CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering

Autores
Chiasera, A.; Macchi, Carlos Eugenio; Mariazzi, C.; Valligatla, S.; Lunelli, L.; Pederzolli, C.; Rao, D. N.; Somoza, Alberto Horacio; Brusa, R. S.; Ferrari, M.
Año de publicación
2013
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
GeO2 transparent glass ceramic planar waveguides were fabricated by a RF-sputtering technique and then irradiated by a pulsed CO2 laser. The effects of CO2 laser processing on the optical and structural properties of the waveguides were evaluated by different techniques including m-line, micro-Raman spectroscopy, atomic force microscopy, and positron annihilation spectroscopy. After laser annealing, an increase of the refractive index of approximately 0.04 at 1.5 μm and a decrease of the attenuation coefficient from 0.9 to 0.5 db/cm at 1.5 μm was observed. Raman spectroscopy and microscopy results put in evidence that the system embeds GeO2 nanocrystals and their phase varies with the irradiation time. Moreover, positron annihilation spectroscopy was used to study the depth profiling of the as prepared and laser annealed samples. The obtained results yielded information on the structural changes produced after the irradiation process inside the waveguiding films of approximately 1 μm thickness. In addition, a density value of the amorphous GeO2 samples was evaluated.
Fil: Chiasera, A.. Consiglio Nazionale delle Ricerche. Istituto di Fotonica e Nanotecnologie; Italia
Fil: Macchi, Carlos Eugenio. Universidad Nacional del Centro de la Provincia de Buenos Aires. Facultad de Ciencias Exactas. Instituto de Física de Materiales; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Tandil. Centro de Investigaciones en Física e Ingeniería del Centro de la Provincia de Buenos Aires; Argentina
Fil: Mariazzi, C.. Università di Trento. Dipartimento di Fisica; Italia
Fil: Valligatla, S.. Consiglio Nazionale delle Ricerche. Istituto di Fotonica e Nanotecnologie; Italia. University of Hyderabad. School of Physics; India. Università di Trento. Dipartimento di Fisica; Italia
Fil: Lunelli, L.. Bruno Kessler Foundation; Italia. National Research Council Institute of Biophysics; Italia
Fil: Pederzolli, C.. Bruno Kessler Foundation; Italia
Fil: Rao, D. N.. University of Hyderabad. School of Physics; India
Fil: Somoza, Alberto Horacio. Universidad Nacional del Centro de la Provincia de Buenos Aires. Facultad de Ciencias Exactas. Instituto de Física de Materiales; Argentina. Provincia de Buenos Aires. Gobernación. Comisión de Investigaciones Científicas; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Tandil. Centro de Investigaciones en Física e Ingeniería del Centro de la Provincia de Buenos Aires; Argentina
Fil: Brusa, R. S.. Università di Trento. Dipartimento di Fisica; Italia
Fil: Ferrari, M.. Consiglio Nazionale delle Ricerche. Istituto di Fotonica e Nanotecnologie; Italia
Materia
Laser materials processing
Deposition and fabrication
Optical properties
Spectroscopy, Raman
Spectroscopy, condensed matter
Guided waves
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/4610
Acceder
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oai_identifier_str oai:ri.conicet.gov.ar:11336/4610
network_acronym_str CONICETDig
repository_id_str 3498
network_name_str CONICET Digital (CONICET)
spelling CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputteringChiasera, A.Macchi, Carlos EugenioMariazzi, C.Valligatla, S.Lunelli, L.Pederzolli, C.Rao, D. N.Somoza, Alberto HoracioBrusa, R. S.Ferrari, M.Laser materials processingDeposition and fabricationOptical propertiesSpectroscopy, RamanSpectroscopy, condensed matterGuided waveshttps://purl.org/becyt/ford/1.3https://purl.org/becyt/ford/1GeO2 transparent glass ceramic planar waveguides were fabricated by a RF-sputtering technique and then irradiated by a pulsed CO2 laser. The effects of CO2 laser processing on the optical and structural properties of the waveguides were evaluated by different techniques including m-line, micro-Raman spectroscopy, atomic force microscopy, and positron annihilation spectroscopy. After laser annealing, an increase of