Virtual prototype of a low-cost vacuum baffle based on thermoelectric cooling

Autores
Conde Garrido, Juan Manuel; Silveyra, Josefina María
Año de publicación
2018
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
Contaminants can enter vacuum systems from two main sources: backstreaming of oil vapors from the diffusion and mechanical pumps, and vapors generated as byproducts in the process chamber. Both sources can be hindered by using an appropriate baffle. We developed a virtual prototype of a low-cost baffle for vacuum systems that is cooled down with thermoelectric coolers (TECs). Compared to compressor cooling systems, TECs have useful advantages for this application: they are compact, silent, vibration-free, almost maintenance-free, inexpensive, widely commercially available, and capable of providing a precise temperature control. The baffle is partly built inside a tee vacuum fitting. A refrigerated cooper helix provides the trapping surfaces for contaminants flowing between the process chamber and the vacuum pumps. The cost of the baffle is below USD 250. The proof-of-concept model, implemented by the finite element method, showed that, when using TEC1-12706 modules, the helix can reach temperatures as low as −50 °C. According to our analysis, this temperature is more than enough for trapping the contaminants described above.
Fil: Conde Garrido, Juan Manuel. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Houssay. Instituto de Tecnologías y Ciencias de la Ingeniería "Hilario Fernández Long". Universidad de Buenos Aires. Facultad de Ingeniería. Instituto de Tecnologías y Ciencias de la Ingeniería "Hilario Fernández Long"; Argentina
Fil: Silveyra, Josefina María. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Houssay. Instituto de Tecnologías y Ciencias de la Ingeniería "Hilario Fernández Long". Universidad de Buenos Aires. Facultad de Ingeniería. Instituto de Tecnologías y Ciencias de la Ingeniería "Hilario Fernández Long"; Argentina
Materia
BAFFLE
VACUUM
THERMOELECTRIC COOLER
TEC
HEAT TRANSFER
FINITE ELEMENT METHOD
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/88105
Acceder
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network_acronym_str CONICETDig
repository_id_str 3498
network_name_str CONICET Digital (CONICET)
spelling Virtual prototype of a low-cost vacuum baffle based on thermoelectric coolingConde Garrido, Juan ManuelSilveyra, Josefina MaríaBAFFLEVACUUMTHERMOELECTRIC COOLERTECHEAT TRANSFERFINITE ELEMENT METHODhttps://purl.org/becyt/ford/2.11https://purl.org/becyt/ford/2Contaminants can enter vacuum systems from two main sources: backstreaming of oil vapors from the diffusion and mechanical pumps, and vapors generated as byproducts in the process chamber. Both sources can be hindered by using an appropriate baffle. We developed a virtual prototype of a low-cost baffle for vacuum systems that is cooled down with thermoelectric coolers (TECs). Compared to compressor cooling systems, TECs have useful advantages for this application: they are compact, silent, vibration-free, almost maintenance-free, inexpensive, widely commercially available, and capable of providing a precise temperature control. The baffle is partly built inside a tee vacuum fitting. A refrigerated cooper helix provides the trapping surfaces for contaminants flowing between the process chamber and the vacuum pumps. The cost of the baffle is below USD 250. The proof-of-concept model, implemented by the finite element method, showed that, when using TEC1-12706 modules, the helix can reach temperatures as low as −50 °C. According to our analysis, this temperature is more than enough for trapping the contaminants described above.Fil: Conde Garrido, Juan Manuel. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Houssay. Instituto de Tecnologías y Ciencias de la Ingeniería "Hilario Fernández Long". Universidad de Buenos Aires. Facultad de Ingeniería. Instituto de Tecnologías y Ciencias de la Ingeniería "Hilario Fernández Long"; ArgentinaFil: Silveyra, Josefina María. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Houssay. Instituto de Tecnologías y Ciencias de la Ingeniería "Hilario Fernández Long". Universidad de Buenos Aires. Facultad de Ingeniería. Instituto de Tecnologías y Ciencias de la Ingeniería "Hilario Fernández Long"; ArgentinaPergamon-Elsevier Science Ltd2018-05info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/88105Conde Garrido, Juan Manuel; Silveyra, Josefina María; Virtual prototype of a low-cost vacuum baffle based on thermoelectric cooling; Pergamon-Elsevier Science Ltd; Vacuum; 151; 5-2018; 156-1620042-207XCONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/url/https://www.sciencedirect.com/science/article/pii/S0042207X17319528info:eu-repo/semantics/altIdentifier/doi/10.1016/j.vacuum.2018.02.005info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-12-23T13:19:34Zoai:ri.conicet.gov.ar:11336/88105instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-12-23 13:19:34.967CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv Virtual prototype of a low-cost vacuum baffle based on thermoelectric cooling
title Virtual prototype of a low-cost vacuum baffle based on thermoelectric cooling
