Cita APA

Benegra, M., Lamas, D. G., Fernández de Rapp, M. E., Mingolo, N., Kunrath, A. O., & Souza, R. M. (2006). Residual stresses in titanium nitride thin films deposited by direct current and pulsed direct current unbalanced magnetron sputtering. Web

Citación estilo Chicago

Benegra, M., Diego German Lamas, M. E. Fernández de Rapp, N. Mingolo, A. O. Kunrath, and R. M. Souza. Residual Stresses in Titanium Nitride Thin Films Deposited By Direct Current and Pulsed Direct Current Unbalanced Magnetron Sputtering. 2006.

Cita MLA

Benegra, M., et al. Residual Stresses in Titanium Nitride Thin Films Deposited By Direct Current and Pulsed Direct Current Unbalanced Magnetron Sputtering. 2006.