Study of copper surface oxidation by grazing angle X-ray excitation

Autores
Sanchez, Hector Jorge; Pérez, Carlos Alberto
Año de publicación
2010
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
This work reports measurements of copper surface oxidation by XRF analysis under grazing angle excitation. The mathematical model for analyzing data is based on the usual equation for XRF intensity, corrected by the stratified model for the layer excitation. The final expressions are fitted to the data by using the Simplex algorithm. Three samples of silicon wafers with surface layers of copper were made by using the controlled-evaporation technique under vacuum. The final layer thicknesses were 190 Å, 400 Å, and 800 Å. For each sample, several measurements were carried out by performing an angular scan in the region of the critical angle for total reflection. Different measurements were taken immediately after evaporation, after 30 min, after 1 h, after 4 h, and after 30 min in oven at 65°. The results show small variations among the different spectra measured for each sample. The most significant variations are observed for the first measurement (after evaporation) and the last one (after the heating in oven). The mathematical model works correctly for a two-layer scheme but shows inconsistencies for more complex schemes. This indicates that the stratified model is not appropriate for continuous media due to the nature of the theoretical assumptions in which the stratified model is based. Our results show also that the surface oxidation process takes place in the first moments of exposition to air and does not progress afterwards except if the sample is heated.
Fil: Sanchez, Hector Jorge. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Córdoba. Instituto de Física Enrique Gaviola. Universidad Nacional de Córdoba. Instituto de Física Enrique Gaviola; Argentina
Fil: Pérez, Carlos Alberto. Laboratorio Nacional de Luz Sincrotron; Brasil
Materia
DEPTH PROFILING
STRATIFIED MEDIA
TXRF
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/190232
Acceder
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oai_identifier_str oai:ri.conicet.gov.ar:11336/190232
network_acronym_str CONICETDig
repository_id_str 3498
network_name_str CONICET Digital (CONICET)
spelling Study of copper surface oxidation by grazing angle X-ray excitationSanchez, Hector JorgePérez, Carlos AlbertoDEPTH PROFILINGSTRATIFIED MEDIATXRFhttps://purl.org/becyt/ford/1.3https://purl.org/becyt/ford/1This work reports measurements of copper surface oxidation by XRF analysis under grazing angle excitation. The mathematical model for analyzing data is based on the usual equation for XRF intensity, corrected by the stratified model for the layer excitation. The final expressions are fitted to the data by using the Simplex algorithm. Three samples of silicon wafers with surface layers of copper were made by using the controlled-evaporation technique under vacuum. The final layer thicknesses were 190 Å, 400 Å, and 800 Å. For each sample, several measurements were carried out by performing an angular scan in the region of the critical angle for total reflection. Different measurements were taken immediately after evaporation, after 30 min, after 1 h, after 4 h, and after 30 min in oven at 65°. The results show small variations among the different spectra measured for each sample. The most significant variations are observed for the first measurement (after evaporation) and the last one (after the heating in oven). The mathematical model works correctly for a two-layer scheme but shows inconsistencies for more complex schemes. This indicates that the stratified model is not appropriate for continuous media due to the nature of the theoretical assumptions in which the stratified model is based. Our results show also that the surface oxidation process takes place in the first moments of exposition to air and does not progress afterwards except if the sample is heated.Fil: Sanchez, Hector Jorge. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Córdoba. Instituto de Física Enrique Gaviola. Universidad Nacional de Córdoba. Instituto de Física Enrique Gaviola; ArgentinaFil: Pérez, Carlos Alberto. Laboratorio Nacional de Luz Sincrotron; BrasilPergamon-Elsevier Science Ltd2010-04info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/190232Sanchez, Hector Jorge; Pérez, Carlos Alberto; Study of copper surface oxidation by grazing angle X-ray excitation; Pergamon-Elsevier Science Ltd; Spectrochimica Acta Part B: Atomic Spectroscopy; 65; 6; 4-2010; 466-4700584-85471873-3565CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/doi/10.1016/j.sab.2010.02.018info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-29T10:41:01Zoai:ri.conicet.gov.ar:11336/190232instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-29 10:41:01.35CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv Study of copper surface oxidation by grazing angle X-ray excitation
title Study of copper surface oxidation by grazing angle X-ray excitation
spellingShingle Study of copper surface oxidation by grazing angle X-ray excitation
Sanchez, Hector Jorge
DEPTH PROFILING
STRATIFIED MEDIA
TXRF
