Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning
- Autores
- Nesprias, Francisco Jose Gabriel; Debray, Mario Ernesto; Davidson, Jorge; Kreiner, Andres Juan; Vega, Nahuel Agustín; de la Fourniere, Emanuel María
- Año de publicación
- 2013
- Idioma
- inglés
- Tipo de recurso
- artículo
- Estado
- versión publicada
- Descripción
- In order to increase the scanning length of our microprobe, we have developed an irradiation procedure suitable for use in any nuclear microprobe, extending at least up to 400% the length of our heavy ion direct writing facility using standard magnetic exploration. Although this method is limited to patterns of a few millimeters in only one direction, it is useful for the manufacture of curved waveguides, optical devices such Mach-Zehnder modulators, directional couplers as well as channels for micro-fluidic applications. As an example, this technique was applied to the fabrication of 3mm 3D-Mach-Zehnder modulators in lithium niobate with short Y input/output branches and long shaped parallel-capacitor control electrodes. To extend and improve the quality of the machined structures we developed new scanning control software in LabViewTM platform. The new code supports an external dose normalization, electrostatic beam blanking and is capable of scanning figures at 16 bit resolution using a National InstrumentsTM PCI-6731 High-Speed I/O card. A deep and vertical micromachining process using swift 35Cl ions 70 MeV bombarding energy and direct write patterning was performed on LiNbO3, a material which exhibits a strong natural anisotropy to conventional etching. The micromachined structures show the feasibility of this method for manufacturing micro-fluidic channels as well.
Fil: Nesprias, Francisco Jose Gabriel. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina
Fil: Debray, Mario Ernesto. Universidad Nacional de San Martín. Escuela de Ciencia y Tecnología; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina
Fil: Davidson, Jorge. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina
Fil: Kreiner, Andres Juan. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Universidad Nacional de San Martín. Escuela de Ciencia y Tecnología; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina
Fil: Vega, Nahuel Agustín. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina
Fil: de la Fourniere, Emanuel María. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina - Materia
-
Direct write
Swift heavy ions
Lithium Niobate
Wave guides - Nivel de accesibilidad
- acceso abierto
- Condiciones de uso
- https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
- Repositorio
- Institución
- Consejo Nacional de Investigaciones Científicas y Técnicas
- OAI Identificador
- oai:ri.conicet.gov.ar:11336/103837
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Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanningNesprias, Francisco Jose GabrielDebray, Mario ErnestoDavidson, JorgeKreiner, Andres JuanVega, Nahuel Agustínde la Fourniere, Emanuel MaríaDirect writeSwift heavy ionsLithium NiobateWave guideshttps://purl.org/becyt/ford/1.3https://purl.org/becyt/ford/1In order to increase the scanning length of our microprobe, we have developed an irradiation procedure suitable for use in any nuclear microprobe, extending at least up to 400% the length of our heavy ion direct writing facility using standard magnetic exploration. Although this method is limited to patterns of a few millimeters in only one direction, it is useful for the manufacture of curved waveguides, optical devices such Mach-Zehnder modulators, directional couplers as well as channels for micro-fluidic applications. As an example, this technique was applied to the fabrication of 3mm 3D-Mach-Zehnder modulators in lithium niobate with short Y input/output branches and long shaped parallel-capacitor control electrodes. To extend and improve the quality of the machined structures we developed new scanning control software in LabViewTM platform. The new code supports an external dose normalization, electrostatic beam blanking and is capable of scanning figures at 16 bit resolution using a National InstrumentsTM PCI-6731 High-Speed I/O card. A deep and vertical micromachining process using swift 35Cl ions 70 MeV bombarding energy and direct write patterning was performed on LiNbO3, a material which exhibits a strong natural anisotropy to conventional etching. The micromachined structures show the feasibility of this method for manufacturing micro-fluidic channels as well.Fil: Nesprias, Francisco Jose Gabriel. