Design of a phase shifting interferometer in the EUV for high precision metrology

Autores
Capeluto, M.G.; Marconi, M.C.; Iemmi, C.
Año de publicación
2011
Idioma
inglés
Tipo de recurso
documento de conferencia
Estado
versión publicada
Descripción
We present the design of phase shift interferometer for the extreme ultraviolet (EUV) that will be used with the illumination provided by a table top Ne-like Ar laser emitting at 46.9 nm. We develop a model that computes the beam propagation trough the instrument, taking into account the influence of the fluctuations from shot-to-shot of the pulsed EUV laser on the retrieved wavefront.
Fil:Capeluto, M.G. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.
Fil:Marconi, M.C. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.
Fil:Iemmi, C. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.
Fuente
J. Phys. Conf. Ser. 2011;274(1)
Materia
Argon lasers
Extreme ultraviolet lithography
Interferometers
Pulsed lasers
Ar-laser
EUV lasers
Extreme ultraviolets
High-precision
Ne-like
Phase-shift interferometer
Phase-shifting interferometers
Table-top
Phase shift
Nivel de accesibilidad
acceso abierto
Condiciones de uso
http://creativecommons.org/licenses/by/2.5/ar
Repositorio
Biblioteca Digital (UBA-FCEN)
Institución
Universidad Nacional de Buenos Aires. Facultad de Ciencias Exactas y Naturales
OAI Identificador
paperaa:paper_17426588_v274_n1_p_Capeluto
Acceder
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oai_identifier_str paperaa:paper_17426588_v274_n1_p_Capeluto
network_acronym_str BDUBAFCEN
repository_id_str 1896
network_name_str Biblioteca Digital (UBA-FCEN)
spelling Design of a phase shifting interferometer in the EUV for high precision metrologyCapeluto, M.G.Marconi, M.C.Iemmi, C.Argon lasersExtreme ultraviolet lithographyInterferometersPulsed lasersAr-laserEUV lasersExtreme ultravioletsHigh-precisionNe-likePhase-shift interferometerPhase-shifting interferometersTable-topPhase shiftWe present the design of phase shift interferometer for the extreme ultraviolet (EUV) that will be used with the illumination provided by a table top Ne-like Ar laser emitting at 46.9 nm. We develop a model that computes the beam propagation trough the instrument, taking into account the influence of the fluctuations from shot-to-shot of the pulsed EUV laser on the retrieved wavefront.Fil:Capeluto, M.G. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.Fil:Marconi, M.C. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.Fil:Iemmi, C. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.2011info:eu-repo/semantics/conferenceObjectinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_5794info:ar-repo/semantics/documentoDeConferenciaapplication/pdfhttp://hdl.handle.net/20.500.12110/paper_17426588_v274_n1_p_CapelutoJ. Phys. Conf. Ser. 2011;274(1)reponame:Biblioteca Digital (UBA-FCEN)instname:Universidad Nacional de Buenos Aires. Facultad de Ciencias Exactas y Naturalesinstacron:UBA-FCENenginfo:eu-repo/semantics/openAccesshttp://creativecommons.org/licenses/by/2.5/ar2025-11-06T09:39:51Zpaperaa:paper_17426588_v274_n1_p_CapelutoInstitucionalhttps://digital.bl.fcen.uba.ar/Universidad públicaNo correspondehttps://digital.bl.fcen.uba.ar/cgi-bin/oaiserver.cgiana@bl.fcen.uba.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:18962025-11-06 09:39:53.402Biblioteca Digital (UBA-FCEN) - Universidad Nacional de Buenos Aires. Facultad de Ciencias Exactas y Naturalesfalse
dc.title.none.fl_str_mv Design of a phase shifting interferometer in the EUV for high precision metrology
title Design of a phase shifting interferometer in the EUV for high precision metrology
spellingShingle Design of a phase shifting interferometer in the EUV for high precision metrology
Capeluto, M.G.
