CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering

Autores
Chiasera, A.; Macchi, Carlos Eugenio; Mariazzi, C.; Valligatla, S.; Lunelli, L.; Pederzolli, C.; Rao, D. N.; Somoza, Alberto Horacio; Brusa, R. S.; Ferrari, M.
Año de publicación
2013
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
GeO2 transparent glass ceramic planar waveguides were fabricated by a RF-sputtering technique and then irradiated by a pulsed CO2 laser. The effects of CO2 laser processing on the optical and structural properties of the waveguides were evaluated by different techniques including m-line, micro-Raman spectroscopy, atomic force microscopy, and positron annihilation spectroscopy. After laser annealing, an increase of the refractive index of approximately 0.04 at 1.5 μm and a decrease of the attenuation coefficient from 0.9 to 0.5 db/cm at 1.5 μm was observed. Raman spectroscopy and microscopy results put in evidence that the system embeds GeO2 nanocrystals and their phase varies with the irradiation time. Moreover, positron annihilation spectroscopy was used to study the depth profiling of the as prepared and laser annealed samples. The obtained results yielded information on the structural changes produced after the irradiation process inside the waveguiding films of approximately 1 μm thickness. In addition, a density value of the amorphous GeO2 samples was evaluated.
Materia
Ciencias Físicas
Óptica y Fotónica
Espectrometría Raman
Rayos Láser
Nivel de accesibilidad
acceso abierto
Condiciones de uso
http://creativecommons.org/licenses/by-nc-sa/4.0/
Repositorio
CIC Digital (CICBA)
Institución
Comisión de Investigaciones Científicas de la Provincia de Buenos Aires
OAI Identificador
oai:digital.cic.gba.gob.ar:11746/5895

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oai_identifier_str oai:digital.cic.gba.gob.ar:11746/5895
network_acronym_str CICBA
repository_id_str 9441
network_name_str CIC Digital (CICBA)
spelling CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputteringChiasera, A.Macchi, Carlos EugenioMariazzi, C.Valligatla, S.Lunelli, L.Pederzolli, C.Rao, D. N.Somoza, Alberto HoracioBrusa, R. S.Ferrari, M.Ciencias FísicasÓptica y FotónicaEspectrometría RamanRayos LáserGeO2 transparent glass ceramic planar waveguides were fabricated by a RF-sputtering technique and then irradiated by a pulsed CO2 laser. The effects of CO2 laser processing on the optical and structural properties of the waveguides were evaluated by different techniques including m-line, micro-Raman spectroscopy, atomic force microscopy, and positron annihilation spectroscopy. After laser annealing, an increase of the refractive index of approximately 0.04 at 1.5 μm and a decrease of the attenuation coefficient from 0.9 to 0.5 db/cm at 1.5 μm was observed. Raman spectroscopy and microscopy results put in evidence that the system embeds GeO2 nanocrystals and their phase varies with the irradiation time. Moreover, positron annihilation spectroscopy was used to study the depth profiling of the as prepared and laser annealed samples. The obtained results yielded information on the structural changes produced after the irradiation process inside the waveguiding films of approximately 1 μm thickness. In addition, a density value of the amorphous GeO2 samples was evaluated.Optical Society of America2013-09info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfhttps://digital.cic.gba.gob.ar/handle/11746/5895enginfo:eu-repo/semantics/altIdentifier/doi/10.1364/OME.3.001561info:eu-repo/semantics/openAccesshttp://creativecommons.org/licenses/by-nc-sa/4.0/reponame:CIC Digital (CICBA)instname:Comisión de Investigaciones Científicas de la Provincia de Buenos Airesinstacron:CICBA2025-09-29T13:39:52Zoai:digital.cic.gba.gob.ar:11746/5895Institucionalhttp://digital.cic.gba.gob.arOrganismo científico-tecnológicoNo correspondehttp://digital.cic.gba.gob.ar/oai/snrdmarisa.degiusti@sedici.unlp.edu.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:94412025-09-29 13:39:52.904CIC Digital (CICBA) - Comisión de Investigaciones Científicas de la Provincia de Buenos Airesfalse
dc.title.none.fl_str_mv CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering
title CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering
spellingShingle CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering
Chiasera, A.