the refractive index of approximately 0.04 at 1.5 μm and a decrease of the attenuation coefficient from 0.9 to 0.5 db/cm at 1.5 μm was observed. Raman spectroscopy and microscopy results put in evidence that the system embeds GeO2 nanocrystals and their phase varies with the irradiation time. Moreover, positron annihilation spectroscopy was used to study the depth profiling of the as prepared and laser annealed samples. The obtained results yielded information on the structural changes produced after the irradiation process inside the waveguiding films of approximately 1 μm thickness. In addition, a density value of the amorphous GeO2 samples was evaluated.Fil: Chiasera, A.. Consiglio Nazionale delle Ricerche. Istituto di Fotonica e Nanotecnologie; ItaliaFil: Macchi, Carlos Eugenio. Universidad Nacional del Centro de la Provincia de Buenos Aires. Facultad de Ciencias Exactas. Instituto de Física de Materiales; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Tandil. Centro de Investigaciones en Física e Ingeniería del Centro de la Provincia de Buenos Aires; ArgentinaFil: Mariazzi, C.. Università di Trento. Dipartimento di Fisica; ItaliaFil: Valligatla, S.. Consiglio Nazionale delle Ricerche. Istituto di Fotonica e Nanotecnologie; Italia. University of Hyderabad. School of Physics; India. Università di Trento. Dipartimento di Fisica; ItaliaFil: Lunelli, L.. Bruno Kessler Foundation; Italia. National Research Council Institute of Biophysics; ItaliaFil: Pederzolli, C.. Bruno Kessler Foundation; ItaliaFil: Rao, D. N.. University of Hyderabad. School of Physics; IndiaFil: Somoza, Alberto Horacio. Universidad Nacional del Centro de la Provincia de Buenos Aires. Facultad de Ciencias Exactas. Instituto de Física de Materiales; Argentina. Provincia de Buenos Aires. Gobernación. Comisión de Investigaciones Científicas; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Tandil. Centro de Investigaciones en Física e Ingeniería del Centro de la Provincia de Buenos Aires; ArgentinaFil: Brusa, R. S.. Università di Trento. Dipartimento di Fisica; ItaliaFil: Ferrari, M.. Consiglio Nazionale delle Ricerche. Istituto di Fotonica e Nanotecnologie; ItaliaOptical Society of America2013-08info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/4610Chiasera, A.; Macchi, Carlos Eugenio; Mariazzi, C.; Valligatla, S.; Lunelli, L.; et al.; CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering; Optical Society of America; Optical Materials Express; 3; 9; 8-2013; 1561-15702159-3930enginfo:eu-repo/semantics/altIdentifier/ark/https://www.osapublishing.org/ome/abstract.cfm?uri=ome-3-9-1561info:eu-repo/semantics/altIdentifier/doi/10.1364/OME.3.001561info:eu-repo/semantics/altIdentifier/issn/2159-3930info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-29T10:37:10Zoai:ri.conicet.gov.ar:11336/4610instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-29 10:37:11.145CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering
title CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering
spellingShingle CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering
Chiasera, A.
Laser materials processing
Deposition and fabrication
Optical properties
Spectroscopy, Raman
Spectroscopy, condensed matter
Guided waves
title_short CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering
title_full CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering
title_fullStr CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering
title_full_unstemmed CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering
title_sort CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering
dc.creator.none.fl_str_mv Chiasera, A.
Macchi, Carlos Eugenio
Mariazzi, C.
Valligatla, S.
Lunelli, L.
Pederzolli, C.
Rao, D. N.
Somoza, Alberto Horacio
Brusa, R. S.
Ferrari, M.
author Chiasera, A.
author_facet Chiasera, A.
Macchi, Carlos Eugenio
Mariazzi, C.
Valligatla, S.
Lunelli, L.
Pederzolli, C.
Rao, D. N.
Somoza, Alberto Horacio
Brusa, R. S.
Ferrari, M.
author_role author
author2 Macchi, Carlos Eugenio
Mariazzi, C.
Valligatla, S.
Lunelli, L.
Pederzolli, C.
Rao, D. N.
Somoza, Alberto Horacio
Brusa, R. S.
Ferrari, M.
