GeO2 glass ceramic planar waveguides fabricated by RF-sputtering

Autores
Chiasera, A.; Macchi, Carlos Eugenio; Mariazzi, S.; Valligatla, S.; Varas, S.; Mazzola, M.; Bazzanella, N.; Lunelli, L.; Pederzolli, C.; Rao, D. N.; Ringhini, G. C.; Somoza, Alberto Horacio; Brusa, R. S.; Ferrari, M.
Año de publicación
2014
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
GeO2 transparent glass ceramic planar waveguides were fabricated by a RF-sputtering technique and then irradiated by a pulsed CO2 laser. Different techniques like m-line, micro-Raman spectroscopy, atomic force microscopy, and positronbannihilation spectroscopy were employed to evaluate the effects of CO2 laser processing on the optical and structuralbproperties of the waveguides. The GeO2 planar waveguide after 2h of CO2 laser irradiation exhibits an increase of 0.04 inbthe refractive index, measured at 1542 nm. Moreover, the technique of laser annealing is demonstrated to significantlybreduce propagation loss in GeO2 planar waveguides due to the reduction of the scattering. Upon irradiation of the surfacebthe roughness decreases from 1.1 to 0.7 nm, as measured by AFM. Attenuation coefficients of 0.7 and 0.5 dB/cm at 1319 and 1542 nm, respectively, were measured after irradiation. Micro-Raman measurements evidence that the system embeds GeO2 nanocrystals and their phase varies with the irradiation time. Moreover, positron annihilation spectroscopy was used to study the depth profiling of the as prepared and laser annealed samples. The obtained results yielded information on the structural changes produced after the irradiation process inside the waveguiding films of approximately 1 μm thickness.
Fil: Chiasera, A. . Consiglio Nazionale delle Ricerche. Istituto Di Fotonica e Nanotecnologie; Italia
Fil: Macchi, Carlos Eugenio. Universidad Nacional del Centro de la Provincia de Buenos Aires. Facultad de Ciencias Exactas. Instituto de Física de Materiales; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Tandil; Argentina
Fil: Mariazzi, S.. Università di Trento. Dipartamento di Fisica; Italia
Fil: Valligatla, S.. Consiglio Nazionale delle Ricerche. Istituto Di Fotonica e Nanotecnologie; Italia. University of Hyderabad. School of Physics; India. Università di Trento. Dipartamento di Fisica; Italia
Fil: Varas, S.. Consiglio Nazionale delle Ricerche. Istituto Di Fotonica e Nanotecnologie; Italia
Fil: Mazzola, M.. Consiglio Nazionale delle Ricerche. Istituto Di Fotonica e Nanotecnologie; Italia
Fil: Bazzanella, N.. Università di Trento. Dipartamento di Fisica; Italia
Fil: Lunelli, L.. Bruno Kessler Foundation; Italia. Consiglio Nazionale delle Ricerche. Istituto di Biofisica; Italia
Fil: Pederzolli, C.. Bruno Kessler Foundation; Italia
Fil: Rao, D. N.. University of Hyderabad. School of Physics; India
Fil: Ringhini, G. C.. Centro Enrico Fermi; Italia
Fil: Somoza, Alberto Horacio. Universidad Nacional del Centro de la Provincia de Buenos Aires. Facultad de Ciencias Exactas. Instituto de Física de Materiales; Argentina. Provincia de Buenos Aires. Gobernación. Comisión de Investigaciones Científicas; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Tandil. Centro de Investigaciones en Física e Ingeniería del Centro de la Provincia de Buenos Aires; Argentina
Fil: Brusa, R. S.. Università di Trento. Dipartamento di Fisica; Italia
Fil: Ferrari, M.. Consiglio Nazionale delle Ricerche. Istituto Di Fotonica e Nanotecnologie; Italia
Materia
Glass Ceramic Waveguides
Co2 Lasser Irradiation
Attenuation Coefficient
Geo2 Nanocrystals
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/4612
Acceder
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network_name_str CONICET Digital (CONICET)
