Preparation and characterization of nanostructured titanium nitride thin films at room temperature

Autores
Solis Pomar, F.; Nápoles, O.; Vázquez Robaina, Odin; Gutierrez Lazos, C.; Fundora, A.; Colin, Angel; Pérez Tijerina, E.; Melendrez, M. F.
Año de publicación
2016
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
Nanostructured TiN thin films were grown by reactive magnetron sputtering deposition on Si (100) substrate at room temperature. The nanostructured TiN thin films were characterized by X-ray Diffraction (XRD), X-ray Photoelectron Spectroscopy (XPS), Scanning Electron Microscopy (SEM), Scanning Tunneling Microscopy (STM), Atomic Force Microscopy (AFM), resistivity and hydrophobicity tests. The nanostructured TiN thin films had an average grain size 4.6 nm, an average roughness of 1.3 nm, a preferential orientation in the [111] direction and also they showed hydrophobicity Type I.
Fil: Solis Pomar, F.. Universidad Autónoma de Nuevo León; México
Fil: Nápoles, O.. Universidad de La Habana; Cuba
Fil: Vázquez Robaina, Odin. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Universidad de La Habana; Cuba
Fil: Gutierrez Lazos, C.. Universidad Autónoma de Nuevo León; México
Fil: Fundora, A.. Universidad de La Habana; Cuba
Fil: Colin, Angel. Universidad Autónoma de Nuevo León; México
Fil: Pérez Tijerina, E.. Universidad Autónoma de Nuevo León; México
Fil: Melendrez, M. F.. Universidad de Concepción; Chile
Materia
Nanostructures
Room Temperature
Thin Films
Titanium Nitride
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/71590
Acceder
id CONICETDig_f31a3103d60f73bf043b103e849940fa
oai_identifier_str oai:ri.conicet.gov.ar:11336/71590
network_acronym_str CONICETDig
repository_id_str 3498
network_name_str CONICET Digital (CONICET)
spelling Preparation and characterization of nanostructured titanium nitride thin films at room temperatureSolis Pomar, F.Nápoles, O.Vázquez Robaina, OdinGutierrez Lazos, C.Fundora, A.Colin, AngelPérez Tijerina, E.Melendrez, M. F.NanostructuresRoom TemperatureThin FilmsTitanium Nitridehttps://purl.org/becyt/ford/2.10https://purl.org/becyt/ford/2Nanostructured TiN thin films were grown by reactive magnetron sputtering deposition on Si (100) substrate at room temperature. The nanostructured TiN thin films were characterized by X-ray Diffraction (XRD), X-ray Photoelectron Spectroscopy (XPS), Scanning Electron Microscopy (SEM), Scanning Tunneling Microscopy (STM), Atomic Force Microscopy (AFM), resistivity and hydrophobicity tests. The nanostructured TiN thin films had an average grain size 4.6 nm, an average roughness of 1.3 nm, a preferential orientation in the [111] direction and also they showed hydrophobicity Type I.Fil: Solis Pomar, F.. Universidad Autónoma de Nuevo León; MéxicoFil: Nápoles, O.. Universidad de La Habana; CubaFil: Vázquez Robaina, Odin. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Universidad de La Habana; CubaFil: Gutierrez Lazos, C.. Universidad Autónoma de Nuevo León; MéxicoFil: Fundora, A.. Universidad de La Habana; CubaFil: Colin, Angel. Universidad Autónoma de Nuevo León; MéxicoFil: Pérez Tijerina, E.. Universidad Autónoma de Nuevo León; MéxicoFil: Melendrez, M. F.. Universidad de Concepción; ChileElsevier2016-05info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/71590Solis Pomar, F.; Nápoles, O.; Vázquez Robaina, Odin; Gutierrez Lazos, C.; Fundora, A.; et al.; Preparation and characterization of nanostructured titanium nitride thin films at room temperature; Elsevier; Ceramics International; 42; 6; 5-2016; 7571-75750272-8842CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/doi/10.1016/j.ceramint.2016.01.164info:eu-repo/semantics/altIdentifier/url/https://www.sciencedirect.com/science/article/pii/S0272884216002078info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-29T09:52:14Zoai:ri.conicet.gov.ar:11336/71590instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-29 09:52:14.439CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv Preparation and characterization of nanostructured titanium nitride thin films at room temperature
title Preparation and characterization of nanostructured titanium nitride thin films at room temperature
spellingShingle Preparation and characterization of nanostructured titanium nitride thin films at room temperature
Solis Pomar, F.
