In situ study of the endotaxial growth of hexagonal CoSi2 nanoplatelets in Si(001)
- Autores
- Costa, Daniel Da Silva; Huck Iriart, Cristián; Kellermann, Guinther; Giovanetti, Lisandro Jose; Craievich, Aldo F.; Requejo, Felix Gregorio
- Año de publicación
- 2015
- Idioma
- inglés
- Tipo de recurso
- artículo
- Estado
- versión publicada
- Descripción
- This investigation aims at studying-by in situ grazing-incidence small-angle x-ray scattering-the process of growth of hexagonal CoSi2 nanoplatelets endotaxially buried in a Si(001) wafer. The early formation of spherical Co nanoparticles with bimodal size distribution in the deposited silica thin film during a pretreatment at 500 °C and their subsequent growth at 700 °C were also characterized. Isothermal annealing at 700 °C promotes a drastic reduction in the number of the smallest Co nanoparticles and a continuous decrease in their volume fraction in the silica thin film. At the same time, Co atoms diffuse across the SiO2/Si(001) interface into the silicon wafer, react with Si, and build up thin hexagonal CoSi2 nanoplatelets, all of them with their main surfaces parallel to Si{111} crystallographic planes. The observed progressive growths in thickness and lateral size of the hexagonal CoSi2 nanoplatelets occur at the expense of the dissolution of the small Co nanoparticles that are formed during the pretreatment at 500 °C and become unstable at the annealing temperature (700 °C). The kinetics of growth of the volume fraction of hexagonal platelets is well described by the classical Avrami equation.
Fil: Costa, Daniel Da Silva. Universidade Federal do Paraná; Brasil
Fil: Huck Iriart, Cristián. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - La Plata. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas. Universidad Nacional de La Plata. Facultad de Ciencias Exactas. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas; Argentina
Fil: Kellermann, Guinther. Universidade Federal do Paraná; Brasil
Fil: Giovanetti, Lisandro Jose. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - La Plata. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas. Universidad Nacional de La Plata. Facultad de Ciencias Exactas. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas; Argentina
Fil: Craievich, Aldo F.. Universidade de Sao Paulo; Brasil
Fil: Requejo, Felix Gregorio. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - La Plata. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas. Universidad Nacional de La Plata. Facultad de Ciencias Exactas. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas; Argentina - Materia
-
nanoparticles
thin film growth
thin film nucleation
nucleation - Nivel de accesibilidad
- acceso abierto
- Condiciones de uso
- https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
- Repositorio
- Institución
- Consejo Nacional de Investigaciones Científicas y Técnicas
- OAI Identificador
- oai:ri.conicet.gov.ar:11336/48710
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oai:ri.conicet.gov.ar:11336/48710 |
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3498 |
network_name_str |
CONICET Digital (CONICET) |
spelling |
In situ study of the endotaxial growth of hexagonal CoSi2 nanoplatelets in Si(001)Costa, Daniel Da SilvaHuck Iriart, CristiánKellermann, GuintherGiovanetti, Lisandro JoseCraievich, Aldo F.Requejo, Felix Gregorionanoparticlesthin film growththin film nucleationnucleationhttps://purl.org/becyt/ford/1.3https://purl.org/becyt/ford/1This investigation aims at studying-by in situ grazing-incidence small-angle x-ray scattering-the process of growth of hexagonal CoSi2 nanoplatelets endotaxially buried in a Si(001) wafer. The early formation of spherical Co nanoparticles with bimodal size distribution in the deposited silica thin film during a pretreatment at 500 °C and their subsequent growth at 700 °C were also characterized. Isothermal annealing at 700 °C promotes a drastic reduction in the number of the smallest Co nanoparticles and a continuous decrease in their volume fraction in the silica thin film. At the same time, Co atoms diffuse across the SiO2/Si(001) interface into the silicon wafer, react with Si, and build up thin hexagonal CoSi2 nanoplatelets, all of them with their main surfaces parallel to Si{111} crystallographic planes. The observed progressive growths in thickness and lateral size of the hexagonal CoSi2 nanoplatelets occur at the expense of the dissolution of the small Co nanoparticles that are formed during the pretreatment at 500 °C and become unstable at the annealing temperature (700 °C). The kinetics of growth of the volume fraction of hexagonal platelets is well described by the classical Avrami equation.Fil: Costa, Daniel Da Silva. Universidade Federal do Paraná; BrasilFil: Huck Iriart, Cristián. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - La Plata. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas. Universidad Nacional de La Plata. Facultad de Ciencias Exactas. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas; ArgentinaFil: Kellermann, Guinther. Universidade Federal do Paraná; BrasilFil: Giovanetti, Lisandro Jose. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - La Plata. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas. Universidad Nacional de La Plata. Facultad de Ciencias Exactas. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas; ArgentinaFil: Craievich, Aldo F.. Universidade de Sao Paulo; BrasilFil: Requejo, Felix Gregorio. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - La Plata. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas. Universidad Nacional de La Plata. Facultad de Ciencias Exactas. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas; ArgentinaAmerican Institute of Physics2015-11info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/48710Costa, Daniel Da Silva ; Huck Iriart, Cristián; Kellermann, Guinther; Giovanetti, Lisandro Jose; Craievich, Aldo F.; et al.; In situ study of the endotaxial growth of hexagonal CoSi2 nanoplatelets in Si(001); American Institute of Physics; Applied Physics Letters; 107; 22; 11-2015; 1-5; 2231010003-6951CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/doi/10.1063/1.4936377info:eu-repo/semantics/altIdentifier/url/https://aip.scitation.org/doi/10.1063/1.4936377info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-29T09:32:35Zoai:ri.conicet.gov.ar:11336/48710instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-29 09:32:35.558CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse |
dc.title.none.fl_str_mv |
In situ study of the endotaxial growth of hexagonal CoSi2 nanoplatelets in Si(001) |
title |
In situ study of the endotaxial growth of hexagonal CoSi2 nanoplatelets in Si(001) |
spellingShingle |
In situ study of the endotaxial growth of hexagonal CoSi2 nanoplatelets in Si(001) Costa, Daniel Da Silva nanoparticles thin film growth thin film nucleation nucleation |
title_short |
In situ study of the endotaxial growth of hexagonal CoSi2 nanoplatelets in Si(001) |
title_full |
In situ study of the endotaxial growth of hexagonal CoSi2 nanoplatelets in Si(001) |
title_fullStr |
In situ study of the endotaxial growth of hexagonal CoSi2 nanoplatelets in Si(001) |
title_full_unstemmed |
In situ study of the endotaxial growth of hexagonal CoSi2 nanoplatelets in Si(001) |
title_sort |
In situ study of the endotaxial growth of hexagonal CoSi2 nanoplatelets in Si(001) |
dc.creator.none.fl_str_mv |
Costa, Daniel Da Silva Huck Iriart, Cristián Kellermann, Guinther Giovanetti, Lisandro Jose Craievich, Aldo F. Requejo, Felix Gregorio |
author |
Costa, Daniel Da Silva |
author_facet |
Costa, Daniel Da Silva Huck Iriart, Cristián Kellermann, Guinther Giovanetti, Lisandro Jose Craievich, Aldo F. Requejo, Felix Gregorio |
author_role |
author |
author2 |
Huck Iriart, Cristián Kellermann, Guinther Giovanetti, Lisandro Jose Craievich, Aldo F. Requejo, Felix Gregorio |
author2_role |
author author author author author |
dc.subject.none.fl_str_mv |
nanoparticles thin film growth thin film nucleation nucleation |
topic |
nanoparticles thin film growth thin film nucleation nucleation |
purl_subject.fl_str_mv |
https://purl.org/becyt/ford/1.3 https://purl.org/becyt/ford/1 |
dc.description.none.fl_txt_mv |
This investigation aims at studying-by in situ grazing-incidence small-angle x-ray scattering-the process of growth of hexagonal CoSi2 nanoplatelets endotaxially buried in a Si(001) wafer. The early formation of spherical Co nanoparticles with bimodal size distribution in the deposited silica thin film during a pretreatment at 500 °C and their subsequent growth at 700 °C were also characterized. Isothermal annealing at 700 °C promotes a drastic reduction in the number of the smallest Co nanoparticles and a continuous decrease in their volume fraction in the silica thin film. At the same time, Co atoms diffuse across the SiO2/Si(001) interface into the silicon wafer, react with Si, and build up thin hexagonal CoSi2 nanoplatelets, all of them with their main surfaces parallel to Si{111} crystallographic planes. The observed progressive growths in thickness and lateral size of the hexagonal CoSi2 nanoplatelets occur at the expense of the dissolution of the small Co nanoparticles that are formed during the pretreatment at 500 °C and become unstable at the annealing temperature (700 °C). The kinetics of growth of the volume fraction of hexagonal platelets is well described by the classical Avrami equation. Fil: Costa, Daniel Da Silva. Universidade Federal do Paraná; Brasil Fil: Huck Iriart, Cristián. