Resistivity humidity sensors based on hydrogenated amorphous carbon films

Autores
Epeloa, Javier Eduardo; Repetto, Carlos Enrique; Gomez, Bernardo Jose Armando; Nachez, Juan Lucas; Dobry, Ariel Oscar
Año de publicación
2019
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
We have studied the humidity dependence of the electrical properties in hydrogenated amorphous carbon (a-C:H) films. The films were prepared in two stages combining the techniques of physical deposition in vapor phase evaporation (PAVD) and plasma pulsed nitriding. They were deposited over printed circuit boards made of synthetic resin FR2, predesigned to measure DC and AC transport. The Raman spectrum showed a broad peak whose two components are characteristics of a-C:H. By treating the sample in N2-H2 plasma, the impedance became intrinsically sensitive to the relative humidity (RH) of the surrounding media. We observed that when RH increased, the electrical impedance (Z) of the films diminished. The complex impedance spectroscopy method was used to analyze the interaction between the water molecules and the a-C:H film. The main contribution to the humidity dependency of Z came from the resistivity component. The present work provides a fundamental support to develop humidity sensors based on the variation of the impedance of a-C:H films.
Fil: Epeloa, Javier Eduardo. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
Fil: Repetto, Carlos Enrique. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
Fil: Gomez, Bernardo Jose Armando. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
Fil: Nachez, Juan Lucas. Universidade Federal Fluminense; Brasil. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
Fil: Dobry, Ariel Oscar. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
Materia
THIN FILMS
AMORPHOUS CARBON FILMS
IMPEDANCE SPECTROSCOPY
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/93970
Acceder
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network_acronym_str CONICETDig
repository_id_str 3498
network_name_str CONICET Digital (CONICET)
spelling Resistivity humidity sensors based on hydrogenated amorphous carbon filmsEpeloa, Javier EduardoRepetto, Carlos EnriqueGomez, Bernardo Jose ArmandoNachez, Juan LucasDobry, Ariel OscarTHIN FILMSAMORPHOUS CARBON FILMSIMPEDANCE SPECTROSCOPYhttps://purl.org/becyt/ford/2.5https://purl.org/becyt/ford/2We have studied the humidity dependence of the electrical properties in hydrogenated amorphous carbon (a-C:H) films. The films were prepared in two stages combining the techniques of physical deposition in vapor phase evaporation (PAVD) and plasma pulsed nitriding. They were deposited over printed circuit boards made of synthetic resin FR2, predesigned to measure DC and AC transport. The Raman spectrum showed a broad peak whose two components are characteristics of a-C:H. By treating the sample in N2-H2 plasma, the impedance became intrinsically sensitive to the relative humidity (RH) of the surrounding media. We observed that when RH increased, the electrical impedance (Z) of the films diminished. The complex impedance spectroscopy method was used to analyze the interaction between the water molecules and the a-C:H film. The main contribution to the humidity dependency of Z came from the resistivity component. The present work provides a fundamental support to develop humidity sensors based on the variation of the impedance of a-C:H films.Fil: Epeloa, Javier Eduardo. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; ArgentinaFil: Repetto, Carlos Enrique. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; ArgentinaFil: Gomez, Bernardo Jose Armando. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; ArgentinaFil: Nachez, Juan Lucas. Universidade Federal Fluminense; Brasil. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; ArgentinaFil: Dobry, Ariel Oscar. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; ArgentinaIOP Publishing2019-02info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/93970Epeloa, Javier Eduardo; Repetto, Carlos Enrique; Gomez, Bernardo Jose Armando; Nachez, Juan Lucas; Dobry, Ariel Oscar; Resistivity humidity sensors based on hydrogenated amorphous carbon films; IOP Publishing; Materials Research Express; 6; 2; 2-2019; 1-8; 0256042053-1591CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/doi/10.1088/2053-1591/aaed7ainfo:eu-repo/semantics/altIdentifier/url/https://iopscience.iop.org/article/10.1088/2053-1591/aaed7ainfo:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-10-15T14:41:57Zoai:ri.conicet.gov.ar:11336/93970instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-10-15 14:41:58.171CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv Resistivity humidity sensors based on hydrogenated amorphous carbon films
title Resistivity humidity sensors based on hydrogenated amorphous carbon films
spellingShingle Resistivity humidity sensors based on hydrogenated amorphous carbon films
Epeloa, Javier Eduardo
THIN FILMS
AMORPHOUS CARBON FILMS