spelling GeO2 glass ceramic planar waveguides fabricated by RF-sputteringChiasera, A. Macchi, Carlos EugenioMariazzi, S.Valligatla, S.Varas, S.Mazzola, M.Bazzanella, N.Lunelli, L.Pederzolli, C.Rao, D. N.Ringhini, G. C.Somoza, Alberto HoracioBrusa, R. S.Ferrari, M.Glass Ceramic WaveguidesCo2 Lasser IrradiationAttenuation CoefficientGeo2 Nanocrystalshttps://purl.org/becyt/ford/1.3https://purl.org/becyt/ford/1GeO2 transparent glass ceramic planar waveguides were fabricated by a RF-sputtering technique and then irradiated by a pulsed CO2 laser. Different techniques like m-line, micro-Raman spectroscopy, atomic force microscopy, and positronbannihilation spectroscopy were employed to evaluate the effects of CO2 laser processing on the optical and structuralbproperties of the waveguides. The GeO2 planar waveguide after 2h of CO2 laser irradiation exhibits an increase of 0.04 inbthe refractive index, measured at 1542 nm. Moreover, the technique of laser annealing is demonstrated to significantlybreduce propagation loss in GeO2 planar waveguides due to the reduction of the scattering. Upon irradiation of the surfacebthe roughness decreases from 1.1 to 0.7 nm, as measured by AFM. Attenuation coefficients of 0.7 and 0.5 dB/cm at 1319 and 1542 nm, respectively, were measured after irradiation. Micro-Raman measurements evidence that the system embeds GeO2 nanocrystals and their phase varies with the irradiation time. Moreover, positron annihilation spectroscopy was used to study the depth profiling of the as prepared and laser annealed samples. The obtained results yielded information on the structural changes produced after the irradiation process inside the waveguiding films of approximately 1 μm thickness.Fil: Chiasera, A. . Consiglio Nazionale delle Ricerche. Istituto Di Fotonica e Nanotecnologie; ItaliaFil: Macchi, Carlos Eugenio. Universidad Nacional del Centro de la Provincia de Buenos Aires. Facultad de Ciencias Exactas. Instituto de Física de Materiales; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Tandil; ArgentinaFil: Mariazzi, S.. Università di Trento. Dipartamento di Fisica; ItaliaFil: Valligatla, S.. Consiglio Nazionale delle Ricerche. Istituto Di Fotonica e Nanotecnologie; Italia. University of Hyderabad. School of Physics; India. Università di Trento. Dipartamento di Fisica; ItaliaFil: Varas, S.. Consiglio Nazionale delle Ricerche. Istituto Di Fotonica e Nanotecnologie; ItaliaFil: Mazzola, M.. Consiglio Nazionale delle Ricerche. Istituto Di Fotonica e Nanotecnologie; ItaliaFil: Bazzanella, N.. Università di Trento. Dipartamento di Fisica; ItaliaFil: Lunelli, L.. Bruno Kessler Foundation; Italia. Consiglio Nazionale delle Ricerche. Istituto di Biofisica; ItaliaFil: Pederzolli, C.. Bruno Kessler Foundation; ItaliaFil: Rao, D. N.. University of Hyderabad. School of Physics; IndiaFil: Ringhini, G. C.. Centro Enrico Fermi; ItaliaFil: Somoza, Alberto Horacio. Universidad Nacional del Centro de la Provincia de Buenos Aires. Facultad de Ciencias Exactas. Instituto de Física de Materiales; Argentina. Provincia de Buenos Aires. Gobernación. Comisión de Investigaciones Científicas; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Tandil. Centro de Investigaciones en Física e Ingeniería del Centro de la Provincia de Buenos Aires; ArgentinaFil: Brusa, R. S.. Università di Trento. Dipartamento di Fisica; ItaliaFil: Ferrari, M.. Consiglio Nazionale delle Ricerche. Istituto Di Fotonica e Nanotecnologie; ItaliaSpie2014-02info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/4612Chiasera, A. ; Macchi, Carlos Eugenio; Mariazzi, S.; Valligatla, S.; Varas, S.; et al.; GeO2 glass ceramic planar waveguides fabricated by RF-sputtering; Spie; Spie; 8982; 2-2014; 1-110277-786Xenginfo:eu-repo/semantics/altIdentifier/url/http://spie.org/Publications/Proceedings/Paper/10.1117/12.2042099info:eu-repo/semantics/altIdentifier/doi/10.1117/12.2042099info:eu-repo/semantics/altIdentifier/issn/0277-786Xinfo:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-29T10:19:40Zoai:ri.conicet.gov.ar:11336/4612instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-29 10:19:41.138CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv GeO2 glass ceramic planar waveguides fabricated by RF-sputtering
title GeO2 glass ceramic planar waveguides fabricated by RF-sputtering
spellingShingle GeO2 glass ceramic planar waveguides fabricated by RF-sputtering
Chiasera, A.
