Resistivity humidity sensors based on hydrogenated amorphous carbon films
- Autores
- Epeloa, Javier Eduardo; Repetto, Carlos Enrique; Gomez, Bernardo Jose Armando; Nachez, Juan Lucas; Dobry, Ariel Oscar
- Año de publicación
- 2019
- Idioma
- inglés
- Tipo de recurso
- artículo
- Estado
- versión publicada
- Descripción
- We have studied the humidity dependence of the electrical properties in hydrogenated amorphous carbon (a-C:H) films. The films were prepared in two stages combining the techniques of physical deposition in vapor phase evaporation (PAVD) and plasma pulsed nitriding. They were deposited over printed circuit boards made of synthetic resin FR2, predesigned to measure DC and AC transport. The Raman spectrum showed a broad peak whose two components are characteristics of a-C:H. By treating the sample in N2-H2 plasma, the impedance became intrinsically sensitive to the relative humidity (RH) of the surrounding media. We observed that when RH increased, the electrical impedance (Z) of the films diminished. The complex impedance spectroscopy method was used to analyze the interaction between the water molecules and the a-C:H film. The main contribution to the humidity dependency of Z came from the resistivity component. The present work provides a fundamental support to develop humidity sensors based on the variation of the impedance of a-C:H films.
Fil: Epeloa, Javier Eduardo. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
Fil: Repetto, Carlos Enrique. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
Fil: Gomez, Bernardo Jose Armando. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
Fil: Nachez, Juan Lucas. Universidade Federal Fluminense; Brasil. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
Fil: Dobry, Ariel Oscar. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina - Materia
-
THIN FILMS
AMORPHOUS CARBON FILMS
IMPEDANCE SPECTROSCOPY - Nivel de accesibilidad
- acceso abierto
- Condiciones de uso
- https://creativecommons.org/licenses/by/2.5/ar/
- Repositorio
- Institución
- Consejo Nacional de Investigaciones Científicas y Técnicas
- OAI Identificador
- oai:ri.conicet.gov.ar:11336/93970
Ver los metadatos del registro completo
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Resistivity humidity sensors based on hydrogenated amorphous carbon filmsEpeloa, Javier EduardoRepetto, Carlos EnriqueGomez, Bernardo Jose ArmandoNachez, Juan LucasDobry, Ariel OscarTHIN FILMSAMORPHOUS CARBON FILMSIMPEDANCE SPECTROSCOPYhttps://purl.org/becyt/ford/2.5https://purl.org/becyt/ford/2We have studied the humidity dependence of the electrical properties in hydrogenated amorphous carbon (a-C:H) films. The films were prepared in two stages combining the techniques of physical deposition in vapor phase evaporation (PAVD) and plasma pulsed nitriding. They were deposited over printed circuit boards made of synthetic resin FR2, predesigned to measure DC and AC transport. The Raman spectrum showed a broad peak whose two components are characteristics of a-C:H. By treating the sample in N2-H2 plasma, the impedance became intrinsically sensitive to the relative humidity (RH) of the surrounding media. We observed that when RH increased, the electrical impedance (Z) of the films diminished. The complex impedance spectroscopy method was used to analyze the interaction between the water molecules and the a-C:H film. The main contribution to the humidity dependency of Z came from the resistivity component. The present work provides a fundamental support to develop humidity sensors based on the variation of the impedance of a-C:H films.Fil: Epeloa, Javier Eduardo. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; ArgentinaFil: Repetto, Carlos Enrique. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; ArgentinaFil: Gomez, Bernardo Jose Armando. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; ArgentinaFil: Nachez, Juan Lucas. Universidade Federal Fluminense; Brasil. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; ArgentinaFil: Dobry, Ariel Oscar. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; ArgentinaIOP Publishing2019-02info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/93970Epeloa, Javier Eduardo; Repetto, Carlos Enrique; Gomez, Bernardo Jose Armando; Nachez, Juan Lucas; Dobry, Ariel Oscar; Resistivity humidity sensors based on hydrogenated amorphous carbon films; IOP Publishing; Materials Research Express; 6; 2; 2-2019; 1-8; 0256042053-1591CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/doi/10.1088/2053-1591/aaed7ainfo:eu-repo/semantics/altIdentifier/url/https://iopscience.iop.org/article/10.1088/2053-1591/aaed7ainfo:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-29T09:48:04Zoai:ri.conicet.gov.ar:11336/93970instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-29 09:48:04.886CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse |
dc.title.none.fl_str_mv |
Resistivity humidity sensors based on hydrogenated amorphous carbon films |
title |
Resistivity humidity sensors based on hydrogenated amorphous carbon films |
spellingShingle |
Resistivity humidity sensors based on hydrogenated amorphous carbon films Epeloa, Javier Eduardo THIN FILMS AMORPHOUS CARBON FILMS IMPEDANCE SPECTROSCOPY |
title_short |
Resistivity humidity sensors based on hydrogenated amorphous carbon films |
title_full |
Resistivity humidity sensors based on hydrogenated amorphous carbon films |
title_fullStr |
Resistivity humidity sensors based on hydrogenated amorphous carbon films |
title_full_unstemmed |
Resistivity humidity sensors based on hydrogenated amorphous carbon films |
title_sort |