Ciencias Físicas
Óptica y Fotónica
Espectrometría Raman
Rayos Láser
title_short CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering
title_full CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering
title_fullStr CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering
title_full_unstemmed CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering
title_sort CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering
dc.creator.none.fl_str_mv Chiasera, A.
Macchi, Carlos Eugenio
Mariazzi, C.
Valligatla, S.
Lunelli, L.
Pederzolli, C.
Rao, D. N.
Somoza, Alberto Horacio
Brusa, R. S.
Ferrari, M.
author Chiasera, A.
author_facet Chiasera, A.
Macchi, Carlos Eugenio
Mariazzi, C.
Valligatla, S.
Lunelli, L.
Pederzolli, C.
Rao, D. N.
Somoza, Alberto Horacio
Brusa, R. S.
Ferrari, M.
author_role author
author2 Macchi, Carlos Eugenio
Mariazzi, C.
Valligatla, S.
Lunelli, L.
Pederzolli, C.
Rao, D. N.
Somoza, Alberto Horacio
Brusa, R. S.
Ferrari, M.
author2_role author
author
author
author
author
author
author
author
author
dc.subject.none.fl_str_mv Ciencias Físicas
Óptica y Fotónica
Espectrometría Raman
Rayos Láser
topic Ciencias Físicas
Óptica y Fotónica
Espectrometría Raman
Rayos Láser
dc.description.none.fl_txt_mv GeO2 transparent glass ceramic planar waveguides were fabricated by a RF-sputtering technique and then irradiated by a pulsed CO2 laser. The effects of CO2 laser processing on the optical and structural properties of the waveguides were evaluated by different techniques including m-line, micro-Raman spectroscopy, atomic force microscopy, and positron annihilation spectroscopy. After laser annealing, an increase of the refractive index of approximately 0.04 at 1.5 μm and a decrease of the attenuation coefficient from 0.9 to 0.5 db/cm at 1.5 μm was observed. Raman spectroscopy and microscopy results put in evidence that the system embeds GeO2 nanocrystals and their phase varies with the irradiation time. Moreover, positron annihilation spectroscopy was used to study the depth profiling of the as prepared and laser annealed samples. The obtained results yielded information on the structural changes produced after the irradiation process inside the waveguiding films of approximately 1 μm thickness. In addition, a density value of the amorphous GeO2 samples was evaluated.
description GeO2 transparent glass ceramic planar waveguides were fabricated by a RF-sputtering technique and then irradiated by a pulsed CO2 laser. The effects of CO2 laser processing on the optical and structural properties of the waveguides were evaluated by different techniques including m-line, micro-Raman spectroscopy, atomic force microscopy, and positron annihilation spectroscopy. After laser annealing, an increase of the refractive index of approximately 0.04 at 1.5 μm and a decrease of the attenuation coefficient from 0.9 to 0.5 db/cm at 1.5 μm was observed. Raman spectroscopy and microscopy results put in evidence that the system embeds GeO2 nanocrystals and their phase varies with the irradiation time. Moreover, positron annihilation spectroscopy was used to study the depth profiling of the as prepared and laser annealed samples. The obtained results yielded information on the structural changes produced after the irradiation process inside the waveguiding films of approximately 1 μm thickness. In addition, a density value of the amorphous GeO2 samples was evaluated.
publishDate 2013
dc.date.none.fl_str_mv 2013-09
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv https://digital.cic.gba.gob.ar/handle/11746/5895
url https://digital.cic.gba.gob.ar/handle/11746/5895
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/doi/10.1364/OME.3.001561
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
http://creativecommons.org/licenses/by-nc-sa/4.0/
eu_rights_str_mv openAccess
rights_invalid_str_mv http://creativecommons.org/licenses/by-nc-sa/4.0/
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Optical Society of America
publisher.none.fl_str_mv Optical Society of America
dc.source.none.fl_str_mv reponame:CIC Digital (CICBA)
instname:Comisión de Investigaciones Científicas de la Provincia de Buenos Aires
instacron:CICBA
reponame_str CIC Digital (CICBA)
collection CIC Digital (CICBA)
instname_str Comisión de Investigaciones Científicas de la Provincia de Buenos Aires
instacron_str CICBA
institution CICBA
repository.name.fl_str_mv CIC Digital (CICBA) - Comisión de Investigaciones Científicas de la Provincia de Buenos Aires
repository.mail.fl_str_mv marisa.degiusti@sedici.unlp.edu.ar
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score 13.070432