Glass Ceramic Waveguides
Co2 Lasser Irradiation
Attenuation Coefficient
Geo2 Nanocrystals
title_short GeO2 glass ceramic planar waveguides fabricated by RF-sputtering
title_full GeO2 glass ceramic planar waveguides fabricated by RF-sputtering
title_fullStr GeO2 glass ceramic planar waveguides fabricated by RF-sputtering
title_full_unstemmed GeO2 glass ceramic planar waveguides fabricated by RF-sputtering
title_sort GeO2 glass ceramic planar waveguides fabricated by RF-sputtering
dc.creator.none.fl_str_mv Chiasera, A.
Macchi, Carlos Eugenio
Mariazzi, S.
Valligatla, S.
Varas, S.
Mazzola, M.
Bazzanella, N.
Lunelli, L.
Pederzolli, C.
Rao, D. N.
Ringhini, G. C.
Somoza, Alberto Horacio
Brusa, R. S.
Ferrari, M.
author Chiasera, A.
author_facet Chiasera, A.
Macchi, Carlos Eugenio
Mariazzi, S.
Valligatla, S.
Varas, S.
Mazzola, M.
Bazzanella, N.
Lunelli, L.
Pederzolli, C.
Rao, D. N.
Ringhini, G. C.
Somoza, Alberto Horacio
Brusa, R. S.
Ferrari, M.
author_role author
author2 Macchi, Carlos Eugenio
Mariazzi, S.
Valligatla, S.
Varas, S.
Mazzola, M.
Bazzanella, N.
Lunelli, L.
Pederzolli, C.
Rao, D. N.
Ringhini, G. C.
Somoza, Alberto Horacio
Brusa, R. S.
Ferrari, M.
author2_role author
author
author
author
author
author
author
author
author
author
author
author
author
dc.subject.none.fl_str_mv Glass Ceramic Waveguides
Co2 Lasser Irradiation
Attenuation Coefficient
Geo2 Nanocrystals
topic Glass Ceramic Waveguides
Co2 Lasser Irradiation
Attenuation Coefficient
Geo2 Nanocrystals
purl_subject.fl_str_mv https://purl.org/becyt/ford/1.3
https://purl.org/becyt/ford/1
dc.description.none.fl_txt_mv GeO2 transparent glass ceramic planar waveguides were fabricated by a RF-sputtering technique and then irradiated by a pulsed CO2 laser. Different techniques like m-line, micro-Raman spectroscopy, atomic force microscopy, and positronbannihilation spectroscopy were employed to evaluate the effects of CO2 laser processing on the optical and structuralbproperties of the waveguides. The GeO2 planar waveguide after 2h of CO2 laser irradiation exhibits an increase of 0.04 inbthe refractive index, measured at 1542 nm. Moreover, the technique of laser annealing is demonstrated to significantlybreduce propagation loss in GeO2 planar waveguides due to the reduction of the scattering. Upon irradiation of the surfacebthe roughness decreases from 1.1 to 0.7 nm, as measured by AFM. Attenuation coefficients of 0.7 and 0.5 dB/cm at 1319 and 1542 nm, respectively, were measured after irradiation. Micro-Raman measurements evidence that the system embeds GeO2 nanocrystals and their phase varies with the irradiation time. Moreover, positron annihilation spectroscopy was used to study the depth profiling of the as prepared and laser annealed samples. The obtained results yielded information on the structural changes produced after the irradiation process inside the waveguiding films of approximately 1 μm thickness.