Resistivity humidity sensors based on hydrogenated amorphous carbon films |
dc.creator.none.fl_str_mv |
Epeloa, Javier Eduardo Repetto, Carlos Enrique Gomez, Bernardo Jose Armando Nachez, Juan Lucas Dobry, Ariel Oscar |
author |
Epeloa, Javier Eduardo |
author_facet |
Epeloa, Javier Eduardo Repetto, Carlos Enrique Gomez, Bernardo Jose Armando Nachez, Juan Lucas Dobry, Ariel Oscar |
author_role |
author |
author2 |
Repetto, Carlos Enrique Gomez, Bernardo Jose Armando Nachez, Juan Lucas Dobry, Ariel Oscar |
author2_role |
author author author author |
dc.subject.none.fl_str_mv |
THIN FILMS AMORPHOUS CARBON FILMS IMPEDANCE SPECTROSCOPY |
topic |
THIN FILMS AMORPHOUS CARBON FILMS IMPEDANCE SPECTROSCOPY |
purl_subject.fl_str_mv |
https://purl.org/becyt/ford/2.5 https://purl.org/becyt/ford/2 |
dc.description.none.fl_txt_mv |
We have studied the humidity dependence of the electrical properties in hydrogenated amorphous carbon (a-C:H) films. The films were prepared in two stages combining the techniques of physical deposition in vapor phase evaporation (PAVD) and plasma pulsed nitriding. They were deposited over printed circuit boards made of synthetic resin FR2, predesigned to measure DC and AC transport. The Raman spectrum showed a broad peak whose two components are characteristics of a-C:H. By treating the sample in N2-H2 plasma, the impedance became intrinsically sensitive to the relative humidity (RH) of the surrounding media. We observed that when RH increased, the electrical impedance (Z) of the films diminished. The complex impedance spectroscopy method was used to analyze the interaction between the water molecules and the a-C:H film. The main contribution to the humidity dependency of Z came from the resistivity component. The present work provides a fundamental support to develop humidity sensors based on the variation of the impedance of a-C:H films. Fil: Epeloa, Javier Eduardo. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina Fil: Repetto, Carlos Enrique. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina Fil: Gomez, Bernardo Jose Armando. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina Fil: Nachez, Juan Lucas. Universidade Federal Fluminense; Brasil. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina Fil: Dobry, Ariel Oscar. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina |
description |
We have studied the humidity dependence of the electrical properties in hydrogenated amorphous carbon (a-C:H) films. The films were prepared in two stages combining the techniques of physical deposition in vapor phase evaporation (PAVD) and plasma pulsed nitriding. They were deposited over printed circuit boards made of synthetic resin FR2, predesigned to measure DC and AC transport. The Raman spectrum showed a broad peak whose two components are characteristics of a-C:H. By treating the sample in N2-H2 plasma, the impedance became intrinsically sensitive to the relative humidity (RH) of the surrounding media. We observed that when RH increased, the electrical impedance (Z) of the films diminished. The complex impedance spectroscopy method was used to analyze the interaction between the water molecules and the a-C:H film. The main contribution to the humidity dependency of Z came from the resistivity component. The present work provides a fundamental support to develop humidity sensors based on the variation of the impedance of a-C:H films. |
publishDate |
2019 |
dc.date.none.fl_str_mv |
2019-02 |
dc.type.none.fl_str_mv |
info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion http://purl.org/coar/resource_type/c_6501 info:ar-repo/semantics/articulo |
format |
article |
status_str |
publishedVersion |
dc.identifier.none.fl_str_mv |
http://hdl.handle.net/11336/93970 Epeloa, Javier Eduardo; Repetto, Carlos Enrique; Gomez, Bernardo Jose Armando; Nachez, Juan Lucas; Dobry, Ariel Oscar; Resistivity humidity sensors based on hydrogenated amorphous carbon films; IOP Publishing; Materials Research Express; 6; 2; 2-2019; 1-8; 025604 2053-1591 CONICET Digital CONICET |
url |
http://hdl.handle.net/11336/93970 |
identifier_str_mv |
Epeloa, Javier Eduardo; Repetto, Carlos Enrique; Gomez, Bernardo Jose Armando; Nachez, Juan Lucas; Dobry, Ariel Oscar; Resistivity humidity sensors based on hydrogenated amorphous carbon films; IOP Publishing; Materials Research Express; 6; 2; 2-2019; 1-8; 025604 2053-1591 CONICET Digital CONICET |
dc.language.none.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
info:eu-repo/semantics/altIdentifier/doi/10.1088/2053-1591/aaed7a info:eu-repo/semantics/altIdentifier/url/https://iopscience.iop.org/article/10.1088/2053-1591/aaed7a |
dc.rights.none.fl_str_mv |
info:eu-repo/semantics/openAccess https://creativecommons.org/licenses/by/2.5/ar/ |
eu_rights_str_mv |
openAccess |
rights_invalid_str_mv |
https://creativecommons.org/licenses/by/2.5/ar/ |
dc.format.none.fl_str_mv |
application/pdf application/pdf application/pdf application/pdf |
dc.publisher.none.fl_str_mv |
IOP Publishing |
publisher.none.fl_str_mv |
IOP Publishing |
dc.source.none.fl_str_mv |
reponame:CONICET Digital (CONICET) instname:Consejo Nacional de Investigaciones Científicas y Técnicas |
reponame_str |
CONICET Digital (CONICET) |
collection |
CONICET Digital (CONICET) |
instname_str |
Consejo Nacional de Investigaciones Científicas y Técnicas |
repository.name.fl_str_mv |
CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas |
repository.mail.fl_str_mv |
dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar |
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1844613495259136000 |
score |
13.070432 |