Correction of optical distortions in dry depth profiling with confocal Raman microspectroscopy

Autores
Tomba, Juan Pablo; Miguel, María de la Paz; Pérez, Claudio Javier
Año de publicación
2011
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
We present a generalized approach to obtain improved Raman intensity profiles from in-depth studies performed by confocal Raman microspectroscopy (CRM) with dry objectives. The approach is based on regularized deconvolution of the as-measured confocal profile, through a kernel that simulates optical distortions due to diffraction, refraction and collection efficiency on the depth response. No specific shape or restrictions for the recovered profile are imposed. The strategy was tested by probing, under different instrumental conditions, a series of model planar interfaces, generated by the contact of polymeric films of well-defined thickness with a substrate. Because of the aforementioned optical distortions, the as-measured confocal response of the films appeared highly distorted and featureless. The signal computed after deconvolution recovers all the films features, matching very closely with the response expected.
Fil: Tomba, Juan Pablo. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Mar del Plata. Instituto de Investigaciones en Ciencia y Tecnología de Materiales. Universidad Nacional de Mar del Plata. Facultad de Ingeniería. Instituto de Investigaciones en Ciencia y Tecnología de Materiales; Argentina
Fil: Miguel, María de la Paz. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Mar del Plata. Instituto de Investigaciones en Ciencia y Tecnología de Materiales. Universidad Nacional de Mar del Plata. Facultad de Ingeniería. Instituto de Investigaciones en Ciencia y Tecnología de Materiales; Argentina
Fil: Pérez, Claudio Javier. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Mar del Plata. Instituto de Investigaciones en Ciencia y Tecnología de Materiales. Universidad Nacional de Mar del Plata. Facultad de Ingeniería. Instituto de Investigaciones en Ciencia y Tecnología de Materiales; Argentina
Materia
Confocal Raman Microspectroscopy
Deconvolution
Depth Profiling
Depth Response
Modeling
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/76255
Acceder
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oai_identifier_str oai:ri.conicet.gov.ar:11336/76255
network_acronym_str CONICETDig
repository_id_str 3498
network_name_str CONICET Digital (CONICET)
spelling Correction of optical distortions in dry depth profiling with confocal Raman microspectroscopyTomba, Juan PabloMiguel, María de la PazPérez, Claudio JavierConfocal Raman MicrospectroscopyDeconvolutionDepth ProfilingDepth ResponseModelinghttps://purl.org/becyt/ford/1.3https://purl.org/becyt/ford/1We present a generalized approach to obtain improved Raman intensity profiles from in-depth studies performed by confocal Raman microspectroscopy (CRM) with dry objectives. The approach is based on regularized deconvolution of the as-measured confocal profile, through a kernel that simulates optical distortions due to diffraction, refraction and collection efficiency on the depth response. No specific shape or restrictions for the recovered profile are imposed. The strategy was tested by probing, under different instrumental conditions, a series of model planar interfaces, generated by the contact of polymeric films of well-defined thickness with a substrate. Because of the aforementioned optical distortions, the as-measured confocal response of the films appeared highly distorted and featureless. The signal computed after deconvolution recovers all the films features, matching very closely with the response expected.Fil: Tomba, Juan Pablo. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Mar del Plata. Instituto de Investigaciones en Ciencia y Tecnología de Materiales. Universidad Nacional de Mar del Plata. Facultad de Ingeniería. Instituto de Investigaciones en Ciencia y Tecnología de Materiales; ArgentinaFil: Miguel, María de la Paz. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Mar del Plata. Instituto de Investigaciones en Ciencia y Tecnología de Materiales. Universidad Nacional de Mar del Plata. Facultad de Ingeniería. Instituto de Investigaciones en Ciencia y Tecnología de Materiales; ArgentinaFil: Pérez, Claudio Javier. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Mar del Plata. Instituto de Investigaciones en Ciencia y Tecnología de Materiales. Universidad Nacional de Mar del Plata. Facultad de Ingeniería. Instituto de Investigaciones en Ciencia y Tecnología de Materiales; ArgentinaJohn Wiley & Sons Ltd2011-06info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/76255Tomba, Juan Pablo; Miguel, María de la Paz; Pérez, Claudio Javier; Correction of optical distortions in dry depth profiling with confocal Raman microspectroscopy; John Wiley & Sons Ltd; Journal Of Raman Spectroscopy; 42; 6; 6-2011; 1330-13340377-0486CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/url/https://onlinelibrary.wiley.com/doi/10.1002/jrs.2843info:eu-repo/semantics/altIdentifier/doi/10.1002/jrs.2843info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-03T10:06:48Zoai:ri.conicet.gov.ar:11336/76255instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-03 10:06:48.3CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv Correction of optical distortions in dry depth profiling with confocal Raman microspectroscopy
