Surface nanopatterning of hard and soft thin films by a replica-molding approach

Autores
Vázquez, Luis; Auger, M. A.; Azzaroni, Omar; Schilardi, Patricia Laura; Gago, R.; Fonticelli, Mariano Hernán; Sánchez, O.; Salvarezza, Roberto Carlos; Albella, J. M.
Año de publicación
2004
Idioma
inglés
Tipo de recurso
documento de conferencia
Estado
versión publicada
Descripción
In this work, we report on our recent results obtained by a replica-molding approach for large-scale surface nanopatterning. Two materials with quite different mechanical properties have been naopatterned, namely: titanium nitride (TiN) films deposited by reactive sputtering and polystyrene films deposited by the casting procedure. In order to explore the capabilities of this strategy we have used in both cases as master surfaces to be replicated silicon surfaces previously nanostructured by low-energy ion-beam sputtering. The original template pattern was formed by an array of silicon lenticular nanodots, 6 nm of average height and 40-50 nm of lateral size, displaying short-range hexagonal order.
Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas
Materia
Física
Nanotecnología
Nivel de accesibilidad
acceso abierto
Condiciones de uso
http://creativecommons.org/licenses/by-nc-sa/4.0/
Repositorio
SEDICI (UNLP)
Institución
Universidad Nacional de La Plata
OAI Identificador
oai:sedici.unlp.edu.ar:10915/123986
Acceder
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spelling Surface nanopatterning of hard and soft thin films by a replica-molding approachVázquez, LuisAuger, M. A.Azzaroni, OmarSchilardi, Patricia LauraGago, R.Fonticelli, Mariano HernánSánchez, O.Salvarezza, Roberto CarlosAlbella, J. M.FísicaNanotecnologíaIn this work, we report on our recent results obtained by a replica-molding approach for large-scale surface nanopatterning. Two materials with quite different mechanical properties have been naopatterned, namely: titanium nitride (TiN) films deposited by reactive sputtering and polystyrene films deposited by the casting procedure. In order to explore the capabilities of this strategy we have used in both cases as master surfaces to be replicated silicon surfaces previously nanostructured by low-energy ion-beam sputtering. The original template pattern was formed by an array of silicon lenticular nanodots, 6 nm of average height and 40-50 nm of lateral size, displaying short-range hexagonal order.Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas2004info:eu-repo/semantics/conferenceObjectinfo:eu-repo/semantics/publishedVersionResumenhttp://purl.org/coar/resource_type/c_5794info:ar-repo/semantics/documentoDeConferenciaapplication/pdfhttp://sedici.unlp.edu.ar/handle/10915/123986enginfo:eu-repo/semantics/openAccesshttp://creativecommons.org/licenses/by-nc-sa/4.0/Creative Commons Attribution-NonCommercial-ShareAlike 4.0 International (CC BY-NC-SA 4.0)reponame:SEDICI (UNLP)instname:Universidad Nacional de La Platainstacron:UNLP2025-09-29T11:29:43Zoai:sedici.unlp.edu.ar:10915/123986Institucionalhttp://sedici.unlp.edu.ar/Universidad públicaNo correspondehttp://sedici.unlp.edu.ar/oai/snrdalira@sedici.unlp.edu.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:13292025-09-29 11:29:43.58SEDICI (UNLP) - Universidad Nacional de La Platafalse
dc.title.none.fl_str_mv Surface nanopatterning of hard and soft thin films by a replica-molding approach
title Surface nanopatterning of hard and soft thin films by a replica-molding approach
spellingShingle Surface nanopatterning of hard and soft thin films by a replica-molding approach
Vázquez, Luis
Física
Nanotecnología
title_short Surface nanopatterning of hard and soft thin films by a replica-molding approach
title_full Surface nanopatterning of hard and soft thin films by a replica-molding approach
title_fullStr Surface nanopatterning of hard and soft thin films by a replica-molding approach
title_full_unstemmed Surface nanopatterning of hard and soft thin films by a replica-molding approach
title_sort Surface nanopatterning of hard and soft thin films by a replica-molding approach
dc.creator.none.fl_str_mv Vázquez, Luis
Auger, M. A.