spellingShingle Virtual prototype of a low-cost vacuum baffle based on thermoelectric cooling
Conde Garrido, Juan Manuel
BAFFLE
VACUUM
THERMOELECTRIC COOLER
TEC
HEAT TRANSFER
FINITE ELEMENT METHOD
title_short Virtual prototype of a low-cost vacuum baffle based on thermoelectric cooling
title_full Virtual prototype of a low-cost vacuum baffle based on thermoelectric cooling
title_fullStr Virtual prototype of a low-cost vacuum baffle based on thermoelectric cooling
title_full_unstemmed Virtual prototype of a low-cost vacuum baffle based on thermoelectric cooling
title_sort Virtual prototype of a low-cost vacuum baffle based on thermoelectric cooling
dc.creator.none.fl_str_mv Conde Garrido, Juan Manuel
Silveyra, Josefina María
author Conde Garrido, Juan Manuel
author_facet Conde Garrido, Juan Manuel
Silveyra, Josefina María
author_role author
author2 Silveyra, Josefina María
author2_role author
dc.subject.none.fl_str_mv BAFFLE
VACUUM
THERMOELECTRIC COOLER
TEC
HEAT TRANSFER
FINITE ELEMENT METHOD
topic BAFFLE
VACUUM
THERMOELECTRIC COOLER
TEC
HEAT TRANSFER
FINITE ELEMENT METHOD
purl_subject.fl_str_mv https://purl.org/becyt/ford/2.11
https://purl.org/becyt/ford/2
dc.description.none.fl_txt_mv Contaminants can enter vacuum systems from two main sources: backstreaming of oil vapors from the diffusion and mechanical pumps, and vapors generated as byproducts in the process chamber. Both sources can be hindered by using an appropriate baffle. We developed a virtual prototype of a low-cost baffle for vacuum systems that is cooled down with thermoelectric coolers (TECs). Compared to compressor cooling systems, TECs have useful advantages for this application: they are compact, silent, vibration-free, almost maintenance-free, inexpensive, widely commercially available, and capable of providing a precise temperature control. The baffle is partly built inside a tee vacuum fitting. A refrigerated cooper helix provides the trapping surfaces for contaminants flowing between the process chamber and the vacuum pumps. The cost of the baffle is below USD 250. The proof-of-concept model, implemented by the finite element method, showed that, when using TEC1-12706 modules, the helix can reach temperatures as low as −50 °C. According to our analysis, this temperature is more than enough for trapping the contaminants described above.
Fil: Conde Garrido, Juan Manuel. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Houssay. Instituto de Tecnologías y Ciencias de la Ingeniería "Hilario Fernández Long". Universidad de Buenos Aires. Facultad de Ingeniería. Instituto de Tecnologías y Ciencias de la Ingeniería "Hilario Fernández Long"; Argentina
Fil: Silveyra, Josefina María. Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Houssay. Instituto de Tecnologías y Ciencias de la Ingeniería "Hilario Fernández Long". Universidad de Buenos Aires. Facultad de Ingeniería. Instituto de Tecnologías y Ciencias de la Ingeniería "Hilario Fernández Long"; Argentina
description Contaminants can enter vacuum systems from two main sources: backstreaming of oil vapors from the diffusion and mechanical pumps, and vapors generated as byproducts in the process chamber. Both sources can be hindered by using an appropriate baffle. We developed a virtual prototype of a low-cost baffle for vacuum systems that is cooled down with thermoelectric coolers (TECs). Compared to compressor cooling systems, TECs have useful advantages for this application: they are compact, silent, vibration-free, almost maintenance-free, inexpensive, widely commercially available, and capable of providing a precise temperature control. The baffle is partly built inside a tee vacuum fitting. A refrigerated cooper helix provides the trapping surfaces for contaminants flowing between the process chamber and the vacuum pumps. The cost of the baffle is below USD 250. The proof-of-concept model, implemented by the finite element method, showed that, when using TEC1-12706 modules, the helix can reach temperatures as low as −50 °C. According to our analysis, this temperature is more than enough for trapping the contaminants described above.
publishDate 2018
dc.date.none.fl_str_mv 2018-05
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/88105
Conde Garrido, Juan Manuel; Silveyra, Josefina María; Virtual prototype of a low-cost vacuum baffle based on thermoelectric cooling; Pergamon-Elsevier Science Ltd; Vacuum; 151; 5-2018; 156-162
0042-207X
CONICET Digital
CONICET
url http://hdl.handle.net/11336/88105
identifier_str_mv Conde Garrido, Juan Manuel; Silveyra, Josefina María; Virtual prototype of a low-cost vacuum baffle based on thermoelectric cooling; Pergamon-Elsevier Science Ltd; Vacuum; 151; 5-2018; 156-162
0042-207X
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/url/https://www.sciencedirect.com/science/article/pii/S0042207X17319528
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.vacuum.2018.02.005
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
dc.publisher.none.fl_str_mv Pergamon-Elsevier Science Ltd
publisher.none.fl_str_mv Pergamon-Elsevier Science Ltd
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
_version_ 1852335064911708160
score 13.075124

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