Design of a phase-shifting interferometer in the extreme ultraviolet for high-precision metrology

Autores
Capeluto, Maria Gabriela; Marconi, Mario Carlos; Iemmi, Claudio César
Año de publicación
2014
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
The design of a phase-shift interferometer in the extreme ultraviolet (EUV) is described. The interferometer is expected to achieve a significantly higher precision as compared with similar instruments that utilize lasers in the visible range. The interferometer’s design is specifically adapted for its utilization with a table top pulsed capillary discharge EUV laser. The numerical model evaluates the errors in the interferograms and in the retrieved wavefront induced by the shot-to-shot fluctuations and pointing instabilities of the laser.
Fil: Capeluto, Maria Gabriela. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales. Departamento de Física; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina
Fil: Marconi, Mario Carlos. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Ciudad Universitaria. Instituto de Física de Buenos Aires. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales. Instituto de Física de Buenos Aires; Argentina
Fil: Iemmi, Claudio César. State University of Colorado Boulder; Estados Unidos
Materia
PHASE SHIFT
UV
INTERFEROMETRY
EUV
X-RAY LASERS
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/30650
Acceder
id CONICETDig_d72084461975e4aecc07cd288b7d854a
oai_identifier_str oai:ri.conicet.gov.ar:11336/30650
network_acronym_str CONICETDig
repository_id_str 3498
network_name_str CONICET Digital (CONICET)
spelling Design of a phase-shifting interferometer in the extreme ultraviolet for high-precision metrologyCapeluto, Maria GabrielaMarconi, Mario CarlosIemmi, Claudio CésarPHASE SHIFTUVINTERFEROMETRYEUVX-RAY LASERShttps://purl.org/becyt/ford/1.3https://purl.org/becyt/ford/1The design of a phase-shift interferometer in the extreme ultraviolet (EUV) is described. The interferometer is expected to achieve a significantly higher precision as compared with similar instruments that utilize lasers in the visible range. The interferometer’s design is specifically adapted for its utilization with a table top pulsed capillary discharge EUV laser. The numerical model evaluates the errors in the interferograms and in the retrieved wavefront induced by the shot-to-shot fluctuations and pointing instabilities of the laser.Fil: Capeluto, Maria Gabriela. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales. Departamento de Física; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; ArgentinaFil: Marconi, Mario Carlos. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Ciudad Universitaria. Instituto de Física de Buenos Aires. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales. Instituto de Física de Buenos Aires; ArgentinaFil: Iemmi, Claudio César. State University of Colorado Boulder; Estados UnidosOptical Society of America2014info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/30650Capeluto, Maria Gabriela; Marconi, Mario Carlos; Iemmi, Claudio César; Design of a phase-shifting interferometer in the extreme ultraviolet for high-precision metrology; Optical Society of America; Applied Optics; 53; 7; 2014; 1274-12830003-6935CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/url/https://www.osapublishing.org/ao/abstract.cfm?uri=ao-53-7-1274info:eu-repo/semantics/altIdentifier/doi/10.1364/AO.53.001274info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-11-12T09:49:06Zoai:ri.conicet.gov.ar:11336/30650instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-11-12 09:49:07.144CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv Design of a phase-shifting interferometer in the extreme ultraviolet for high-precision metrology
title Design of a phase-shifting interferometer in the extreme ultraviolet for high-precision metrology
spellingShingle Design of a phase-shifting interferometer in the extreme ultraviolet for high-precision metrology
Capeluto, Maria Gabriela
PHASE SHIFT
UV
INTERFEROMETRY
EUV
X-RAY LASERS
title_short Design of a phase-shifting interferometer in the extreme ultraviolet for high-precision metrology
title_full Design of a phase-shifting interferometer in the extreme ultraviolet for high-precision metrology
title_fullStr Design of a phase-shifting interferometer in the extreme ultraviolet for high-precision metrology
title_full_unstemmed Design of a phase-shifting interferometer in the extreme ultraviolet for high-precision metrology
title_sort Design of a phase-shifting interferometer in the extreme ultraviolet for high-precision metrology
dc.creator.none.fl_str_mv Capeluto, Maria Gabriela
Marconi, Mario Carlos
Iemmi, Claudio César
author Capeluto, Maria Gabriela
author_facet Capeluto, Maria Gabriela
Marconi, Mario Carlos
Iemmi, Claudio César
author_role author
author2 Marconi, Mario Carlos
Iemmi, Claudio César
author2_role author
author
dc.subject.none.fl_str_mv PHASE SHIFT
UV
INTERFEROMETRY
EUV
X-RAY LASERS
topic PHASE SHIFT
UV
INTERFEROMETRY
EUV
X-RAY LASERS
purl_subject.fl_str_mv https://purl.org/becyt/ford/1.3
https://purl.org/becyt/ford/1
dc.description.none.fl_txt_mv The design of a phase-shift interferometer in the extreme ultraviolet (EUV) is described. The interferometer is expected to achieve a significantly higher precision as compared with similar instruments that utilize lasers in the visible range. The interferometer’s design is specifically adapted for its utilization with a table top pulsed capillary discharge EUV laser. The numerical model evaluates the errors in the interferograms and in the retrieved wavefront induced by the shot-to-shot fluctuations and pointing instabilities of the laser.
Fil: Capeluto, Maria Gabriela. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales. Departamento de Física; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina
Fil: Marconi, Mario Carlos. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Ciudad Universitaria. Instituto de Física de Buenos Aires. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales. Instituto de Física de Buenos Aires; Argentina
Fil: Iemmi, Claudio César. State University of Colorado Boulder; Estados Unidos
description The design of a phase-shift interferometer in the extreme ultraviolet (EUV) is described. The interferometer is expected to achieve a significantly higher precision as compared with similar instruments that utilize lasers in the visible range. The interferometer’s design is specifically adapted for its utilization with a table top pulsed capillary discharge EUV laser. The numerical model evaluates the errors in the interferograms and in the retrieved wavefront induced by the shot-to-shot fluctuations and pointing instabilities of the laser.
publishDate 2014
dc.date.none.fl_str_mv 2014
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/30650
Capeluto, Maria Gabriela; Marconi, Mario Carlos; Iemmi, Claudio César; Design of a phase-shifting interferometer in the extreme ultraviolet for high-precision metrology; Optical Society of America; Applied Optics; 53; 7; 2014; 1274-1283
0003-6935
CONICET Digital
CONICET
url http://hdl.handle.net/11336/30650
identifier_str_mv Capeluto, Maria Gabriela; Marconi, Mario Carlos; Iemmi, Claudio César; Design of a phase-shifting interferometer in the extreme ultraviolet for high-precision metrology; Optical Society of America; Applied Optics; 53; 7; 2014; 1274-1283
0003-6935
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/url/https://www.osapublishing.org/ao/abstract.cfm?uri=ao-53-7-1274
info:eu-repo/semantics/altIdentifier/doi/10.1364/AO.53.001274
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
application/pdf
dc.publisher.none.fl_str_mv Optical Society of America
publisher.none.fl_str_mv Optical Society of America
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
_version_ 1848598051872047104
score 13.137801

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