Basic mechanisms for hillock formation during etching

Autores
Mirabella, D. A.; Suarez, Maria Patricia; Aldao, Celso Manuel
Año de publicación
2008
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
The formation of etch hillocks was explored in the framework of a site-dependent detachment probabilities model. Monte Carlo simulations were carried out for a one-dimensional substrate within a restricted solid-on-solid model in which only first neighbour interactions are considered. We specifically focus on describing the dynamics that lead to hillock-and-valley patterns. The mechanisms responsible for the steady state morphologies were related to apex creation and annihilation, together with valley and hillock etching, but pattern formation reflects two feedback loops that interrelate these mechanisms.
Fil: Mirabella, D. A.. Universidad Nacional de Mar del Plata; Argentina
Fil: Suarez, Maria Patricia. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Mar del Plata. Instituto de Investigaciones en Ciencia y Tecnología de Materiales. Universidad Nacional de Mar del Plata. Facultad de Ingeniería. Instituto de Investigaciones en Ciencia y Tecnología de Materiales; Argentina
Fil: Aldao, Celso Manuel. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Mar del Plata. Instituto de Investigaciones en Ciencia y Tecnología de Materiales. Universidad Nacional de Mar del Plata. Facultad de Ingeniería. Instituto de Investigaciones en Ciencia y Tecnología de Materiales; Argentina
Materia
Etching
Patterning
Solid Surfaces
Structure And Morphology
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-nd/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/69245
Acceder
id CONICETDig_314dd536a5cf943edeac29ffd4845e1d
oai_identifier_str oai:ri.conicet.gov.ar:11336/69245
network_acronym_str CONICETDig
repository_id_str 3498
network_name_str CONICET Digital (CONICET)
spelling Basic mechanisms for hillock formation during etchingMirabella, D. A.Suarez, Maria PatriciaAldao, Celso ManuelEtchingPatterningSolid SurfacesStructure And Morphologyhttps://purl.org/becyt/ford/1.4https://purl.org/becyt/ford/1https://purl.org/becyt/ford/1.3https://purl.org/becyt/ford/1The formation of etch hillocks was explored in the framework of a site-dependent detachment probabilities model. Monte Carlo simulations were carried out for a one-dimensional substrate within a restricted solid-on-solid model in which only first neighbour interactions are considered. We specifically focus on describing the dynamics that lead to hillock-and-valley patterns. The mechanisms responsible for the steady state morphologies were related to apex creation and annihilation, together with valley and hillock etching, but pattern formation reflects two feedback loops that interrelate these mechanisms.Fil: Mirabella, D. A.. Universidad Nacional de Mar del Plata; ArgentinaFil: Suarez, Maria Patricia. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Mar del Plata. Instituto de Investigaciones en Ciencia y Tecnología de Materiales. Universidad Nacional de Mar del Plata. Facultad de Ingeniería. Instituto de Investigaciones en Ciencia y Tecnología de Materiales; ArgentinaFil: Aldao, Celso Manuel. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Mar del Plata. Instituto de Investigaciones en Ciencia y Tecnología de Materiales. Universidad Nacional de Mar del Plata. Facultad de Ingeniería. Instituto de Investigaciones en Ciencia y Tecnología de Materiales; ArgentinaElsevier Science2008-03info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/69245Mirabella, D. A.; Suarez, Maria Patricia; Aldao, Celso Manuel; Basic mechanisms for hillock formation during etching; Elsevier Science; Physica A: Statistical Mechanics and its Applications; 387; 8-9; 3-2008; 1957-19620378-4371CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/url/https://www.sciencedirect.com/science/article/pii/S0378437107012290info:eu-repo/semantics/altIdentifier/doi/10.1016/j.physa.2007.11.028info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-nd/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-10-15T15:04:57Zoai:ri.conicet.gov.ar:11336/69245instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-10-15 15:04:57.587CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv Basic mechanisms for hillock formation during etching
title Basic mechanisms for hillock formation during etching
spellingShingle Basic mechanisms for hillock formation during etching
Mirabella, D. A.