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - La Plata. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas. Universidad Nacional de La Plata. Facultad de Ciencias Exactas. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas; Argentina Fil: Kellermann, Guinther. Universidade Federal do Paraná; Brasil Fil: Giovanetti, Lisandro Jose. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - La Plata. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas. Universidad Nacional de La Plata. Facultad de Ciencias Exactas. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas; Argentina Fil: Craievich, Aldo F.. Universidade de Sao Paulo; Brasil Fil: Requejo, Felix Gregorio. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - La Plata. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas. Universidad Nacional de La Plata. Facultad de Ciencias Exactas. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas; Argentina |
description |
This investigation aims at studying-by in situ grazing-incidence small-angle x-ray scattering-the process of growth of hexagonal CoSi2 nanoplatelets endotaxially buried in a Si(001) wafer. The early formation of spherical Co nanoparticles with bimodal size distribution in the deposited silica thin film during a pretreatment at 500 °C and their subsequent growth at 700 °C were also characterized. Isothermal annealing at 700 °C promotes a drastic reduction in the number of the smallest Co nanoparticles and a continuous decrease in their volume fraction in the silica thin film. At the same time, Co atoms diffuse across the SiO2/Si(001) interface into the silicon wafer, react with Si, and build up thin hexagonal CoSi2 nanoplatelets, all of them with their main surfaces parallel to Si{111} crystallographic planes. The observed progressive growths in thickness and lateral size of the hexagonal CoSi2 nanoplatelets occur at the expense of the dissolution of the small Co nanoparticles that are formed during the pretreatment at 500 °C and become unstable at the annealing temperature (700 °C). The kinetics of growth of the volume fraction of hexagonal platelets is well described by the classical Avrami equation. |
publishDate |
2015 |
dc.date.none.fl_str_mv |
2015-11 |
dc.type.none.fl_str_mv |
info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion http://purl.org/coar/resource_type/c_6501 info:ar-repo/semantics/articulo |
format |
article |
status_str |
publishedVersion |
dc.identifier.none.fl_str_mv |
http://hdl.handle.net/11336/48710 Costa, Daniel Da Silva ; Huck Iriart, Cristián; Kellermann, Guinther; Giovanetti, Lisandro Jose; Craievich, Aldo F.; et al.; In situ study of the endotaxial growth of hexagonal CoSi2 nanoplatelets in Si(001); American Institute of Physics; Applied Physics Letters; 107; 22; 11-2015; 1-5; 223101 0003-6951 CONICET Digital CONICET |
url |
http://hdl.handle.net/11336/48710 |
identifier_str_mv |
Costa, Daniel Da Silva ; Huck Iriart, Cristián; Kellermann, Guinther; Giovanetti, Lisandro Jose; Craievich, Aldo F.; et al.; In situ study of the endotaxial growth of hexagonal CoSi2 nanoplatelets in Si(001); American Institute of Physics; Applied Physics Letters; 107; 22; 11-2015; 1-5; 223101 0003-6951 CONICET Digital CONICET |
dc.language.none.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
info:eu-repo/semantics/altIdentifier/doi/10.1063/1.4936377 info:eu-repo/semantics/altIdentifier/url/https://aip.scitation.org/doi/10.1063/1.4936377 |
dc.rights.none.fl_str_mv |
info:eu-repo/semantics/openAccess https://creativecommons.org/licenses/by-nc-sa/2.5/ar/ |
eu_rights_str_mv |
openAccess |
rights_invalid_str_mv |
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/ |
dc.format.none.fl_str_mv |
application/pdf application/pdf application/pdf |
dc.publisher.none.fl_str_mv |
American Institute of Physics |
publisher.none.fl_str_mv |
American Institute of Physics |
dc.source.none.fl_str_mv |
reponame:CONICET Digital (CONICET) instname:Consejo Nacional de Investigaciones Científicas y Técnicas |
reponame_str |
CONICET Digital (CONICET) |
collection |
CONICET Digital (CONICET) |
instname_str |
Consejo Nacional de Investigaciones Científicas y Técnicas |
repository.name.fl_str_mv |
CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas |
repository.mail.fl_str_mv |
dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar |
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1844612994873425920 |
score |
13.070432 |