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; ArgentinaFil: Debray, Mario Ernesto. Universidad Nacional de San Martín. Escuela de Ciencia y Tecnología; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; ArgentinaFil: Davidson, Jorge. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; ArgentinaFil: Kreiner, Andres Juan. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Universidad Nacional de San Martín. Escuela de Ciencia y Tecnología; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; ArgentinaFil: Vega, Nahuel Agustín. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; ArgentinaFil: de la Fourniere, Emanuel María. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; ArgentinaElsevier Science2013-02info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfapplication/pdfapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/103837Nesprias, Francisco Jose Gabriel; Debray, Mario Ernesto; Davidson, Jorge; Kreiner, Andres Juan; Vega, Nahuel Agustín; et al.; Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning; Elsevier Science; Nuclear Instruments and Methods in Physics Research B: Beam Interactions with Materials and Atoms; 300; 2-2013; 68-730168-583XCONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/doi/10.1016/j.nimb.2013.02.009info:eu-repo/semantics/altIdentifier/url/https://www.sciencedirect.com/science/article/abs/pii/S0168583X13002395info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-29T09:33:38Zoai:ri.conicet.gov.ar:11336/103837instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-29 09:33:38.745CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse |
dc.title.none.fl_str_mv |
Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning |
title |
Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning |
spellingShingle |
Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning Nesprias, Francisco Jose Gabriel Direct write Swift heavy ions Lithium Niobate Wave guides |
title_short |
Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning |
title_full |
Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning |
title_fullStr |
Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning |
title_full_unstemmed |
Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning |
title_sort |
Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning |
dc.creator.none.fl_str_mv |
Nesprias, Francisco Jose Gabriel Debray, Mario Ernesto Davidson, Jorge Kreiner, Andres Juan Vega, Nahuel Agustín de la Fourniere, Emanuel María |
author |
Nesprias, Francisco Jose Gabriel |
author_facet |
Nesprias, Francisco Jose Gabriel Debray, Mario Ernesto Davidson, Jorge Kreiner, Andres Juan Vega, Nahuel Agustín de la Fourniere, Emanuel María |
author_role |
author |
author2 |
Debray, Mario Ernesto Davidson, Jorge Kreiner, Andres Juan Vega, Nahuel Agustín de la Fourniere, Emanuel María |
author2_role |
author author author author author |
dc.subject.none.fl_str_mv |
Direct write Swift heavy ions Lithium Niobate Wave guides |
topic |
Direct write Swift heavy ions Lithium Niobate Wave guides |
purl_subject.fl_str_mv |
https://purl.org/becyt/ford/1.3 https://purl.org/becyt/ford/1 |
dc.description.none.fl_txt_mv |
In order to increase the scanning length of our microprobe, we have developed an irradiation procedure suitable for use in any nuclear microprobe, extending at least up to 400% the length of our heavy ion direct writing facility using standard magnetic exploration. Although this method is limited to patterns of a few millimeters in only one direction, it is useful for the manufacture of curved waveguides, optical devices such Mach-Zehnder modulators, directional couplers as well as channels for micro-fluidic applications. As an example, this technique was applied to the fabrication of 3mm 3D-Mach-Zehnder modulators in lithium niobate with short Y input/output branches and long shaped parallel-capacitor control electrodes. To extend and improve the quality of the machined structures we developed new scanning control software in LabViewTM platform. The new code supports an external dose normalization, electrostatic beam blanking and is capable of scanning figures at 16 bit resolution using a National InstrumentsTM PCI-6731 High-Speed I/O card. A deep and vertical micromachining process using swift 35Cl ions 70 MeV bombarding energy and direct write patterning was performed on LiNbO3, a material which exhibits a strong natural anisotropy to conventional etching. The micromachined structures show the feasibility of this method for manufacturing micro-fluidic channels as well. Fil: Nesprias, Francisco Jose Gabriel. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina Fil: Debray, Mario Ernesto. Universidad Nacional de San Martín. Escuela de Ciencia y Tecnología; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina Fil: Davidson, Jorge. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina Fil: Kreiner, Andres Juan. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Universidad Nacional de San Martín. Escuela de Ciencia y Tecnología; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina Fil: Vega, Nahuel Agustín. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina Fil: de la Fourniere, Emanuel María. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Constituyentes. Gerencia de Investigación y Aplicaciones; Argentina |
description |
In order to increase the scanning length of our microprobe, we have developed an irradiation procedure suitable for use in any nuclear microprobe, extending at least up to 400% the length of our heavy ion direct writing facility using standard magnetic exploration. Although this method is limited to patterns of a few millimeters in only one direction, it is useful for the manufacture of curved waveguides, optical devices such Mach-Zehnder modulators, directional couplers as well as channels for micro-fluidic applications. As an example, this technique was applied to the fabrication of 3mm 3D-Mach-Zehnder modulators in lithium niobate with short Y input/output branches and long shaped parallel-capacitor control electrodes. To extend and improve the quality of the machined structures we developed new scanning control software in LabViewTM platform. The new code supports an external dose normalization, electrostatic beam blanking and is capable of scanning figures at 16 bit resolution using a National InstrumentsTM PCI-6731 High-Speed I/O card. A deep and vertical micromachining process using swift 35Cl ions 70 MeV bombarding energy and direct write patterning was performed on LiNbO3, a material which exhibits a strong natural anisotropy to conventional etching. The micromachined structures show the feasibility of this method for manufacturing micro-fluidic channels as well. |
publishDate |
2013 |
dc.date.none.fl_str_mv |
2013-02 |
dc.type.none.fl_str_mv |
info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion http://purl.org/coar/resource_type/c_6501 info:ar-repo/semantics/articulo |
format |
article |
status_str |
publishedVersion |
dc.identifier.none.fl_str_mv |
http://hdl.handle.net/11336/103837 Nesprias, Francisco Jose Gabriel; Debray, Mario Ernesto; Davidson, Jorge; Kreiner, Andres Juan; Vega, Nahuel Agustín; et al.; Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning; Elsevier Science; Nuclear Instruments and Methods in Physics Research B: Beam Interactions with Materials and Atoms; 300; 2-2013; 68-73 0168-583X CONICET Digital CONICET |
url |
http://hdl.handle.net/11336/103837 |
identifier_str_mv |
Nesprias, Francisco Jose Gabriel; Debray, Mario Ernesto; Davidson, Jorge; Kreiner, Andres Juan; Vega, Nahuel Agustín; et al.; Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning; Elsevier Science; Nuclear Instruments and Methods in Physics Research B: Beam Interactions with Materials and Atoms; 300; 2-2013; 68-73 0168-583X CONICET Digital CONICET |
dc.language.none.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.nimb.2013.02.009 info:eu-repo/semantics/altIdentifier/url/https://www.sciencedirect.com/science/article/abs/pii/S0168583X13002395 |
dc.rights.none.fl_str_mv |
info:eu-repo/semantics/openAccess https://creativecommons.org/licenses/by-nc-sa/2.5/ar/ |
eu_rights_str_mv |
openAccess |
rights_invalid_str_mv |
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/ |
dc.format.none.fl_str_mv |
application/pdf application/pdf application/pdf application/pdf application/pdf application/pdf application/pdf |
dc.publisher.none.fl_str_mv |
Elsevier Science |
publisher.none.fl_str_mv |
Elsevier Science |
dc.source.none.fl_str_mv |
reponame:CONICET Digital (CONICET) instname:Consejo Nacional de Investigaciones Científicas y Técnicas |
reponame_str |
CONICET Digital (CONICET) |
collection |
CONICET Digital (CONICET) |
instname_str |
Consejo Nacional de Investigaciones Científicas y Técnicas |
repository.name.fl_str_mv |
CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas |
repository.mail.fl_str_mv |
dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar |
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1844613035044372480 |
score |
13.070432 |