Nanostructures
Room Temperature
Thin Films
Titanium Nitride
title_short Preparation and characterization of nanostructured titanium nitride thin films at room temperature
title_full Preparation and characterization of nanostructured titanium nitride thin films at room temperature
title_fullStr Preparation and characterization of nanostructured titanium nitride thin films at room temperature
title_full_unstemmed Preparation and characterization of nanostructured titanium nitride thin films at room temperature
title_sort Preparation and characterization of nanostructured titanium nitride thin films at room temperature
dc.creator.none.fl_str_mv Solis Pomar, F.
Nápoles, O.
Vázquez Robaina, Odin
Gutierrez Lazos, C.
Fundora, A.
Colin, Angel
Pérez Tijerina, E.
Melendrez, M. F.
author Solis Pomar, F.
author_facet Solis Pomar, F.
Nápoles, O.
Vázquez Robaina, Odin
Gutierrez Lazos, C.
Fundora, A.
Colin, Angel
Pérez Tijerina, E.
Melendrez, M. F.
author_role author
author2 Nápoles, O.
Vázquez Robaina, Odin
Gutierrez Lazos, C.
Fundora, A.
Colin, Angel
Pérez Tijerina, E.
Melendrez, M. F.
author2_role author
author
author
author
author
author
author
dc.subject.none.fl_str_mv Nanostructures
Room Temperature
Thin Films
Titanium Nitride
topic Nanostructures
Room Temperature
Thin Films
Titanium Nitride
purl_subject.fl_str_mv https://purl.org/becyt/ford/2.10
https://purl.org/becyt/ford/2
dc.description.none.fl_txt_mv Nanostructured TiN thin films were grown by reactive magnetron sputtering deposition on Si (100) substrate at room temperature. The nanostructured TiN thin films were characterized by X-ray Diffraction (XRD), X-ray Photoelectron Spectroscopy (XPS), Scanning Electron Microscopy (SEM), Scanning Tunneling Microscopy (STM), Atomic Force Microscopy (AFM), resistivity and hydrophobicity tests. The nanostructured TiN thin films had an average grain size 4.6 nm, an average roughness of 1.3 nm, a preferential orientation in the [111] direction and also they showed hydrophobicity Type I.
Fil: Solis Pomar, F.. Universidad Autónoma de Nuevo León; México
Fil: Nápoles, O.. Universidad de La Habana; Cuba
Fil: Vázquez Robaina, Odin. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Universidad de La Habana; Cuba
Fil: Gutierrez Lazos, C.. Universidad Autónoma de Nuevo León; México
Fil: Fundora, A.. Universidad de La Habana; Cuba
Fil: Colin, Angel. Universidad Autónoma de Nuevo León; México
Fil: Pérez Tijerina, E.. Universidad Autónoma de Nuevo León; México
Fil: Melendrez, M. F.. Universidad de Concepción; Chile
description Nanostructured TiN thin films were grown by reactive magnetron sputtering deposition on Si (100) substrate at room temperature. The nanostructured TiN thin films were characterized by X-ray Diffraction (XRD), X-ray Photoelectron Spectroscopy (XPS), Scanning Electron Microscopy (SEM), Scanning Tunneling Microscopy (STM), Atomic Force Microscopy (AFM), resistivity and hydrophobicity tests. The nanostructured TiN thin films had an average grain size 4.6 nm, an average roughness of 1.3 nm, a preferential orientation in the [111] direction and also they showed hydrophobicity Type I.
publishDate 2016
dc.date.none.fl_str_mv 2016-05
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/71590
Solis Pomar, F.; Nápoles, O.; Vázquez Robaina, Odin; Gutierrez Lazos, C.; Fundora, A.; et al.; Preparation and characterization of nanostructured titanium nitride thin films at room temperature; Elsevier; Ceramics International; 42; 6; 5-2016; 7571-7575
0272-8842
CONICET Digital
CONICET
url http://hdl.handle.net/11336/71590
identifier_str_mv Solis Pomar, F.; Nápoles, O.; Vázquez Robaina, Odin; Gutierrez Lazos, C.; Fundora, A.; et al.; Preparation and characterization of nanostructured titanium nitride thin films at room temperature; Elsevier; Ceramics International; 42; 6; 5-2016; 7571-7575
0272-8842
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/doi/10.1016/j.ceramint.2016.01.164
info:eu-repo/semantics/altIdentifier/url/https://www.sciencedirect.com/science/article/pii/S0272884216002078
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
dc.publisher.none.fl_str_mv Elsevier
publisher.none.fl_str_mv Elsevier
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
_version_ 1844613602921676800
score 13.070432

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