Etching
Patterning
Solid Surfaces
Structure And Morphology
title_short Basic mechanisms for hillock formation during etching
title_full Basic mechanisms for hillock formation during etching
title_fullStr Basic mechanisms for hillock formation during etching
title_full_unstemmed Basic mechanisms for hillock formation during etching
title_sort Basic mechanisms for hillock formation during etching
dc.creator.none.fl_str_mv Mirabella, D. A.
Suarez, Maria Patricia
Aldao, Celso Manuel
author Mirabella, D. A.
author_facet Mirabella, D. A.
Suarez, Maria Patricia
Aldao, Celso Manuel
author_role author
author2 Suarez, Maria Patricia
Aldao, Celso Manuel
author2_role author
author
dc.subject.none.fl_str_mv Etching
Patterning
Solid Surfaces
Structure And Morphology
topic Etching
Patterning
Solid Surfaces
Structure And Morphology
purl_subject.fl_str_mv https://purl.org/becyt/ford/1.4
https://purl.org/becyt/ford/1
https://purl.org/becyt/ford/1.3
https://purl.org/becyt/ford/1
dc.description.none.fl_txt_mv The formation of etch hillocks was explored in the framework of a site-dependent detachment probabilities model. Monte Carlo simulations were carried out for a one-dimensional substrate within a restricted solid-on-solid model in which only first neighbour interactions are considered. We specifically focus on describing the dynamics that lead to hillock-and-valley patterns. The mechanisms responsible for the steady state morphologies were related to apex creation and annihilation, together with valley and hillock etching, but pattern formation reflects two feedback loops that interrelate these mechanisms.
Fil: Mirabella, D. A.. Universidad Nacional de Mar del Plata; Argentina
Fil: Suarez, Maria Patricia. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Mar del Plata. Instituto de Investigaciones en Ciencia y Tecnología de Materiales. Universidad Nacional de Mar del Plata. Facultad de Ingeniería. Instituto de Investigaciones en Ciencia y Tecnología de Materiales; Argentina
Fil: Aldao, Celso Manuel. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Mar del Plata. Instituto de Investigaciones en Ciencia y Tecnología de Materiales. Universidad Nacional de Mar del Plata. Facultad de Ingeniería. Instituto de Investigaciones en Ciencia y Tecnología de Materiales; Argentina
description The formation of etch hillocks was explored in the framework of a site-dependent detachment probabilities model. Monte Carlo simulations were carried out for a one-dimensional substrate within a restricted solid-on-solid model in which only first neighbour interactions are considered. We specifically focus on describing the dynamics that lead to hillock-and-valley patterns. The mechanisms responsible for the steady state morphologies were related to apex creation and annihilation, together with valley and hillock etching, but pattern formation reflects two feedback loops that interrelate these mechanisms.
publishDate 2008
dc.date.none.fl_str_mv 2008-03
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/69245
Mirabella, D. A.; Suarez, Maria Patricia; Aldao, Celso Manuel; Basic mechanisms for hillock formation during etching; Elsevier Science; Physica A: Statistical Mechanics and its Applications; 387; 8-9; 3-2008; 1957-1962
0378-4371
CONICET Digital
CONICET
url http://hdl.handle.net/11336/69245
identifier_str_mv Mirabella, D. A.; Suarez, Maria Patricia; Aldao, Celso Manuel; Basic mechanisms for hillock formation during etching; Elsevier Science; Physica A: Statistical Mechanics and its Applications; 387; 8-9; 3-2008; 1957-1962
0378-4371
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/url/https://www.sciencedirect.com/science/article/pii/S0378437107012290
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.physa.2007.11.028
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-nd/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-nd/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
application/pdf
dc.publisher.none.fl_str_mv Elsevier Science
publisher.none.fl_str_mv Elsevier Science
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
_version_ 1846083192535121920
score 13.22299

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