IMPEDANCE SPECTROSCOPY
title_short Resistivity humidity sensors based on hydrogenated amorphous carbon films
title_full Resistivity humidity sensors based on hydrogenated amorphous carbon films
title_fullStr Resistivity humidity sensors based on hydrogenated amorphous carbon films
title_full_unstemmed Resistivity humidity sensors based on hydrogenated amorphous carbon films
title_sort Resistivity humidity sensors based on hydrogenated amorphous carbon films
dc.creator.none.fl_str_mv Epeloa, Javier Eduardo
Repetto, Carlos Enrique
Gomez, Bernardo Jose Armando
Nachez, Juan Lucas
Dobry, Ariel Oscar
author Epeloa, Javier Eduardo
author_facet Epeloa, Javier Eduardo
Repetto, Carlos Enrique
Gomez, Bernardo Jose Armando
Nachez, Juan Lucas
Dobry, Ariel Oscar
author_role author
author2 Repetto, Carlos Enrique
Gomez, Bernardo Jose Armando
Nachez, Juan Lucas
Dobry, Ariel Oscar
author2_role author
author
author
author
dc.subject.none.fl_str_mv THIN FILMS
AMORPHOUS CARBON FILMS
IMPEDANCE SPECTROSCOPY
topic THIN FILMS
AMORPHOUS CARBON FILMS
IMPEDANCE SPECTROSCOPY
purl_subject.fl_str_mv https://purl.org/becyt/ford/2.5
https://purl.org/becyt/ford/2
dc.description.none.fl_txt_mv We have studied the humidity dependence of the electrical properties in hydrogenated amorphous carbon (a-C:H) films. The films were prepared in two stages combining the techniques of physical deposition in vapor phase evaporation (PAVD) and plasma pulsed nitriding. They were deposited over printed circuit boards made of synthetic resin FR2, predesigned to measure DC and AC transport. The Raman spectrum showed a broad peak whose two components are characteristics of a-C:H. By treating the sample in N2-H2 plasma, the impedance became intrinsically sensitive to the relative humidity (RH) of the surrounding media. We observed that when RH increased, the electrical impedance (Z) of the films diminished. The complex impedance spectroscopy method was used to analyze the interaction between the water molecules and the a-C:H film. The main contribution to the humidity dependency of Z came from the resistivity component. The present work provides a fundamental support to develop humidity sensors based on the variation of the impedance of a-C:H films.
Fil: Epeloa, Javier Eduardo. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
Fil: Repetto, Carlos Enrique. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
Fil: Gomez, Bernardo Jose Armando. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
Fil: Nachez, Juan Lucas. Universidade Federal Fluminense; Brasil. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
Fil: Dobry, Ariel Oscar. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
description We have studied the humidity dependence of the electrical properties in hydrogenated amorphous carbon (a-C:H) films. The films were prepared in two stages combining the techniques of physical deposition in vapor phase evaporation (PAVD) and plasma pulsed nitriding. They were deposited over printed circuit boards made of synthetic resin FR2, predesigned to measure DC and AC transport. The Raman spectrum showed a broad peak whose two components are characteristics of a-C:H. By treating the sample in N2-H2 plasma, the impedance became intrinsically sensitive to the relative humidity (RH) of the surrounding media. We observed that when RH increased, the electrical impedance (Z) of the films diminished. The complex impedance spectroscopy method was used to analyze the interaction between the water molecules and the a-C:H film. The main contribution to the humidity dependency of Z came from the resistivity component. The present work provides a fundamental support to develop humidity sensors based on the variation of the impedance of a-C:H films.
publishDate 2019
dc.date.none.fl_str_mv 2019-02
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/93970
Epeloa, Javier Eduardo; Repetto, Carlos Enrique; Gomez, Bernardo Jose Armando; Nachez, Juan Lucas; Dobry, Ariel Oscar; Resistivity humidity sensors based on hydrogenated amorphous carbon films; IOP Publishing; Materials Research Express; 6; 2; 2-2019; 1-8; 025604
2053-1591
CONICET Digital
CONICET
url http://hdl.handle.net/11336/93970
identifier_str_mv Epeloa, Javier Eduardo; Repetto, Carlos Enrique; Gomez, Bernardo Jose Armando; Nachez, Juan Lucas; Dobry, Ariel Oscar; Resistivity humidity sensors based on hydrogenated amorphous carbon films; IOP Publishing; Materials Research Express; 6; 2; 2-2019; 1-8; 025604
2053-1591
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/doi/10.1088/2053-1591/aaed7a
info:eu-repo/semantics/altIdentifier/url/https://iopscience.iop.org/article/10.1088/2053-1591/aaed7a
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
application/pdf
application/pdf
dc.publisher.none.fl_str_mv IOP Publishing
publisher.none.fl_str_mv IOP Publishing
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
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score 13.22299

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