Pattern preserving deposition: Experimental results and modeling

Autores
Castez, Marcos Federico; Fonticelli, Mariano Hernán; Azzaroni, Omar; Salvarezza, Roberto Carlos; Solari, Hernán G.
Año de publicación
2005
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
In this work we discuss pattern-preserving growth during metal deposition from the vapor on micro/nano-structured metal substrates. Experimental results for Cu deposition on patterned Cu substrates show pattern preserving growth or pattern destruction depending on the incident angle. We introduce a mesoscopic 1+1 dimensional model including deposition flow (directed and isotropic), surface diffusion and shadowing effects that account for the experimental growth data. Moreover, simulations on post-deposition annealing, for high aspect-ratio patterns show departures from the predictions of the linear theory for surface diffusion.
Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas
Materia
Ciencias Exactas
Física
pattern-preserving growth
metal deposition
Nivel de accesibilidad
acceso abierto
Condiciones de uso
http://creativecommons.org/licenses/by/4.0/
Repositorio
SEDICI (UNLP)
Institución
Universidad Nacional de La Plata
OAI Identificador
oai:sedici.unlp.edu.ar:10915/159817
Acceder
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oai_identifier_str oai:sedici.unlp.edu.ar:10915/159817
network_acronym_str SEDICI
repository_id_str 1329
network_name_str SEDICI (UNLP)
spelling Pattern preserving deposition: Experimental results and modelingCastez, Marcos FedericoFonticelli, Mariano HernánAzzaroni, OmarSalvarezza, Roberto CarlosSolari, Hernán G.Ciencias ExactasFísicapattern-preserving growthmetal depositionIn this work we discuss pattern-preserving growth during metal deposition from the vapor on micro/nano-structured metal substrates. Experimental results for Cu deposition on patterned Cu substrates show pattern preserving growth or pattern destruction depending on the incident angle. We introduce a mesoscopic 1+1 dimensional model including deposition flow (directed and isotropic), surface diffusion and shadowing effects that account for the experimental growth data. Moreover, simulations on post-deposition annealing, for high aspect-ratio patterns show departures from the predictions of the linear theory for surface diffusion.Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas2005-09info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionArticulohttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfhttp://sedici.unlp.edu.ar/handle/10915/159817enginfo:eu-repo/semantics/altIdentifier/issn/0003-6951info:eu-repo/semantics/altIdentifier/issn/1077-3118info:eu-repo/semantics/altIdentifier/doi/10.1063/1.2053368info:eu-repo/semantics/openAccesshttp://creativecommons.org/licenses/by/4.0/Creative Commons Attribution 4.0 International (CC BY 4.0)reponame:SEDICI (UNLP)instname:Universidad Nacional de La Platainstacron:UNLP2025-09-03T11:13:48Zoai:sedici.unlp.edu.ar:10915/159817Institucionalhttp://sedici.unlp.edu.ar/Universidad públicaNo correspondehttp://sedici.unlp.edu.ar/oai/snrdalira@sedici.unlp.edu.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:13292025-09-03 11:13:48.814SEDICI (UNLP) - Universidad Nacional de La Platafalse
dc.title.none.fl_str_mv Pattern preserving deposition: Experimental results and modeling
title Pattern preserving deposition: Experimental results and modeling
spellingShingle Pattern preserving deposition: Experimental results and modeling
Castez, Marcos Federico
Ciencias Exactas
Física
pattern-preserving growth
metal deposition
title_short Pattern preserving deposition: Experimental results and modeling
title_full Pattern preserving deposition: Experimental results and modeling
title_fullStr Pattern preserving deposition: Experimental results and modeling
title_full_unstemmed Pattern preserving deposition: Experimental results and modeling
title_sort Pattern preserving deposition: Experimental results and modeling
dc.creator.none.fl_str_mv Castez, Marcos Federico
Fonticelli, Mariano Hernán
Azzaroni, Omar
Salvarezza, Roberto Carlos
Solari, Hernán G.
author Castez, Marcos Federico
author_facet Castez, Marcos Federico
Fonticelli, Mariano Hernán
Azzaroni, Omar
Salvarezza, Roberto Carlos
Solari, Hernán G.
author_role author
author2 Fonticelli, Mariano Hernán
Azzaroni, Omar
Salvarezza, Roberto Carlos
Solari, Hernán G.
author2_role author
author
author
author
dc.subject.none.fl_str_mv Ciencias Exactas
Física
pattern-preserving growth
metal deposition
topic Ciencias Exactas
Física
pattern-preserving growth
metal deposition
dc.description.none.fl_txt_mv In this work we discuss pattern-preserving growth during metal deposition from the vapor on micro/nano-structured metal substrates. Experimental results for Cu deposition on patterned Cu substrates show pattern preserving growth or pattern destruction depending on the incident angle. We introduce a mesoscopic 1+1 dimensional model including deposition flow (directed and isotropic), surface diffusion and shadowing effects that account for the experimental growth data. Moreover, simulations on post-deposition annealing, for high aspect-ratio patterns show departures from the predictions of the linear theory for surface diffusion.
Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas
description In this work we discuss pattern-preserving growth during metal deposition from the vapor on micro/nano-structured metal substrates. Experimental results for Cu deposition on patterned Cu substrates show pattern preserving growth or pattern destruction depending on the incident angle. We introduce a mesoscopic 1+1 dimensional model including deposition flow (directed and isotropic), surface diffusion and shadowing effects that account for the experimental growth data. Moreover, simulations on post-deposition annealing, for high aspect-ratio patterns show departures from the predictions of the linear theory for surface diffusion.
publishDate 2005
dc.date.none.fl_str_mv 2005-09
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
Articulo
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://sedici.unlp.edu.ar/handle/10915/159817
url http://sedici.unlp.edu.ar/handle/10915/159817
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/issn/0003-6951
info:eu-repo/semantics/altIdentifier/issn/1077-3118
info:eu-repo/semantics/altIdentifier/doi/10.1063/1.2053368
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
http://creativecommons.org/licenses/by/4.0/
Creative Commons Attribution 4.0 International (CC BY 4.0)
eu_rights_str_mv openAccess
rights_invalid_str_mv http://creativecommons.org/licenses/by/4.0/
Creative Commons Attribution 4.0 International (CC BY 4.0)
dc.format.none.fl_str_mv application/pdf
dc.source.none.fl_str_mv reponame:SEDICI (UNLP)
instname:Universidad Nacional de La Plata
instacron:UNLP
reponame_str SEDICI (UNLP)
collection SEDICI (UNLP)
instname_str Universidad Nacional de La Plata
instacron_str UNLP
institution UNLP
repository.name.fl_str_mv SEDICI (UNLP) - Universidad Nacional de La Plata
repository.mail.fl_str_mv alira@sedici.unlp.edu.ar
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score 13.13397

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