Anatase TiO2 films obtained by cathodic arc deposition

Autores
Kleiman, Ariel Javier; Marquez, Adriana Beatriz; Lamas, Diego Germán
Año de publicación
2007
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
TiO2 thin films were prepared on glass substrates at different temperatures employing an unfiltered cathodic arc device. The temperature values were varied from room temperature to 400 ºC. The crystalline structure of the films was determined by X-ray diffraction. The surface morphology was studied by scanning electron microscopy and atomic force microscopy. Transmittance in UV-visible region was also measured. All films deposited at temperatures lower than 300 ºC were amorphous, whereas films obtained at higher temperatures grew in crystalline anatase phase. Phase transition amorphous-to-anatase was observed after post-annealing at 400 ºC. The average transmittance value for all films was higher than 80%, a comparison among the films obtained at different temperatures shown the transmittance value slightly higher for films obtained at highest temperatures. Grain size for as-deposited crystalline films was determined approximately in 20 nm, with a surface roughness of about 2 nm.
Fil: Kleiman, Ariel Javier. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Ciudad Universitaria. Instituto de Física del Plasma. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales. Instituto de Física del Plasma; Argentina
Fil: Marquez, Adriana Beatriz. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Ciudad Universitaria. Instituto de Física del Plasma. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales. Instituto de Física del Plasma; Argentina
Fil: Lamas, Diego Germán. Consejo Nacional de Investigaciones Científicas y Técnicas. Instituto de Investigaciones Científicas y Técnicas de las Fuerzas Armadas. Centro de Investigaciones en Sólidos; Argentina
Materia
Arc evaporation
Titanium oxide
Structure
Atomic force microscopy
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/103602
Acceder
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network_name_str CONICET Digital (CONICET)
spelling Anatase TiO2 films obtained by cathodic arc depositionKleiman, Ariel JavierMarquez, Adriana BeatrizLamas, Diego GermánArc evaporationTitanium oxideStructureAtomic force microscopyhttps://purl.org/becyt/ford/2.5https://purl.org/becyt/ford/2TiO2 thin films were prepared on glass substrates at different temperatures employing an unfiltered cathodic arc device. The temperature values were varied from room temperature to 400 ºC. The crystalline structure of the films was determined by X-ray diffraction. The surface morphology was studied by scanning electron microscopy and atomic force microscopy. Transmittance in UV-visible region was also measured. All films deposited at temperatures lower than 300 ºC were amorphous, whereas films obtained at higher temperatures grew in crystalline anatase phase. Phase transition amorphous-to-anatase was observed after post-annealing at 400 ºC. The average transmittance value for all films was higher than 80%, a comparison among the films obtained at different temperatures shown the transmittance value slightly higher for films obtained at highest temperatures. Grain size for as-deposited crystalline films was determined approximately in 20 nm, with a surface roughness of about 2 nm.Fil: Kleiman, Ariel Javier. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Ciudad Universitaria. Instituto de Física del Plasma. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales. Instituto de Física del Plasma; ArgentinaFil: Marquez, Adriana Beatriz. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Ciudad Universitaria. Instituto de Física del Plasma. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales. Instituto de Física del Plasma; ArgentinaFil: Lamas, Diego Germán. Consejo Nacional de Investigaciones Científicas y Técnicas. Instituto de Investigaciones Científicas y Técnicas de las Fuerzas Armadas. Centro de Investigaciones en Sólidos; ArgentinaElsevier Science Sa2007-04info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/103602Kleiman, Ariel Javier; Marquez, Adriana Beatriz; Lamas, Diego Germán; Anatase TiO2 films obtained by cathodic arc deposition; Elsevier Science Sa; Surface and Coatings Technology; 201; 14; 4-2007; 6358-63620257-8972CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/url/https://www.sciencedirect.com/science/article/abs/pii/S025789720601468Xinfo:eu-repo/semantics/altIdentifier/doi/10.1016/j.surfcoat.2006.12.002info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-03T10:00:46Zoai:ri.conicet.gov.ar:11336/103602instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-03 10:00:46.709CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv Anatase TiO2 films obtained by cathodic arc deposition
title Anatase TiO2 films obtained by cathodic arc deposition