title Correction of optical distortions in dry depth profiling with confocal Raman microspectroscopy
spellingShingle Correction of optical distortions in dry depth profiling with confocal Raman microspectroscopy
Tomba, Juan Pablo
Confocal Raman Microspectroscopy
Deconvolution
Depth Profiling
Depth Response
Modeling
title_short Correction of optical distortions in dry depth profiling with confocal Raman microspectroscopy
title_full Correction of optical distortions in dry depth profiling with confocal Raman microspectroscopy
title_fullStr Correction of optical distortions in dry depth profiling with confocal Raman microspectroscopy
title_full_unstemmed Correction of optical distortions in dry depth profiling with confocal Raman microspectroscopy
title_sort Correction of optical distortions in dry depth profiling with confocal Raman microspectroscopy
dc.creator.none.fl_str_mv Tomba, Juan Pablo
Miguel, María de la Paz
Pérez, Claudio Javier
author Tomba, Juan Pablo
author_facet Tomba, Juan Pablo
Miguel, María de la Paz
Pérez, Claudio Javier
author_role author
author2 Miguel, María de la Paz
Pérez, Claudio Javier
author2_role author
author
dc.subject.none.fl_str_mv Confocal Raman Microspectroscopy
Deconvolution
Depth Profiling
Depth Response
Modeling
topic Confocal Raman Microspectroscopy
Deconvolution
Depth Profiling
Depth Response
Modeling
purl_subject.fl_str_mv https://purl.org/becyt/ford/1.3
https://purl.org/becyt/ford/1
dc.description.none.fl_txt_mv We present a generalized approach to obtain improved Raman intensity profiles from in-depth studies performed by confocal Raman microspectroscopy (CRM) with dry objectives. The approach is based on regularized deconvolution of the as-measured confocal profile, through a kernel that simulates optical distortions due to diffraction, refraction and collection efficiency on the depth response. No specific shape or restrictions for the recovered profile are imposed. The strategy was tested by probing, under different instrumental conditions, a series of model planar interfaces, generated by the contact of polymeric films of well-defined thickness with a substrate. Because of the aforementioned optical distortions, the as-measured confocal response of the films appeared highly distorted and featureless. The signal computed after deconvolution recovers all the films features, matching very closely with the response expected.
Fil: Tomba, Juan Pablo. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Mar del Plata. Instituto de Investigaciones en Ciencia y Tecnología de Materiales. Universidad Nacional de Mar del Plata. Facultad de Ingeniería. Instituto de Investigaciones en Ciencia y Tecnología de Materiales; Argentina
Fil: Miguel, María de la Paz. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Mar del Plata. Instituto de Investigaciones en Ciencia y Tecnología de Materiales. Universidad Nacional de Mar del Plata. Facultad de Ingeniería. Instituto de Investigaciones en Ciencia y Tecnología de Materiales; Argentina
Fil: Pérez, Claudio Javier. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Mar del Plata. Instituto de Investigaciones en Ciencia y Tecnología de Materiales. Universidad Nacional de Mar del Plata. Facultad de Ingeniería. Instituto de Investigaciones en Ciencia y Tecnología de Materiales; Argentina
description We present a generalized approach to obtain improved Raman intensity profiles from in-depth studies performed by confocal Raman microspectroscopy (CRM) with dry objectives. The approach is based on regularized deconvolution of the as-measured confocal profile, through a kernel that simulates optical distortions due to diffraction, refraction and collection efficiency on the depth response. No specific shape or restrictions for the recovered profile are imposed. The strategy was tested by probing, under different instrumental conditions, a series of model planar interfaces, generated by the contact of polymeric films of well-defined thickness with a substrate. Because of the aforementioned optical distortions, the as-measured confocal response of the films appeared highly distorted and featureless. The signal computed after deconvolution recovers all the films features, matching very closely with the response expected.
publishDate 2011
dc.date.none.fl_str_mv 2011-06
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/76255
Tomba, Juan Pablo; Miguel, María de la Paz; Pérez, Claudio Javier; Correction of optical distortions in dry depth profiling with confocal Raman microspectroscopy; John Wiley & Sons Ltd; Journal Of Raman Spectroscopy; 42; 6; 6-2011; 1330-1334
0377-0486
CONICET Digital
CONICET
url http://hdl.handle.net/11336/76255
identifier_str_mv Tomba, Juan Pablo; Miguel, María de la Paz; Pérez, Claudio Javier; Correction of optical distortions in dry depth profiling with confocal Raman microspectroscopy; John Wiley & Sons Ltd; Journal Of Raman Spectroscopy; 42; 6; 6-2011; 1330-1334
0377-0486
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/url/https://onlinelibrary.wiley.com/doi/10.1002/jrs.2843
info:eu-repo/semantics/altIdentifier/doi/10.1002/jrs.2843
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
application/pdf
application/pdf
dc.publisher.none.fl_str_mv John Wiley & Sons Ltd
publisher.none.fl_str_mv John Wiley & Sons Ltd
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
_version_ 1842269975113367552
score 13.13397

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