008.10.027
info:eu-repo/semantics/altIdentifier/url/http://www.sciencedirect.com/science/article/pii/S0022024808010889
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
application/pdf
application/pdf
application/pdf
application/pdf
dc.publisher.none.fl_str_mv Elsevier Science
publisher.none.fl_str_mv Elsevier Science
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
_version_ 1842269014287450112
score 13.13397

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