spellingShingle Anatase TiO2 films obtained by cathodic arc deposition
Kleiman, Ariel Javier
Arc evaporation
Titanium oxide
Structure
Atomic force microscopy
title_short Anatase TiO2 films obtained by cathodic arc deposition
title_full Anatase TiO2 films obtained by cathodic arc deposition
title_fullStr Anatase TiO2 films obtained by cathodic arc deposition
title_full_unstemmed Anatase TiO2 films obtained by cathodic arc deposition
title_sort Anatase TiO2 films obtained by cathodic arc deposition
dc.creator.none.fl_str_mv Kleiman, Ariel Javier
Marquez, Adriana Beatriz
Lamas, Diego Germán
author Kleiman, Ariel Javier
author_facet Kleiman, Ariel Javier
Marquez, Adriana Beatriz
Lamas, Diego Germán
author_role author
author2 Marquez, Adriana Beatriz
Lamas, Diego Germán
author2_role author
author
dc.subject.none.fl_str_mv Arc evaporation
Titanium oxide
Structure
Atomic force microscopy
topic Arc evaporation
Titanium oxide
Structure
Atomic force microscopy
purl_subject.fl_str_mv https://purl.org/becyt/ford/2.5
https://purl.org/becyt/ford/2
dc.description.none.fl_txt_mv TiO2 thin films were prepared on glass substrates at different temperatures employing an unfiltered cathodic arc device. The temperature values were varied from room temperature to 400 ºC. The crystalline structure of the films was determined by X-ray diffraction. The surface morphology was studied by scanning electron microscopy and atomic force microscopy. Transmittance in UV-visible region was also measured. All films deposited at temperatures lower than 300 ºC were amorphous, whereas films obtained at higher temperatures grew in crystalline anatase phase. Phase transition amorphous-to-anatase was observed after post-annealing at 400 ºC. The average transmittance value for all films was higher than 80%, a comparison among the films obtained at different temperatures shown the transmittance value slightly higher for films obtained at highest temperatures. Grain size for as-deposited crystalline films was determined approximately in 20 nm, with a surface roughness of about 2 nm.
Fil: Kleiman, Ariel Javier. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Ciudad Universitaria. Instituto de Física del Plasma. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales. Instituto de Física del Plasma; Argentina
Fil: Marquez, Adriana Beatriz. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Ciudad Universitaria. Instituto de Física del Plasma. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales. Instituto de Física del Plasma; Argentina
Fil: Lamas, Diego Germán. Consejo Nacional de Investigaciones Científicas y Técnicas. Instituto de Investigaciones Científicas y Técnicas de las Fuerzas Armadas. Centro de Investigaciones en Sólidos; Argentina
description TiO2 thin films were prepared on glass substrates at different temperatures employing an unfiltered cathodic arc device. The temperature values were varied from room temperature to 400 ºC. The crystalline structure of the films was determined by X-ray diffraction. The surface morphology was studied by scanning electron microscopy and atomic force microscopy. Transmittance in UV-visible region was also measured. All films deposited at temperatures lower than 300 ºC were amorphous, whereas films obtained at higher temperatures grew in crystalline anatase phase. Phase transition amorphous-to-anatase was observed after post-annealing at 400 ºC. The average transmittance value for all films was higher than 80%, a comparison among the films obtained at different temperatures shown the transmittance value slightly higher for films obtained at highest temperatures. Grain size for as-deposited crystalline films was determined approximately in 20 nm, with a surface roughness of about 2 nm.
publishDate 2007
dc.date.none.fl_str_mv 2007-04
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/103602
Kleiman, Ariel Javier; Marquez, Adriana Beatriz; Lamas, Diego Germán; Anatase TiO2 films obtained by cathodic arc deposition; Elsevier Science Sa; Surface and Coatings Technology; 201; 14; 4-2007; 6358-6362
0257-8972
CONICET Digital
CONICET
url http://hdl.handle.net/11336/103602
identifier_str_mv Kleiman, Ariel Javier; Marquez, Adriana Beatriz; Lamas, Diego Germán; Anatase TiO2 films obtained by cathodic arc deposition; Elsevier Science Sa; Surface and Coatings Technology; 201; 14; 4-2007; 6358-6362
0257-8972
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/url/https://www.sciencedirect.com/science/article/abs/pii/S025789720601468X
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.surfcoat.2006.12.002
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
application/pdf
application/pdf
dc.publisher.none.fl_str_mv Elsevier Science Sa
publisher.none.fl_str_mv Elsevier Science Sa
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
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score 13.13397

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