Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning

Autores
Nesprias, Francisco Jose Gabriel; Debray, Mario Ernesto; Davidson, Jorge; Kreiner, Andres Juan; Vega, Nahuel Agustín; de la Fourniere, Emanuel María
Año de publicación
2013
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
In order to increase the scanning length of our microprobe, we have developed an irradiation procedure suitable for use in any nuclear microprobe, extending at least up to 400% the length of our heavy ion direct writing facility using standard magnetic exploration. Although this method is limited to patterns of a few millimeters in only one direction, it is useful for the manufacture of curved waveguides, optical devices such Mach-Zehnder modulators, directional couplers as well as channels for micro-fluidic applications. As an example, this technique was applied to the fabrication of 3mm 3D-Mach-Zehnder modulators in lithium niobate with short Y input/output branches and long shaped parallel-capacitor control electrodes. To extend and improve the quality of the machined structures we developed new scanning control software in LabViewTM platform. The new code supports an external dose normalization, electrostatic beam blanking and is capable of scanning figures at 16 bit resolution using a National InstrumentsTM PCI-6731 High-Speed I/O card. A deep and vertical micromachining process using swift 35Cl ions 70 MeV bombarding energy and direct write patterning was performed on LiNbO3, a material which exhibits a strong natural anisotropy to conventional etching. The micromachined structures show the feasibility of this method for manufacturing micro-fluidic channels as well.
Fil: Nesprias, Francisco Jose Gabriel. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina
Fil: Debray, Mario Ernesto. Universidad Nacional de San Martín. Escuela de Ciencia y Tecnología; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina
Fil: Davidson, Jorge. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina
Fil: Kreiner, Andres Juan. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Universidad Nacional de San Martín. Escuela de Ciencia y Tecnología; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina
Fil: Vega, Nahuel Agustín. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina
Fil: de la Fourniere, Emanuel María. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina
Materia
Direct write
Swift heavy ions
Lithium Niobate
Wave guides
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/103837
Acceder
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oai_identifier_str oai:ri.conicet.gov.ar:11336/103837
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repository_id_str 3498
network_name_str CONICET Digital (CONICET)
spelling Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanningNesprias, Francisco Jose GabrielDebray, Mario ErnestoDavidson, JorgeKreiner, Andres JuanVega, Nahuel Agustínde la Fourniere, Emanuel MaríaDirect writeSwift heavy ionsLithium NiobateWave guideshttps://purl.org/becyt/ford/1.3https://purl.org/becyt/ford/1In order to increase the scanning length of our microprobe, we have developed an irradiation procedure suitable for use in any nuclear microprobe, extending at least up to 400% the length of our heavy ion direct writing facility using standard magnetic exploration. Although this method is limited to patterns of a few millimeters in only one direction, it is useful for the manufacture of curved waveguides, optical devices such Mach-Zehnder modulators, directional couplers as well as channels for micro-fluidic applications. As an example, this technique was applied to the fabrication of 3mm 3D-Mach-Zehnder modulators in lithium niobate with short Y input/output branches and long shaped parallel-capacitor control electrodes. To extend and improve the quality of the machined structures we developed new scanning control software in LabViewTM platform. The new code supports an external dose normalization, electrostatic beam blanking and is capable of scanning figures at 16 bit resolution using a National InstrumentsTM PCI-6731 High-Speed I/O card. A deep and vertical micromachining process using swift 35Cl ions 70 MeV bombarding energy and direct write patterning was performed on LiNbO3, a material which exhibits a strong natural anisotropy to conventional etching. The micromachined structures show the feasibility of this method for manufacturing micro-fluidic channels as well.Fil: Nesprias, Francisco Jose Gabriel. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; ArgentinaFil: Debray, Mario Ernesto. Universidad Nacional de San Martín. Escuela de Ciencia y Tecnología; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; ArgentinaFil: Davidson, Jorge. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; ArgentinaFil: Kreiner, Andres Juan. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Universidad Nacional de San Martín. Escuela de Ciencia y Tecnología; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; ArgentinaFil: Vega, Nahuel Agustín. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; ArgentinaFil: de la Fourniere, Emanuel María. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; ArgentinaElsevier Science2013-02info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfapplication/pdfapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/103837Nesprias, Francisco Jose Gabriel; Debray, Mario Ernesto; Davidson, Jorge; Kreiner, Andres Juan; Vega, Nahuel Agustín; et al.; Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning; Elsevier Science; Nuclear Instruments and Methods in Physics Research B: Beam Interactions with Materials and Atoms; 300; 2-2013; 68-730168-583XCONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/doi/10.1016/j.nimb.2013.02.009info:eu-repo/semantics/altIdentifier/url/https://www.sciencedirect.com/science/article/abs/pii/S0168583X13002395info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-10-22T11:01:39Zoai:ri.conicet.gov.ar:11336/103837instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-10-22 11:01:39.354CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning
title Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning
