Diseño y fabricación de microinductor planar para microválvula activa para el tratamiento de glaucoma utilizando tecnología MEMS

Autores
Pérez, M. C.; Sassetti, F. L.; Guarnieri, F. A.
Año de publicación
2011
Idioma
español castellano
Tipo de recurso
documento de conferencia
Estado
versión publicada
Descripción
This paper presents the modeling, design and characterization of planar microinductor, to be used in telemetry systems that supply energy to miniaturized implants. First, a model for the electrical characteristics of planar coils will be discussed. Parasitic electrical effects that may become important at AC-frequencies of several MHz are evaluated. The fabrication process and electrical characterization of planar microcoils will be described. Different configurations of planar microinductor were made with the use of micromachining technologies such as thin film deposition, standard photolithography processes and electroplating. With this technology small coils are relatively easy to fabricate reproducibly. The parameters and performance of fabricated inductor will be evaluated by electrical measurements. Measurements show a good agreement between calculated and measured values.
Centro de Técnicas Analógico-Digitales
Materia
Ingeniería
Microinductor planar
Microválvula para glaucoma
MEMs
Microfabricación
Electroplateado
Nivel de accesibilidad
acceso abierto
Condiciones de uso
http://creativecommons.org/licenses/by-nc-sa/4.0/
Repositorio
SEDICI (UNLP)
Institución
Universidad Nacional de La Plata
OAI Identificador
oai:sedici.unlp.edu.ar:10915/121958
Acceder
id SEDICI_c0ddab747270d7573eee3a8665fd15f0
oai_identifier_str oai:sedici.unlp.edu.ar:10915/121958
network_acronym_str SEDICI
repository_id_str 1329
network_name_str SEDICI (UNLP)
spelling Diseño y fabricación de microinductor planar para microválvula activa para el tratamiento de glaucoma utilizando tecnología MEMSPérez, M. C.Sassetti, F. L.Guarnieri, F. A.IngenieríaMicroinductor planarMicroválvula para glaucomaMEMsMicrofabricaciónElectroplateadoThis paper presents the modeling, design and characterization of planar microinductor, to be used in telemetry systems that supply energy to miniaturized implants. First, a model for the electrical characteristics of planar coils will be discussed. Parasitic electrical effects that may become important at AC-frequencies of several MHz are evaluated. The fabrication process and electrical characterization of planar microcoils will be described. Different configurations of planar microinductor were made with the use of micromachining technologies such as thin film deposition, standard photolithography processes and electroplating. With this technology small coils are relatively easy to fabricate reproducibly. The parameters and performance of fabricated inductor will be evaluated by electrical measurements. Measurements show a good agreement between calculated and measured values.Centro de Técnicas Analógico-Digitales2011-09info:eu-repo/semantics/conferenceObjectinfo:eu-repo/semantics/publishedVersionObjeto de conferenciahttp://purl.org/coar/resource_type/c_5794info:ar-repo/semantics/documentoDeConferenciaapplication/pdf243-246http://sedici.unlp.edu.ar/handle/10915/121958spainfo:eu-repo/semantics/altIdentifier/isbn/978-950-34-0749-3info:eu-repo/semantics/openAccesshttp://creativecommons.org/licenses/by-nc-sa/4.0/Creative Commons Attribution-NonCommercial-ShareAlike 4.0 International (CC BY-NC-SA 4.0)reponame:SEDICI (UNLP)instname:Universidad Nacional de La Platainstacron:UNLP2025-10-15T11:20:53Zoai:sedici.unlp.edu.ar:10915/121958Institucionalhttp://sedici.unlp.edu.ar/Universidad públicaNo correspondehttp://sedici.unlp.edu.ar/oai/snrdalira@sedici.unlp.edu.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:13292025-10-15 11:20:53.348SEDICI (UNLP) - Universidad Nacional de La Platafalse
dc.title.none.fl_str_mv Diseño y fabricación de microinductor planar para microválvula activa para el tratamiento de glaucoma utilizando tecnología MEMS
title Diseño y fabricación de microinductor planar para microválvula activa para el tratamiento de glaucoma utilizando tecnología MEMS
spellingShingle Diseño y fabricación de microinductor planar para microválvula activa para el tratamiento de glaucoma utilizando tecnología MEMS
Pérez, M. C.