author2_role author
author
author
author
author
author
author
author
author
dc.subject.none.fl_str_mv Laser materials processing
Deposition and fabrication
Optical properties
Spectroscopy, Raman
Spectroscopy, condensed matter
Guided waves
topic Laser materials processing
Deposition and fabrication
Optical properties
Spectroscopy, Raman
Spectroscopy, condensed matter
Guided waves
purl_subject.fl_str_mv https://purl.org/becyt/ford/1.3
https://purl.org/becyt/ford/1
dc.description.none.fl_txt_mv GeO2 transparent glass ceramic planar waveguides were fabricated by a RF-sputtering technique and then irradiated by a pulsed CO2 laser. The effects of CO2 laser processing on the optical and structural properties of the waveguides were evaluated by different techniques including m-line, micro-Raman spectroscopy, atomic force microscopy, and positron annihilation spectroscopy. After laser annealing, an increase of the refractive index of approximately 0.04 at 1.5 μm and a decrease of the attenuation coefficient from 0.9 to 0.5 db/cm at 1.5 μm was observed. Raman spectroscopy and microscopy results put in evidence that the system embeds GeO2 nanocrystals and their phase varies with the irradiation time. Moreover, positron annihilation spectroscopy was used to study the depth profiling of the as prepared and laser annealed samples. The obtained results yielded information on the structural changes produced after the irradiation process inside the waveguiding films of approximately 1 μm thickness. In addition, a density value of the amorphous GeO2 samples was evaluated.
Fil: Chiasera, A.. Consiglio Nazionale delle Ricerche. Istituto di Fotonica e Nanotecnologie; Italia
Fil: Macchi, Carlos Eugenio. Universidad Nacional del Centro de la Provincia de Buenos Aires. Facultad de Ciencias Exactas. Instituto de Física de Materiales; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Tandil. Centro de Investigaciones en Física e Ingeniería del Centro de la Provincia de Buenos Aires; Argentina
Fil: Mariazzi, C.. Università di Trento. Dipartimento di Fisica; Italia
Fil: Valligatla, S.. Consiglio Nazionale delle Ricerche. Istituto di Fotonica e Nanotecnologie; Italia. University of Hyderabad. School of Physics; India. Università di Trento. Dipartimento di Fisica; Italia
Fil: Lunelli, L.. Bruno Kessler Foundation; Italia. National Research Council Institute of Biophysics; Italia
Fil: Pederzolli, C.. Bruno Kessler Foundation; Italia
Fil: Rao, D. N.. University of Hyderabad. School of Physics; India
Fil: Somoza, Alberto Horacio. Universidad Nacional del Centro de la Provincia de Buenos Aires. Facultad de Ciencias Exactas. Instituto de Física de Materiales; Argentina. Provincia de Buenos Aires. Gobernación. Comisión de Investigaciones Científicas; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Tandil. Centro de Investigaciones en Física e Ingeniería del Centro de la Provincia de Buenos Aires; Argentina
Fil: Brusa, R. S.. Università di Trento. Dipartimento di Fisica; Italia
Fil: Ferrari, M.. Consiglio Nazionale delle Ricerche. Istituto di Fotonica e Nanotecnologie; Italia
description GeO2 transparent glass ceramic planar waveguides were fabricated by a RF-sputtering technique and then irradiated by a pulsed CO2 laser. The effects of CO2 laser processing on the optical and structural properties of the waveguides were evaluated by different techniques including m-line, micro-Raman spectroscopy, atomic force microscopy, and positron annihilation spectroscopy. After laser annealing, an increase of the refractive index of approximately 0.04 at 1.5 μm and a decrease of the attenuation coefficient from 0.9 to 0.5 db/cm at 1.5 μm was observed. Raman spectroscopy and microscopy results put in evidence that the system embeds GeO2 nanocrystals and their phase varies with the irradiation time. Moreover, positron annihilation spectroscopy was used to study the depth profiling of the as prepared and laser annealed samples. The obtained results yielded information on the structural changes produced after the irradiation process inside the waveguiding films of approximately 1 μm thickness. In addition, a density value of the amorphous GeO2 samples was evaluated.
publishDate 2013
dc.date.none.fl_str_mv 2013-08
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/4610
Chiasera, A.; Macchi, Carlos Eugenio; Mariazzi, C.; Valligatla, S.; Lunelli, L.; et al.; CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering; Optical Society of America; Optical Materials Express; 3; 9; 8-2013; 1561-1570
2159-3930
url http://hdl.handle.net/11336/4610
identifier_str_mv Chiasera, A.; Macchi, Carlos Eugenio; Mariazzi, C.; Valligatla, S.; Lunelli, L.; et al.; CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering; Optical Society of America; Optical Materials Express; 3; 9; 8-2013; 1561-1570
2159-3930
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/ark/https://www.osapublishing.org/ome/abstract.cfm?uri=ome-3-9-1561
info:eu-repo/semantics/altIdentifier/doi/10.1364/OME.3.001561
info:eu-repo/semantics/altIdentifier/issn/2159-3930
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
application/pdf
dc.publisher.none.fl_str_mv Optical Society of America
publisher.none.fl_str_mv Optical Society of America
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
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score 13.070432

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