title_short Study of copper surface oxidation by grazing angle X-ray excitation
title_full Study of copper surface oxidation by grazing angle X-ray excitation
title_fullStr Study of copper surface oxidation by grazing angle X-ray excitation
title_full_unstemmed Study of copper surface oxidation by grazing angle X-ray excitation
title_sort Study of copper surface oxidation by grazing angle X-ray excitation
dc.creator.none.fl_str_mv Sanchez, Hector Jorge
Pérez, Carlos Alberto
author Sanchez, Hector Jorge
author_facet Sanchez, Hector Jorge
Pérez, Carlos Alberto
author_role author
author2 Pérez, Carlos Alberto
author2_role author
dc.subject.none.fl_str_mv DEPTH PROFILING
STRATIFIED MEDIA
TXRF
topic DEPTH PROFILING
STRATIFIED MEDIA
TXRF
purl_subject.fl_str_mv https://purl.org/becyt/ford/1.3
https://purl.org/becyt/ford/1
dc.description.none.fl_txt_mv This work reports measurements of copper surface oxidation by XRF analysis under grazing angle excitation. The mathematical model for analyzing data is based on the usual equation for XRF intensity, corrected by the stratified model for the layer excitation. The final expressions are fitted to the data by using the Simplex algorithm. Three samples of silicon wafers with surface layers of copper were made by using the controlled-evaporation technique under vacuum. The final layer thicknesses were 190 Å, 400 Å, and 800 Å. For each sample, several measurements were carried out by performing an angular scan in the region of the critical angle for total reflection. Different measurements were taken immediately after evaporation, after 30 min, after 1 h, after 4 h, and after 30 min in oven at 65°. The results show small variations among the different spectra measured for each sample. The most significant variations are observed for the first measurement (after evaporation) and the last one (after the heating in oven). The mathematical model works correctly for a two-layer scheme but shows inconsistencies for more complex schemes. This indicates that the stratified model is not appropriate for continuous media due to the nature of the theoretical assumptions in which the stratified model is based. Our results show also that the surface oxidation process takes place in the first moments of exposition to air and does not progress afterwards except if the sample is heated.
Fil: Sanchez, Hector Jorge. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Córdoba. Instituto de Física Enrique Gaviola. Universidad Nacional de Córdoba. Instituto de Física Enrique Gaviola; Argentina
Fil: Pérez, Carlos Alberto. Laboratorio Nacional de Luz Sincrotron; Brasil
description This work reports measurements of copper surface oxidation by XRF analysis under grazing angle excitation. The mathematical model for analyzing data is based on the usual equation for XRF intensity, corrected by the stratified model for the layer excitation. The final expressions are fitted to the data by using the Simplex algorithm. Three samples of silicon wafers with surface layers of copper were made by using the controlled-evaporation technique under vacuum. The final layer thicknesses were 190 Å, 400 Å, and 800 Å. For each sample, several measurements were carried out by performing an angular scan in the region of the critical angle for total reflection. Different measurements were taken immediately after evaporation, after 30 min, after 1 h, after 4 h, and after 30 min in oven at 65°. The results show small variations among the different spectra measured for each sample. The most significant variations are observed for the first measurement (after evaporation) and the last one (after the heating in oven). The mathematical model works correctly for a two-layer scheme but shows inconsistencies for more complex schemes. This indicates that the stratified model is not appropriate for continuous media due to the nature of the theoretical assumptions in which the stratified model is based. Our results show also that the surface oxidation process takes place in the first moments of exposition to air and does not progress afterwards except if the sample is heated.
publishDate 2010
dc.date.none.fl_str_mv 2010-04
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/190232
Sanchez, Hector Jorge; Pérez, Carlos Alberto; Study of copper surface oxidation by grazing angle X-ray excitation; Pergamon-Elsevier Science Ltd; Spectrochimica Acta Part B: Atomic Spectroscopy; 65; 6; 4-2010; 466-470
0584-8547
1873-3565
CONICET Digital
CONICET
url http://hdl.handle.net/11336/190232
identifier_str_mv Sanchez, Hector Jorge; Pérez, Carlos Alberto; Study of copper surface oxidation by grazing angle X-ray excitation; Pergamon-Elsevier Science Ltd; Spectrochimica Acta Part B: Atomic Spectroscopy; 65; 6; 4-2010; 466-470
0584-8547
1873-3565
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/doi/10.1016/j.sab.2010.02.018
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
dc.publisher.none.fl_str_mv Pergamon-Elsevier Science Ltd
publisher.none.fl_str_mv Pergamon-Elsevier Science Ltd
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
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score 13.070432

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