Development of a low cost pulsed laser deposition system for thin films growth
- Autores
- Oliva, Marcos Iván; Zandalazini, Carlos Ivan; Ferrero, Juan Carlos; Bertorello, Hector Raul
- Año de publicación
- 2012
- Idioma
- inglés
- Tipo de recurso
- artículo
- Estado
- versión publicada
- Descripción
- Pulsed Laser Deposition (PLD) is a powerful technique to grow thin films. Oxides, Magnetics and superconducting materials have been obtained by PLD and theirs properties are strongly dependent of deposition parameters. The construction of a simple and cheap PLD system that is suitable for growing various thin films, including magnetic materials, controlling some deposition parameters is presented. The design characteristics and construction are presented for each one of the devices that compose this PLD system. The equipment has the possibility of carrying out films deposition using up to five targets under controlled atmosphere and substrate temperature. The system also allows controlling the cool off sample time after growing up films at high temperatures. A wide range of relative speeds between target and substrate axial rotation can be externally controlled. With the configuration and the dimensions adopted in their con- struction, a PLD system of great experimental flexibility is achieved, at a very low cost regarding the commercial sys- tems. To evaluate their performance and effectiveness, the deposition characteristics of a BaFe12O19 film on (0001) sapphire substrate is presented
Fil: Oliva, Marcos Iván. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Córdoba. Instituto de Física Enrique Gaviola. Universidad Nacional de Córdoba. Instituto de Física Enrique Gaviola; Argentina
Fil: Zandalazini, Carlos Ivan. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Córdoba. Instituto de Física Enrique Gaviola. Universidad Nacional de Córdoba. Instituto de Física Enrique Gaviola; Argentina. Universidad Nacional de Córdoba. Facultad de Matemática, Astronomía y Física; Argentina
Fil: Ferrero, Juan Carlos. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Córdoba. Instituto de Investigaciones en Físico-química de Córdoba. Universidad Nacional de Córdoba. Facultad de Ciencias Químicas. Instituto de Investigaciones en Físico-química de Córdoba; Argentina
Fil: Bertorello, Hector Raul. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Córdoba. Instituto de Física Enrique Gaviola. Universidad Nacional de Córdoba. Instituto de Física Enrique Gaviola; Argentina - Materia
-
PULSED LASER DEPOSITION
THIN FILMS
MULTILAYER - Nivel de accesibilidad
- acceso abierto
- Condiciones de uso
- https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
- Repositorio
- Institución
- Consejo Nacional de Investigaciones Científicas y Técnicas
- OAI Identificador
- oai:ri.conicet.gov.ar:11336/198107
Ver los metadatos del registro completo
id |
CONICETDig_837b3ba20e593872a0d3ba48bdd905dd |
---|---|
oai_identifier_str |
oai:ri.conicet.gov.ar:11336/198107 |
network_acronym_str |
CONICETDig |
repository_id_str |
3498 |
network_name_str |
CONICET Digital (CONICET) |
spelling |
Development of a low cost pulsed laser deposition system for thin films growthOliva, Marcos IvánZandalazini, Carlos IvanFerrero, Juan CarlosBertorello, Hector RaulPULSED LASER DEPOSITIONTHIN FILMSMULTILAYERhttps://purl.org/becyt/ford/1.3https://purl.org/becyt/ford/1Pulsed Laser Deposition (PLD) is a powerful technique to grow thin films. Oxides, Magnetics and superconducting materials have been obtained by PLD and theirs properties are strongly dependent of deposition parameters. The construction of a simple and cheap PLD system that is suitable for growing various thin films, including magnetic materials, controlling some deposition parameters is presented. The design characteristics and construction are presented for each one of the devices that compose this PLD system. The equipment has the possibility of carrying out films deposition using up to five targets under controlled atmosphere and substrate temperature. The system also allows controlling the cool off sample time after growing up films at high temperatures. A wide range of relative speeds between target and substrate axial rotation can be externally controlled. With the configuration and the dimensions adopted in their con- struction, a PLD system of great experimental flexibility is achieved, at a very low cost regarding the commercial sys- tems. To evaluate their performance and effectiveness, the deposition characteristics of a BaFe12O19 film on (0001) sapphire substrate is presentedFil: Oliva, Marcos Iván. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Córdoba. Instituto de Física Enrique Gaviola. Universidad Nacional de Córdoba. Instituto de Física Enrique Gaviola; ArgentinaFil: Zandalazini, Carlos Ivan. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Córdoba. Instituto de Física Enrique Gaviola. Universidad Nacional de Córdoba. Instituto de Física Enrique Gaviola; Argentina. Universidad Nacional de Córdoba. Facultad de Matemática, Astronomía y Física; ArgentinaFil: Ferrero, Juan Carlos. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Córdoba. Instituto de Investigaciones en Físico-química de Córdoba. Universidad Nacional de Córdoba. Facultad de Ciencias Químicas. Instituto de Investigaciones en Físico-química de Córdoba; ArgentinaFil: Bertorello, Hector Raul. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Córdoba. Instituto de Física Enrique Gaviola. Universidad Nacional de Córdoba. Instituto de Física Enrique Gaviola; ArgentinaScientific Research Publishing2012-10info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/198107Oliva, Marcos Iván; Zandalazini, Carlos Ivan; Ferrero, Juan Carlos; Bertorello, Hector Raul; Development of a low cost pulsed laser deposition system for thin films growth; Scientific Research Publishing; Modern Instrumentation; 1; 04; 10-2012; 1-82165-9257CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/url/http://www.scirp.org/journal/PaperInformation.aspx?paperID=23660info:eu-repo/semantics/altIdentifier/doi/10.4236/mi.2012.14006info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-29T10:41:55Zoai:ri.conicet.gov.ar:11336/198107instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-29 10:41:56.003CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse |
dc.title.none.fl_str_mv |
Development of a low cost pulsed laser deposition system for thin films growth |
title |
Development of a low cost pulsed laser deposition system for thin films growth |
spellingShingle |
Development of a low cost pulsed laser deposition system for thin films growth Oliva, Marcos Iván PULSED LASER DEPOSITION THIN FILMS MULTILAYER |
title_short |
Development of a low cost pulsed laser deposition system for thin films growth |
title_full |
Development of a low cost pulsed laser deposition system for thin films growth |
title_fullStr |
Development of a low cost pulsed laser deposition system for thin films growth |
title_full_unstemmed |
Development of a low cost pulsed laser deposition system for thin films growth |
title_sort |
Development of a low cost pulsed laser deposition system for thin films growth |
dc.creator.none.fl_str_mv |
Oliva, Marcos Iván Zandalazini, Carlos Ivan Ferrero, Juan Carlos Bertorello, Hector Raul |
author |
Oliva, Marcos Iván |
author_facet |
Oliva, Marcos Iván Zandalazini, Carlos Ivan Ferrero, Juan Carlos Bertorello, Hector Raul |
author_role |
author |
author2 |
Zandalazini, Carlos Ivan Ferrero, Juan Carlos Bertorello, Hector Raul |
author2_role |
author author author |
dc.subject.none.fl_str_mv |
PULSED LASER DEPOSITION THIN FILMS MULTILAYER |
topic |
PULSED LASER DEPOSITION THIN FILMS MULTILAYER |
purl_subject.fl_str_mv |
https://purl.org/becyt/ford/1.3 https://purl.org/becyt/ford/1 |
dc.description.none.fl_txt_mv |
Pulsed Laser Deposition (PLD) is a powerful technique to grow thin films. Oxides, Magnetics and superconducting materials have been obtained by PLD and theirs properties are strongly dependent of deposition parameters. The construction of a simple and cheap PLD system that is suitable for growing various thin films, including magnetic materials, controlling some deposition parameters is presented. The design characteristics and construction are presented for each one of the devices that compose this PLD system. The equipment has the possibility of carrying out films deposition using up to five targets under controlled atmosphere and substrate temperature. The system also allows controlling the cool off sample time after growing up films at high temperatures. A wide range of relative speeds between target and substrate axial rotation can be externally controlled. With the configuration and the dimensions adopted in their con- struction, a PLD system of great experimental flexibility is achieved, at a very low cost regarding the commercial sys- tems. To evaluate their performance and effectiveness, the deposition characteristics of a BaFe12O19 film on (0001) sapphire substrate is presented Fil: Oliva, Marcos Iván. