Characterization of Titanium Films Deposited with a Cathodic Arc Using a Straight Magnetic Duct

Autores
Bermeo, Diego Fernando; Della Torre, H.; Kleiman, Ariel Javier; Minotti, Fernando Oscar; Marquez, Adriana Beatriz
Año de publicación
2014
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
Nanostructured Ti films were obtained employing a cathodic arc with a straightmagnetic filter. The films were characterized using X-ray diffraction, scanning electron andatomic force microscopy. The films were found to be dense and with columnar grains,whose size increased with the exposure time. The number of macroparticles, the filmroughness and the deposition rate were also analyzed, and the latter compared with theresults of a fluid plasma model. Number of macroparticles and film roughness in sampleslocated ahead of the magnetic duct inlet were higher than those determined fromsamples placed inside the magnetic duct. The deposition rate depended on the axial andradial position inside the duct. The thickness along the radial position was more uniformfor samples located at axial positions near the filter extremes, but the mean depositionrate was lower at these positions. Measured and modeled deposition rates agreed reasonablywell.
Fil: Bermeo, Diego Fernando. Universidad Santiago de Cali; Colombia
Fil: Della Torre, H.. Universidad del Valle de Mexico; México
Fil: Kleiman, Ariel Javier. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Ciudad Universitaria. Instituto de Física del Plasma. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales. Instituto de Física del Plasma; Argentina
Fil: Minotti, Fernando Oscar. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Ciudad Universitaria. Instituto de Física del Plasma. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales. Instituto de Física del Plasma; Argentina
Fil: Marquez, Adriana Beatriz. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Ciudad Universitaria. Instituto de Física del Plasma. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales. Instituto de Física del Plasma; Argentina
Materia
CATHODIC ARC
TITANIUM
MAGNETIC DUCT
PLASMA
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/103204
Acceder
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network_name_str CONICET Digital (CONICET)
spelling Characterization of Titanium Films Deposited with a Cathodic Arc Using a Straight Magnetic DuctBermeo, Diego FernandoDella Torre, H.Kleiman, Ariel JavierMinotti, Fernando OscarMarquez, Adriana BeatrizCATHODIC ARCTITANIUMMAGNETIC DUCTPLASMAhttps://purl.org/becyt/ford/1.3https://purl.org/becyt/ford/1Nanostructured Ti films were obtained employing a cathodic arc with a straightmagnetic filter. The films were characterized using X-ray diffraction, scanning electron andatomic force microscopy. The films were found to be dense and with columnar grains,whose size increased with the exposure time. The number of macroparticles, the filmroughness and the deposition rate were also analyzed, and the latter compared with theresults of a fluid plasma model. Number of macroparticles and film roughness in sampleslocated ahead of the magnetic duct inlet were higher than those determined fromsamples placed inside the magnetic duct. The deposition rate depended on the axial andradial position inside the duct. The thickness along the radial position was more uniformfor samples located at axial positions near the filter extremes, but the mean depositionrate was lower at these positions. Measured and modeled deposition rates agreed reasonablywell.Fil: Bermeo, Diego Fernando. Universidad Santiago de Cali; ColombiaFil: Della Torre, H.. Universidad del Valle de Mexico; MéxicoFil: Kleiman, Ariel Javier. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Ciudad Universitaria. Instituto de Física del Plasma. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales. Instituto de Física del Plasma; ArgentinaFil: Minotti, Fernando Oscar. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Ciudad Universitaria. Instituto de Física del Plasma. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales. Instituto de Física del Plasma; ArgentinaFil: Marquez, Adriana Beatriz. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Ciudad Universitaria. Instituto de Física del Plasma. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales. Instituto de Física del Plasma; ArgentinaIOP Publishing2014-05info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/103204Bermeo, Diego Fernando; Della Torre, H.; Kleiman, Ariel Javier; Minotti, Fernando Oscar; Marquez, Adriana Beatriz; Characterization of Titanium Films Deposited with a Cathodic Arc Using a Straight Magnetic Duct; IOP Publishing; Journal of Physics: Conference Series; 511; 5-20141742-6596CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/url/https://iopscience.iop.org/article/10.1088/1742-6596/511/1/012070info:eu-repo/semantics/altIdentifier/doi/10.1088/1742-6596/511/1/012070info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-03T09:44:54Zoai:ri.conicet.gov.ar:11336/103204instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-03 09:44:55.082CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv Characterization of Titanium Films Deposited with a Cathodic Arc Using a Straight Magnetic Duct
title Characterization of Titanium Films Deposited with a Cathodic Arc Using a Straight Magnetic Duct
spellingShingle Characterization of Titanium Films Deposited with a Cathodic Arc Using a Straight Magnetic Duct
Bermeo, Diego Fernando
CATHODIC ARC
TITANIUM
MAGNETIC DUCT
PLASMA
title_short Characterization of Titanium Films Deposited with a Cathodic Arc Using a Straight Magnetic Duct
title_full Characterization of Titanium Films Deposited with a Cathodic Arc Using a Straight Magnetic Duct
title_fullStr Characterization of Titanium Films Deposited with a Cathodic Arc Using a Straight Magnetic Duct
title_full_unstemmed Characterization of Titanium Films Deposited with a Cathodic Arc Using a Straight Magnetic Duct
title_sort Characterization of Titanium Films Deposited with a Cathodic Arc Using a Straight Magnetic Duct
dc.creator.none.fl_str_mv Bermeo, Diego Fernando
Della Torre, H.
