Electro-Mechano-Fluidic Modeling of Microsystems Using Finite Elements

Autores
Rochus, Veronique; Gutschmidt, Stephanie; Cardona, Alberto; Geuzaine, Christophe
Año de publicación
2012
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
Strong couplings between the mechanical, electric, magnetic, fluidic and thermal fields exist in the behaviour laws describing microsystems. Also, due to the large surface/volume ratio, surface forces such as the electrostatic force and fluid damping become predominant. This paper presents the modeling and simulation of electrically-actuated micro-systems taking the electro-mechano-fluidic coupling into account. A micro-resonator consisting in a cantilever beam suspended over a substrate is modeled, and finite-element simulations are validated with experimental measurements.
Fil: Rochus, Veronique. Interuniversity Microelectronics Center; Bélgica
Fil: Gutschmidt, Stephanie. University Of Canterbury; Nueva Zelanda
Fil: Cardona, Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química (i); Argentina. Universidad Nacional del Litoral; Argentina
Fil: Geuzaine, Christophe. University of Liège; Bélgica
Materia
Electromagnetic Forces,
Electromechanical Sensors,
Finite Element Methods,
Nonlinear Dynamical Systems,
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/10723
Acceder
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oai_identifier_str oai:ri.conicet.gov.ar:11336/10723
network_acronym_str CONICETDig
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network_name_str CONICET Digital (CONICET)
spelling Electro-Mechano-Fluidic Modeling of Microsystems Using Finite ElementsRochus, VeroniqueGutschmidt, StephanieCardona, AlbertoGeuzaine, ChristopheElectromagnetic Forces,Electromechanical Sensors,Finite Element Methods,Nonlinear Dynamical Systems,https://purl.org/becyt/ford/2.3https://purl.org/becyt/ford/2https://purl.org/becyt/ford/2.2https://purl.org/becyt/ford/2Strong couplings between the mechanical, electric, magnetic, fluidic and thermal fields exist in the behaviour laws describing microsystems. Also, due to the large surface/volume ratio, surface forces such as the electrostatic force and fluid damping become predominant. This paper presents the modeling and simulation of electrically-actuated micro-systems taking the electro-mechano-fluidic coupling into account. A micro-resonator consisting in a cantilever beam suspended over a substrate is modeled, and finite-element simulations are validated with experimental measurements.Fil: Rochus, Veronique. Interuniversity Microelectronics Center; BélgicaFil: Gutschmidt, Stephanie. University Of Canterbury; Nueva ZelandaFil: Cardona, Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química (i); Argentina. Universidad Nacional del Litoral; ArgentinaFil: Geuzaine, Christophe. University of Liège; BélgicaInstitute Of Electrical And Electronics Engineers2012-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/10723Rochus, Veronique; Gutschmidt, Stephanie; Cardona, Alberto; Geuzaine, Christophe; Electro-Mechano-Fluidic Modeling of Microsystems Using Finite Elements; Institute Of Electrical And Electronics Engineers; Ieee Transactions On Magnetics; 48; 1-2012; 355-3580018-9464enginfo:eu-repo/semantics/altIdentifier/url/http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6136624info:eu-repo/semantics/altIdentifier/doi/10.1109/TMAG.2011.2173663info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-29T10:06:53Zoai:ri.conicet.gov.ar:11336/10723instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-29 10:06:53.775CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv Electro-Mechano-Fluidic Modeling of Microsystems Using Finite Elements
title Electro-Mechano-Fluidic Modeling of Microsystems Using Finite Elements
spellingShingle Electro-Mechano-Fluidic Modeling of Microsystems Using Finite Elements
Rochus, Veronique
Electromagnetic Forces,
Electromechanical Sensors,
Finite Element Methods,
Nonlinear Dynamical Systems,
title_short Electro-Mechano-Fluidic Modeling of Microsystems Using Finite Elements
title_full Electro-Mechano-Fluidic Modeling of Microsystems Using Finite Elements
title_fullStr Electro-Mechano-Fluidic Modeling of Microsystems Using Finite Elements
title_full_unstemmed Electro-Mechano-Fluidic Modeling of Microsystems Using Finite Elements
title_sort Electro-Mechano-Fluidic Modeling of Microsystems Using Finite Elements
dc.creator.none.fl_str_mv Rochus, Veronique
Gutschmidt, Stephanie
Cardona, Alberto
Geuzaine, Christophe
author Rochus, Veronique
author_facet Rochus, Veronique
Gutschmidt, Stephanie
Cardona, Alberto
Geuzaine, Christophe
author_role author
author2 Gutschmidt, Stephanie
Cardona, Alberto
Geuzaine, Christophe
author2_role author
author
author
dc.subject.none.fl_str_mv Electromagnetic Forces,
Electromechanical Sensors,
Finite Element Methods,
Nonlinear Dynamical Systems,
topic Electromagnetic Forces,
Electromechanical Sensors,
Finite Element Methods,
Nonlinear Dynamical Systems,
purl_subject.fl_str_mv https://purl.org/becyt/ford/2.3
https://purl.org/becyt/ford/2
https://purl.org/becyt/ford/2.2
https://purl.org/becyt/ford/2
dc.description.none.fl_txt_mv Strong couplings between the mechanical, electric, magnetic, fluidic and thermal fields exist in the behaviour laws describing microsystems. Also, due to the large surface/volume ratio, surface forces such as the electrostatic force and fluid damping become predominant. This paper presents the modeling and simulation of electrically-actuated micro-systems taking the electro-mechano-fluidic coupling into account. A micro-resonator consisting in a cantilever beam suspended over a substrate is modeled, and finite-element simulations are validated with experimental measurements.
Fil: Rochus, Veronique. Interuniversity Microelectronics Center; Bélgica
Fil: Gutschmidt, Stephanie. University Of Canterbury; Nueva Zelanda
Fil: Cardona, Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química (i); Argentina. Universidad Nacional del Litoral; Argentina
Fil: Geuzaine, Christophe. University of Liège; Bélgica
description Strong couplings between the mechanical, electric, magnetic, fluidic and thermal fields exist in the behaviour laws describing microsystems. Also, due to the large surface/volume ratio, surface forces such as the electrostatic force and fluid damping become predominant. This paper presents the modeling and simulation of electrically-actuated micro-systems taking the electro-mechano-fluidic coupling into account. A micro-resonator consisting in a cantilever beam suspended over a substrate is modeled, and finite-element simulations are validated with experimental measurements.
publishDate 2012
dc.date.none.fl_str_mv 2012-01
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/10723
Rochus, Veronique; Gutschmidt, Stephanie; Cardona, Alberto; Geuzaine, Christophe; Electro-Mechano-Fluidic Modeling of Microsystems Using Finite Elements; Institute Of Electrical And Electronics Engineers; Ieee Transactions On Magnetics; 48; 1-2012; 355-358
0018-9464
url http://hdl.handle.net/11336/10723
identifier_str_mv Rochus, Veronique; Gutschmidt, Stephanie; Cardona, Alberto; Geuzaine, Christophe; Electro-Mechano-Fluidic Modeling of Microsystems Using Finite Elements; Institute Of Electrical And Electronics Engineers; Ieee Transactions On Magnetics; 48; 1-2012; 355-358
0018-9464
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/url/http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6136624
info:eu-repo/semantics/altIdentifier/doi/10.1109/TMAG.2011.2173663
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
dc.publisher.none.fl_str_mv Institute Of Electrical And Electronics Engineers
publisher.none.fl_str_mv Institute Of Electrical And Electronics Engineers
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
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score 13.070432

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