Argon lasers
Extreme ultraviolet lithography
Interferometers
Pulsed lasers
Ar-laser
EUV lasers
Extreme ultraviolets
High-precision
Ne-like
Phase-shift interferometer
Phase-shifting interferometers
Table-top
Phase shift
title_short Design of a phase shifting interferometer in the EUV for high precision metrology
title_full Design of a phase shifting interferometer in the EUV for high precision metrology
title_fullStr Design of a phase shifting interferometer in the EUV for high precision metrology
title_full_unstemmed Design of a phase shifting interferometer in the EUV for high precision metrology
title_sort Design of a phase shifting interferometer in the EUV for high precision metrology
dc.creator.none.fl_str_mv Capeluto, M.G.
Marconi, M.C.
Iemmi, C.
author Capeluto, M.G.
author_facet Capeluto, M.G.
Marconi, M.C.
Iemmi, C.
author_role author
author2 Marconi, M.C.
Iemmi, C.
author2_role author
author
dc.subject.none.fl_str_mv Argon lasers
Extreme ultraviolet lithography
Interferometers
Pulsed lasers
Ar-laser
EUV lasers
Extreme ultraviolets
High-precision
Ne-like
Phase-shift interferometer
Phase-shifting interferometers
Table-top
Phase shift
topic Argon lasers
Extreme ultraviolet lithography
Interferometers
Pulsed lasers
Ar-laser
EUV lasers
Extreme ultraviolets
High-precision
Ne-like
Phase-shift interferometer
Phase-shifting interferometers
Table-top
Phase shift
dc.description.none.fl_txt_mv We present the design of phase shift interferometer for the extreme ultraviolet (EUV) that will be used with the illumination provided by a table top Ne-like Ar laser emitting at 46.9 nm. We develop a model that computes the beam propagation trough the instrument, taking into account the influence of the fluctuations from shot-to-shot of the pulsed EUV laser on the retrieved wavefront.
Fil:Capeluto, M.G. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.
Fil:Marconi, M.C. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.
Fil:Iemmi, C. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.
description We present the design of phase shift interferometer for the extreme ultraviolet (EUV) that will be used with the illumination provided by a table top Ne-like Ar laser emitting at 46.9 nm. We develop a model that computes the beam propagation trough the instrument, taking into account the influence of the fluctuations from shot-to-shot of the pulsed EUV laser on the retrieved wavefront.
publishDate 2011
dc.date.none.fl_str_mv 2011
dc.type.none.fl_str_mv info:eu-repo/semantics/conferenceObject
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_5794
info:ar-repo/semantics/documentoDeConferencia
format conferenceObject
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/20.500.12110/paper_17426588_v274_n1_p_Capeluto
url http://hdl.handle.net/20.500.12110/paper_17426588_v274_n1_p_Capeluto
dc.language.none.fl_str_mv eng
language eng
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
http://creativecommons.org/licenses/by/2.5/ar
eu_rights_str_mv openAccess
rights_invalid_str_mv http://creativecommons.org/licenses/by/2.5/ar
dc.format.none.fl_str_mv application/pdf
dc.source.none.fl_str_mv J. Phys. Conf. Ser. 2011;274(1)
reponame:Biblioteca Digital (UBA-FCEN)
instname:Universidad Nacional de Buenos Aires. Facultad de Ciencias Exactas y Naturales
instacron:UBA-FCEN
reponame_str Biblioteca Digital (UBA-FCEN)
collection Biblioteca Digital (UBA-FCEN)
instname_str Universidad Nacional de Buenos Aires. Facultad de Ciencias Exactas y Naturales
instacron_str UBA-FCEN
institution UBA-FCEN
repository.name.fl_str_mv Biblioteca Digital (UBA-FCEN) - Universidad Nacional de Buenos Aires. Facultad de Ciencias Exactas y Naturales
repository.mail.fl_str_mv ana@bl.fcen.uba.ar
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score 12.976206

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