Ingeniería
Microinductor planar
Microválvula para glaucoma
MEMs
Microfabricación
Electroplateado
title_short Diseño y fabricación de microinductor planar para microválvula activa para el tratamiento de glaucoma utilizando tecnología MEMS
title_full Diseño y fabricación de microinductor planar para microválvula activa para el tratamiento de glaucoma utilizando tecnología MEMS
title_fullStr Diseño y fabricación de microinductor planar para microválvula activa para el tratamiento de glaucoma utilizando tecnología MEMS
title_full_unstemmed Diseño y fabricación de microinductor planar para microválvula activa para el tratamiento de glaucoma utilizando tecnología MEMS
title_sort Diseño y fabricación de microinductor planar para microválvula activa para el tratamiento de glaucoma utilizando tecnología MEMS
dc.creator.none.fl_str_mv Pérez, M. C.
Sassetti, F. L.
Guarnieri, F. A.
author Pérez, M. C.
author_facet Pérez, M. C.
Sassetti, F. L.
Guarnieri, F. A.
author_role author
author2 Sassetti, F. L.
Guarnieri, F. A.
author2_role author
author
dc.subject.none.fl_str_mv Ingeniería
Microinductor planar
Microválvula para glaucoma
MEMs
Microfabricación
Electroplateado
topic Ingeniería
Microinductor planar
Microválvula para glaucoma
MEMs
Microfabricación
Electroplateado
dc.description.none.fl_txt_mv This paper presents the modeling, design and characterization of planar microinductor, to be used in telemetry systems that supply energy to miniaturized implants. First, a model for the electrical characteristics of planar coils will be discussed. Parasitic electrical effects that may become important at AC-frequencies of several MHz are evaluated. The fabrication process and electrical characterization of planar microcoils will be described. Different configurations of planar microinductor were made with the use of micromachining technologies such as thin film deposition, standard photolithography processes and electroplating. With this technology small coils are relatively easy to fabricate reproducibly. The parameters and performance of fabricated inductor will be evaluated by electrical measurements. Measurements show a good agreement between calculated and measured values.
Centro de Técnicas Analógico-Digitales
description This paper presents the modeling, design and characterization of planar microinductor, to be used in telemetry systems that supply energy to miniaturized implants. First, a model for the electrical characteristics of planar coils will be discussed. Parasitic electrical effects that may become important at AC-frequencies of several MHz are evaluated. The fabrication process and electrical characterization of planar microcoils will be described. Different configurations of planar microinductor were made with the use of micromachining technologies such as thin film deposition, standard photolithography processes and electroplating. With this technology small coils are relatively easy to fabricate reproducibly. The parameters and performance of fabricated inductor will be evaluated by electrical measurements. Measurements show a good agreement between calculated and measured values.
publishDate 2011
dc.date.none.fl_str_mv 2011-09
dc.type.none.fl_str_mv info:eu-repo/semantics/conferenceObject
info:eu-repo/semantics/publishedVersion
Objeto de conferencia
http://purl.org/coar/resource_type/c_5794
info:ar-repo/semantics/documentoDeConferencia
format conferenceObject
status_str publishedVersion
dc.identifier.none.fl_str_mv http://sedici.unlp.edu.ar/handle/10915/121958
url http://sedici.unlp.edu.ar/handle/10915/121958
dc.language.none.fl_str_mv spa
language spa
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/isbn/978-950-34-0749-3
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
http://creativecommons.org/licenses/by-nc-sa/4.0/
Creative Commons Attribution-NonCommercial-ShareAlike 4.0 International (CC BY-NC-SA 4.0)
eu_rights_str_mv openAccess
rights_invalid_str_mv http://creativecommons.org/licenses/by-nc-sa/4.0/
Creative Commons Attribution-NonCommercial-ShareAlike 4.0 International (CC BY-NC-SA 4.0)
dc.format.none.fl_str_mv application/pdf
243-246
dc.source.none.fl_str_mv reponame:SEDICI (UNLP)
instname:Universidad Nacional de La Plata
instacron:UNLP
reponame_str SEDICI (UNLP)
collection SEDICI (UNLP)
instname_str Universidad Nacional de La Plata
instacron_str UNLP
institution UNLP
repository.name.fl_str_mv SEDICI (UNLP) - Universidad Nacional de La Plata
repository.mail.fl_str_mv alira@sedici.unlp.edu.ar
_version_ 1846064265714204672
score 13.22299

Publicaciones similares