Fil: Chiasera, A. . Consiglio Nazionale delle Ricerche. Istituto Di Fotonica e Nanotecnologie; Italia
Fil: Macchi, Carlos Eugenio. Universidad Nacional del Centro de la Provincia de Buenos Aires. Facultad de Ciencias Exactas. Instituto de Física de Materiales; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Tandil; Argentina
Fil: Mariazzi, S.. Università di Trento. Dipartamento di Fisica; Italia
Fil: Valligatla, S.. Consiglio Nazionale delle Ricerche. Istituto Di Fotonica e Nanotecnologie; Italia. University of Hyderabad. School of Physics; India. Università di Trento. Dipartamento di Fisica; Italia
Fil: Varas, S.. Consiglio Nazionale delle Ricerche. Istituto Di Fotonica e Nanotecnologie; Italia
Fil: Mazzola, M.. Consiglio Nazionale delle Ricerche. Istituto Di Fotonica e Nanotecnologie; Italia
Fil: Bazzanella, N.. Università di Trento. Dipartamento di Fisica; Italia
Fil: Lunelli, L.. Bruno Kessler Foundation; Italia. Consiglio Nazionale delle Ricerche. Istituto di Biofisica; Italia
Fil: Pederzolli, C.. Bruno Kessler Foundation; Italia
Fil: Rao, D. N.. University of Hyderabad. School of Physics; India
Fil: Ringhini, G. C.. Centro Enrico Fermi; Italia
Fil: Somoza, Alberto Horacio. Universidad Nacional del Centro de la Provincia de Buenos Aires. Facultad de Ciencias Exactas. Instituto de Física de Materiales; Argentina. Provincia de Buenos Aires. Gobernación. Comisión de Investigaciones Científicas; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Tandil. Centro de Investigaciones en Física e Ingeniería del Centro de la Provincia de Buenos Aires; Argentina
Fil: Brusa, R. S.. Università di Trento. Dipartamento di Fisica; Italia
Fil: Ferrari, M.. Consiglio Nazionale delle Ricerche. Istituto Di Fotonica e Nanotecnologie; Italia
description GeO2 transparent glass ceramic planar waveguides were fabricated by a RF-sputtering technique and then irradiated by a pulsed CO2 laser. Different techniques like m-line, micro-Raman spectroscopy, atomic force microscopy, and positronbannihilation spectroscopy were employed to evaluate the effects of CO2 laser processing on the optical and structuralbproperties of the waveguides. The GeO2 planar waveguide after 2h of CO2 laser irradiation exhibits an increase of 0.04 inbthe refractive index, measured at 1542 nm. Moreover, the technique of laser annealing is demonstrated to significantlybreduce propagation loss in GeO2 planar waveguides due to the reduction of the scattering. Upon irradiation of the surfacebthe roughness decreases from 1.1 to 0.7 nm, as measured by AFM. Attenuation coefficients of 0.7 and 0.5 dB/cm at 1319 and 1542 nm, respectively, were measured after irradiation. Micro-Raman measurements evidence that the system embeds GeO2 nanocrystals and their phase varies with the irradiation time. Moreover, positron annihilation spectroscopy was used to study the depth profiling of the as prepared and laser annealed samples. The obtained results yielded information on the structural changes produced after the irradiation process inside the waveguiding films of approximately 1 μm thickness.
publishDate 2014
dc.date.none.fl_str_mv 2014-02
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/4612
Chiasera, A. ; Macchi, Carlos Eugenio; Mariazzi, S.; Valligatla, S.; Varas, S.; et al.; GeO2 glass ceramic planar waveguides fabricated by RF-sputtering; Spie; Spie; 8982; 2-2014; 1-11
0277-786X
url http://hdl.handle.net/11336/4612
identifier_str_mv Chiasera, A. ; Macchi, Carlos Eugenio; Mariazzi, S.; Valligatla, S.; Varas, S.; et al.; GeO2 glass ceramic planar waveguides fabricated by RF-sputtering; Spie; Spie; 8982; 2-2014; 1-11
0277-786X
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/url/http://spie.org/Publications/Proceedings/Paper/10.1117/12.2042099
info:eu-repo/semantics/altIdentifier/doi/10.1117/12.2042099
info:eu-repo/semantics/altIdentifier/issn/0277-786X
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
dc.publisher.none.fl_str_mv Spie
publisher.none.fl_str_mv Spie
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
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score 13.070432

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