Azzaroni, Omar
Schilardi, Patricia Laura
Gago, R.
Fonticelli, Mariano Hernán
Sánchez, O.
Salvarezza, Roberto Carlos
Albella, J. M.
author Vázquez, Luis
author_facet Vázquez, Luis
Auger, M. A.
Azzaroni, Omar
Schilardi, Patricia Laura
Gago, R.
Fonticelli, Mariano Hernán
Sánchez, O.
Salvarezza, Roberto Carlos
Albella, J. M.
author_role author
author2 Auger, M. A.
Azzaroni, Omar
Schilardi, Patricia Laura
Gago, R.
Fonticelli, Mariano Hernán
Sánchez, O.
Salvarezza, Roberto Carlos
Albella, J. M.
author2_role author
author
author
author
author
author
author
author
dc.subject.none.fl_str_mv Física
Nanotecnología
topic Física
Nanotecnología
dc.description.none.fl_txt_mv In this work, we report on our recent results obtained by a replica-molding approach for large-scale surface nanopatterning. Two materials with quite different mechanical properties have been naopatterned, namely: titanium nitride (TiN) films deposited by reactive sputtering and polystyrene films deposited by the casting procedure. In order to explore the capabilities of this strategy we have used in both cases as master surfaces to be replicated silicon surfaces previously nanostructured by low-energy ion-beam sputtering. The original template pattern was formed by an array of silicon lenticular nanodots, 6 nm of average height and 40-50 nm of lateral size, displaying short-range hexagonal order.
Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas
description In this work, we report on our recent results obtained by a replica-molding approach for large-scale surface nanopatterning. Two materials with quite different mechanical properties have been naopatterned, namely: titanium nitride (TiN) films deposited by reactive sputtering and polystyrene films deposited by the casting procedure. In order to explore the capabilities of this strategy we have used in both cases as master surfaces to be replicated silicon surfaces previously nanostructured by low-energy ion-beam sputtering. The original template pattern was formed by an array of silicon lenticular nanodots, 6 nm of average height and 40-50 nm of lateral size, displaying short-range hexagonal order.
publishDate 2004
dc.date.none.fl_str_mv 2004
dc.type.none.fl_str_mv info:eu-repo/semantics/conferenceObject
info:eu-repo/semantics/publishedVersion
Resumen
http://purl.org/coar/resource_type/c_5794
info:ar-repo/semantics/documentoDeConferencia
format conferenceObject
status_str publishedVersion
dc.identifier.none.fl_str_mv http://sedici.unlp.edu.ar/handle/10915/123986
url http://sedici.unlp.edu.ar/handle/10915/123986
dc.language.none.fl_str_mv eng
language eng
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
http://creativecommons.org/licenses/by-nc-sa/4.0/
Creative Commons Attribution-NonCommercial-ShareAlike 4.0 International (CC BY-NC-SA 4.0)
eu_rights_str_mv openAccess
rights_invalid_str_mv http://creativecommons.org/licenses/by-nc-sa/4.0/
Creative Commons Attribution-NonCommercial-ShareAlike 4.0 International (CC BY-NC-SA 4.0)
dc.format.none.fl_str_mv application/pdf
dc.source.none.fl_str_mv reponame:SEDICI (UNLP)
instname:Universidad Nacional de La Plata
instacron:UNLP
reponame_str SEDICI (UNLP)
collection SEDICI (UNLP)
instname_str Universidad Nacional de La Plata
instacron_str UNLP
institution UNLP
repository.name.fl_str_mv SEDICI (UNLP) - Universidad Nacional de La Plata
repository.mail.fl_str_mv alira@sedici.unlp.edu.ar
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