Micromechanical magnetometer using an all-silicon nonlinear torsional resonator

Autores
Antonio, Dario; Dolz, Moira Ines; Pastoriza, Hernan
Año de publicación
2009
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
In this work, a micromagnetometer employing a nonlinear torsional resonator with a high quality factor Q is presented experimentally. Oscillatory rotation of a conducting plate in the sensed magnetic field H induces eddy currents that dissipate energy. Due to the nonlinear response of the oscillator, the resulting mechanical damping originates frequency shifts in the resonance curve that depend on H. Nonlinearity results from the electrostatic detection, which introduces high order electrical spring constants. The device is fabricated with a standard silicon process and does not incorporate ferromagnetic materials. An analytical nonlinear model that correctly describes the device is also introduced.
Fil: Antonio, Dario. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina
Fil: Dolz, Moira Ines. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - San Luis. Instituto de Física Aplicada "Dr. Jorge Andrés Zgrablich". Universidad Nacional de San Luis. Facultad de Ciencias Físico Matemáticas y Naturales. Instituto de Física Aplicada "Dr. Jorge Andrés Zgrablich"; Argentina
Fil: Pastoriza, Hernan. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; Argentina
Materia
mems
magnetometro
sistemas no lineales
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/130656
Acceder
id CONICETDig_bd036776076f43b9c8af9e6e34a320ae
oai_identifier_str oai:ri.conicet.gov.ar:11336/130656
network_acronym_str CONICETDig
repository_id_str 3498
network_name_str CONICET Digital (CONICET)
spelling Micromechanical magnetometer using an all-silicon nonlinear torsional resonatorAntonio, DarioDolz, Moira InesPastoriza, Hernanmemsmagnetometrosistemas no linealeshttps://purl.org/becyt/ford/1.3https://purl.org/becyt/ford/1In this work, a micromagnetometer employing a nonlinear torsional resonator with a high quality factor Q is presented experimentally. Oscillatory rotation of a conducting plate in the sensed magnetic field H induces eddy currents that dissipate energy. Due to the nonlinear response of the oscillator, the resulting mechanical damping originates frequency shifts in the resonance curve that depend on H. Nonlinearity results from the electrostatic detection, which introduces high order electrical spring constants. The device is fabricated with a standard silicon process and does not incorporate ferromagnetic materials. An analytical nonlinear model that correctly describes the device is also introduced.Fil: Antonio, Dario. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; ArgentinaFil: Dolz, Moira Ines. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - San Luis. Instituto de Física Aplicada "Dr. Jorge Andrés Zgrablich". Universidad Nacional de San Luis. Facultad de Ciencias Físico Matemáticas y Naturales. Instituto de Física Aplicada "Dr. Jorge Andrés Zgrablich"; ArgentinaFil: Pastoriza, Hernan. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; ArgentinaAmerican Institute of Physics2009-12info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/130656Antonio, Dario; Dolz, Moira Ines; Pastoriza, Hernan; Micromechanical magnetometer using an all-silicon nonlinear torsional resonator; American Institute of Physics; Applied Physics Letters; 95; 13; 12-2009; 1-30003-6951CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/doi/10.1063/1.3242003info:eu-repo/semantics/altIdentifier/url/https://aip.scitation.org/doi/10.1063/1.3242003info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-03T10:01:40Zoai:ri.conicet.gov.ar:11336/130656instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-03 10:01:41.012CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv Micromechanical magnetometer using an all-silicon nonlinear torsional resonator
title Micromechanical magnetometer using an all-silicon nonlinear torsional resonator
spellingShingle Micromechanical magnetometer using an all-silicon nonlinear torsional resonator
Antonio, Dario
mems
magnetometro
sistemas no lineales
title_short Micromechanical magnetometer using an all-silicon nonlinear torsional resonator
title_full Micromechanical magnetometer using an all-silicon nonlinear torsional resonator
title_fullStr Micromechanical magnetometer using an all-silicon nonlinear torsional resonator
title_full_unstemmed Micromechanical magnetometer using an all-silicon nonlinear torsional resonator
title_sort Micromechanical magnetometer using an all-silicon nonlinear torsional resonator
dc.creator.none.fl_str_mv Antonio, Dario
Dolz, Moira Ines
Pastoriza, Hernan
author Antonio, Dario
author_facet Antonio, Dario
Dolz, Moira Ines
Pastoriza, Hernan
author_role author
author2 Dolz, Moira Ines
Pastoriza, Hernan
author2_role author
author
dc.subject.none.fl_str_mv mems
magnetometro
sistemas no lineales
topic mems
magnetometro
sistemas no lineales
purl_subject.fl_str_mv https://purl.org/becyt/ford/1.3
https://purl.org/becyt/ford/1
dc.description.none.fl_txt_mv In this work, a micromagnetometer employing a nonlinear torsional resonator with a high quality factor Q is presented experimentally. Oscillatory rotation of a conducting plate in the sensed magnetic field H induces eddy currents that dissipate energy. Due to the nonlinear response of the oscillator, the resulting mechanical damping originates frequency shifts in the resonance curve that depend on H. Nonlinearity results from the electrostatic detection, which introduces high order electrical spring constants. The device is fabricated with a standard silicon process and does not incorporate ferromagnetic materials. An analytical nonlinear model that correctly describes the device is also introduced.
Fil: Antonio, Dario. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina
Fil: Dolz, Moira Ines. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - San Luis. Instituto de Física Aplicada "Dr. Jorge Andrés Zgrablich". Universidad Nacional de San Luis. Facultad de Ciencias Físico Matemáticas y Naturales. Instituto de Física Aplicada "Dr. Jorge Andrés Zgrablich"; Argentina
Fil: Pastoriza, Hernan. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; Argentina
description In this work, a micromagnetometer employing a nonlinear torsional resonator with a high quality factor Q is presented experimentally. Oscillatory rotation of a conducting plate in the sensed magnetic field H induces eddy currents that dissipate energy. Due to the nonlinear response of the oscillator, the resulting mechanical damping originates frequency shifts in the resonance curve that depend on H. Nonlinearity results from the electrostatic detection, which introduces high order electrical spring constants. The device is fabricated with a standard silicon process and does not incorporate ferromagnetic materials. An analytical nonlinear model that correctly describes the device is also introduced.
publishDate 2009
dc.date.none.fl_str_mv 2009-12
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/130656
Antonio, Dario; Dolz, Moira Ines; Pastoriza, Hernan; Micromechanical magnetometer using an all-silicon nonlinear torsional resonator; American Institute of Physics; Applied Physics Letters; 95; 13; 12-2009; 1-3
0003-6951
CONICET Digital
CONICET
url http://hdl.handle.net/11336/130656
identifier_str_mv Antonio, Dario; Dolz, Moira Ines; Pastoriza, Hernan; Micromechanical magnetometer using an all-silicon nonlinear torsional resonator; American Institute of Physics; Applied Physics Letters; 95; 13; 12-2009; 1-3
0003-6951
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/doi/10.1063/1.3242003
info:eu-repo/semantics/altIdentifier/url/https://aip.scitation.org/doi/10.1063/1.3242003
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
application/pdf
application/pdf
dc.publisher.none.fl_str_mv American Institute of Physics
publisher.none.fl_str_mv American Institute of Physics
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
_version_ 1842269711200419840
score 13.13397

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