Kleiman, Ariel Javier
Minotti, Fernando Oscar
Marquez, Adriana Beatriz
author Bermeo, Diego Fernando
author_facet Bermeo, Diego Fernando
Della Torre, H.
Kleiman, Ariel Javier
Minotti, Fernando Oscar
Marquez, Adriana Beatriz
author_role author
author2 Della Torre, H.
Kleiman, Ariel Javier
Minotti, Fernando Oscar
Marquez, Adriana Beatriz
author2_role author
author
author
author
dc.subject.none.fl_str_mv CATHODIC ARC
TITANIUM
MAGNETIC DUCT
PLASMA
topic CATHODIC ARC
TITANIUM
MAGNETIC DUCT
PLASMA
purl_subject.fl_str_mv https://purl.org/becyt/ford/1.3
https://purl.org/becyt/ford/1
dc.description.none.fl_txt_mv Nanostructured Ti films were obtained employing a cathodic arc with a straightmagnetic filter. The films were characterized using X-ray diffraction, scanning electron andatomic force microscopy. The films were found to be dense and with columnar grains,whose size increased with the exposure time. The number of macroparticles, the filmroughness and the deposition rate were also analyzed, and the latter compared with theresults of a fluid plasma model. Number of macroparticles and film roughness in sampleslocated ahead of the magnetic duct inlet were higher than those determined fromsamples placed inside the magnetic duct. The deposition rate depended on the axial andradial position inside the duct. The thickness along the radial position was more uniformfor samples located at axial positions near the filter extremes, but the mean depositionrate was lower at these positions. Measured and modeled deposition rates agreed reasonablywell.
Fil: Bermeo, Diego Fernando. Universidad Santiago de Cali; Colombia
Fil: Della Torre, H.. Universidad del Valle de Mexico; México
Fil: Kleiman, Ariel Javier. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Ciudad Universitaria. Instituto de Física del Plasma. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales. Instituto de Física del Plasma; Argentina
Fil: Minotti, Fernando Oscar. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Ciudad Universitaria. Instituto de Física del Plasma. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales. Instituto de Física del Plasma; Argentina
Fil: Marquez, Adriana Beatriz. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Ciudad Universitaria. Instituto de Física del Plasma. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales. Instituto de Física del Plasma; Argentina
description Nanostructured Ti films were obtained employing a cathodic arc with a straightmagnetic filter. The films were characterized using X-ray diffraction, scanning electron andatomic force microscopy. The films were found to be dense and with columnar grains,whose size increased with the exposure time. The number of macroparticles, the filmroughness and the deposition rate were also analyzed, and the latter compared with theresults of a fluid plasma model. Number of macroparticles and film roughness in sampleslocated ahead of the magnetic duct inlet were higher than those determined fromsamples placed inside the magnetic duct. The deposition rate depended on the axial andradial position inside the duct. The thickness along the radial position was more uniformfor samples located at axial positions near the filter extremes, but the mean depositionrate was lower at these positions. Measured and modeled deposition rates agreed reasonablywell.
publishDate 2014
dc.date.none.fl_str_mv 2014-05
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/103204
Bermeo, Diego Fernando; Della Torre, H.; Kleiman, Ariel Javier; Minotti, Fernando Oscar; Marquez, Adriana Beatriz; Characterization of Titanium Films Deposited with a Cathodic Arc Using a Straight Magnetic Duct; IOP Publishing; Journal of Physics: Conference Series; 511; 5-2014
1742-6596
CONICET Digital
CONICET
url http://hdl.handle.net/11336/103204
identifier_str_mv Bermeo, Diego Fernando; Della Torre, H.; Kleiman, Ariel Javier; Minotti, Fernando Oscar; Marquez, Adriana Beatriz; Characterization of Titanium Films Deposited with a Cathodic Arc Using a Straight Magnetic Duct; IOP Publishing; Journal of Physics: Conference Series; 511; 5-2014
1742-6596
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/url/https://iopscience.iop.org/article/10.1088/1742-6596/511/1/012070
info:eu-repo/semantics/altIdentifier/doi/10.1088/1742-6596/511/1/012070
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
application/pdf
dc.publisher.none.fl_str_mv IOP Publishing
publisher.none.fl_str_mv IOP Publishing
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
_version_ 1842268697238962176
score 13.13397

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