spellingShingle Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning
Nesprias, Francisco Jose Gabriel
Direct write
Swift heavy ions
Lithium Niobate
Wave guides
title_short Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning
title_full Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning
title_fullStr Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning
title_full_unstemmed Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning
title_sort Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning
dc.creator.none.fl_str_mv Nesprias, Francisco Jose Gabriel
Debray, Mario Ernesto
Davidson, Jorge
Kreiner, Andres Juan
Vega, Nahuel Agustín
de la Fourniere, Emanuel María
author Nesprias, Francisco Jose Gabriel
author_facet Nesprias, Francisco Jose Gabriel
Debray, Mario Ernesto
Davidson, Jorge
Kreiner, Andres Juan
Vega, Nahuel Agustín
de la Fourniere, Emanuel María
author_role author
author2 Debray, Mario Ernesto
Davidson, Jorge
Kreiner, Andres Juan
Vega, Nahuel Agustín
de la Fourniere, Emanuel María
author2_role author
author
author
author
author
dc.subject.none.fl_str_mv Direct write
Swift heavy ions
Lithium Niobate
Wave guides
topic Direct write
Swift heavy ions
Lithium Niobate
Wave guides
purl_subject.fl_str_mv https://purl.org/becyt/ford/1.3
https://purl.org/becyt/ford/1
dc.description.none.fl_txt_mv In order to increase the scanning length of our microprobe, we have developed an irradiation procedure suitable for use in any nuclear microprobe, extending at least up to 400% the length of our heavy ion direct writing facility using standard magnetic exploration. Although this method is limited to patterns of a few millimeters in only one direction, it is useful for the manufacture of curved waveguides, optical devices such Mach-Zehnder modulators, directional couplers as well as channels for micro-fluidic applications. As an example, this technique was applied to the fabrication of 3mm 3D-Mach-Zehnder modulators in lithium niobate with short Y input/output branches and long shaped parallel-capacitor control electrodes. To extend and improve the quality of the machined structures we developed new scanning control software in LabViewTM platform. The new code supports an external dose normalization, electrostatic beam blanking and is capable of scanning figures at 16 bit resolution using a National InstrumentsTM PCI-6731 High-Speed I/O card. A deep and vertical micromachining process using swift 35Cl ions 70 MeV bombarding energy and direct write patterning was performed on LiNbO3, a material which exhibits a strong natural anisotropy to conventional etching. The micromachined structures show the feasibility of this method for manufacturing micro-fluidic channels as well.
Fil: Nesprias, Francisco Jose Gabriel. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina
Fil: Debray, Mario Ernesto. Universidad Nacional de San Martín. Escuela de Ciencia y Tecnología; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina
Fil: Davidson, Jorge. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina
Fil: Kreiner, Andres Juan. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Universidad Nacional de San Martín. Escuela de Ciencia y Tecnología; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina
Fil: Vega, Nahuel Agustín. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina
Fil: de la Fourniere, Emanuel María. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina
description In order to increase the scanning length of our microprobe, we have developed an irradiation procedure suitable for use in any nuclear microprobe, extending at least up to 400% the length of our heavy ion direct writing facility using standard magnetic exploration. Although this method is limited to patterns of a few millimeters in only one direction, it is useful for the manufacture of curved waveguides, optical devices such Mach-Zehnder modulators, directional couplers as well as channels for micro-fluidic applications. As an example, this technique was applied to the fabrication of 3mm 3D-Mach-Zehnder modulators in lithium niobate with short Y input/output branches and long shaped parallel-capacitor control electrodes. To extend and improve the quality of the machined structures we developed new scanning control software in LabViewTM platform. The new code supports an external dose normalization, electrostatic beam blanking and is capable of scanning figures at 16 bit resolution using a National InstrumentsTM PCI-6731 High-Speed I/O card. A deep and vertical micromachining process using swift 35Cl ions 70 MeV bombarding energy and direct write patterning was performed on LiNbO3, a material which exhibits a strong natural anisotropy to conventional etching. The micromachined structures show the feasibility of this method for manufacturing micro-fluidic channels as well.
publishDate 2013
dc.date.none.fl_str_mv 2013-02
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/103837
Nesprias, Francisco Jose Gabriel; Debray, Mario Ernesto; Davidson, Jorge; Kreiner, Andres Juan; Vega, Nahuel Agustín; et al.; Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning; Elsevier Science; Nuclear Instruments and Methods in Physics Research B: Beam Interactions with Materials and Atoms; 300; 2-2013; 68-73
0168-583X
CONICET Digital
CONICET
url http://hdl.handle.net/11336/103837
identifier_str_mv Nesprias, Francisco Jose Gabriel; Debray, Mario Ernesto; Davidson, Jorge; Kreiner, Andres Juan; Vega, Nahuel Agustín; et al.; Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning; Elsevier Science; Nuclear Instruments and Methods in Physics Research B: Beam Interactions with Materials and Atoms; 300; 2-2013; 68-73
0168-583X
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/doi/10.1016/j.nimb.2013.02.009
info:eu-repo/semantics/altIdentifier/url/https://www.sciencedirect.com/science/article/abs/pii/S0168583X13002395
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
application/pdf
application/pdf
application/pdf
application/pdf
application/pdf
dc.publisher.none.fl_str_mv Elsevier Science
publisher.none.fl_str_mv Elsevier Science
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
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