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Córdoba. Instituto de Física Enrique Gaviola. Universidad Nacional de Córdoba. Instituto de Física Enrique Gaviola; Argentina Fil: Zandalazini, Carlos Ivan. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Córdoba. Instituto de Física Enrique Gaviola. Universidad Nacional de Córdoba. Instituto de Física Enrique Gaviola; Argentina. Universidad Nacional de Córdoba. Facultad de Matemática, Astronomía y Física; Argentina Fil: Ferrero, Juan Carlos. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Córdoba. Instituto de Investigaciones en Físico-química de Córdoba. Universidad Nacional de Córdoba. Facultad de Ciencias Químicas. Instituto de Investigaciones en Físico-química de Córdoba; Argentina Fil: Bertorello, Hector Raul. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Córdoba. Instituto de Física Enrique Gaviola. Universidad Nacional de Córdoba. Instituto de Física Enrique Gaviola; Argentina |
description |
Pulsed Laser Deposition (PLD) is a powerful technique to grow thin films. Oxides, Magnetics and superconducting materials have been obtained by PLD and theirs properties are strongly dependent of deposition parameters. The construction of a simple and cheap PLD system that is suitable for growing various thin films, including magnetic materials, controlling some deposition parameters is presented. The design characteristics and construction are presented for each one of the devices that compose this PLD system. The equipment has the possibility of carrying out films deposition using up to five targets under controlled atmosphere and substrate temperature. The system also allows controlling the cool off sample time after growing up films at high temperatures. A wide range of relative speeds between target and substrate axial rotation can be externally controlled. With the configuration and the dimensions adopted in their con- struction, a PLD system of great experimental flexibility is achieved, at a very low cost regarding the commercial sys- tems. To evaluate their performance and effectiveness, the deposition characteristics of a BaFe12O19 film on (0001) sapphire substrate is presented |
publishDate |
2012 |
dc.date.none.fl_str_mv |
2012-10 |
dc.type.none.fl_str_mv |
info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion http://purl.org/coar/resource_type/c_6501 info:ar-repo/semantics/articulo |
format |
article |
status_str |
publishedVersion |
dc.identifier.none.fl_str_mv |
http://hdl.handle.net/11336/198107 Oliva, Marcos Iván; Zandalazini, Carlos Ivan; Ferrero, Juan Carlos; Bertorello, Hector Raul; Development of a low cost pulsed laser deposition system for thin films growth; Scientific Research Publishing; Modern Instrumentation; 1; 04; 10-2012; 1-8 2165-9257 CONICET Digital CONICET |
url |
http://hdl.handle.net/11336/198107 |
identifier_str_mv |
Oliva, Marcos Iván; Zandalazini, Carlos Ivan; Ferrero, Juan Carlos; Bertorello, Hector Raul; Development of a low cost pulsed laser deposition system for thin films growth; Scientific Research Publishing; Modern Instrumentation; 1; 04; 10-2012; 1-8 2165-9257 CONICET Digital CONICET |
dc.language.none.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
info:eu-repo/semantics/altIdentifier/url/http://www.scirp.org/journal/PaperInformation.aspx?paperID=23660 info:eu-repo/semantics/altIdentifier/doi/10.4236/mi.2012.14006 |
dc.rights.none.fl_str_mv |
info:eu-repo/semantics/openAccess https://creativecommons.org/licenses/by-nc-sa/2.5/ar/ |
eu_rights_str_mv |
openAccess |
rights_invalid_str_mv |
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/ |
dc.format.none.fl_str_mv |
application/pdf application/pdf |
dc.publisher.none.fl_str_mv |
Scientific Research Publishing |
publisher.none.fl_str_mv |
Scientific Research Publishing |
dc.source.none.fl_str_mv |
reponame:CONICET Digital (CONICET) instname:Consejo Nacional de Investigaciones Científicas y Técnicas |
reponame_str |
CONICET Digital (CONICET) |
collection |
CONICET Digital (CONICET) |
instname_str |
Consejo Nacional de Investigaciones Científicas y Técnicas |
repository.name.fl_str_mv |
CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas |
repository.mail.fl_str_mv |
dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar |
_version_ |
1844614451297255424 |
score |
13.070432 |