A theoretical framework to obtain interface’s shapes during the high-temperature annealing of high-aspect-ratio gratings

Autores
Castez, Marcos Federico; Salvarezza, Roberto Carlos; Nakamura, Jun; Sudoh, Koichi
Año de publicación
2010
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
High-temperature annealing applied to solid samples produces important morphological modifications on their surfaces, particularly in high-aspect-ratio gratings. We show, how by means of a framework based in a nonlinear analysis of the Mullins’ equation J. Appl. Phys. 28, 333 1957 , we can mathematically reproduce surface’s shapes just by measuring a few characteristic features of the interfaces essentially pattern’s amplitudes and wavelengths. We compared our results with experimental data on silicon samples, finding a close agreement between experimental shapes and those theoretically predicted. The introduced framework could be particularly useful in those situations where no cross-sectional information were available.
Fil: Castez, Marcos Federico. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - La Plata. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas. Universidad Nacional de La Plata. Facultad de Ciencias Exactas. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas; Argentina
Fil: Salvarezza, Roberto Carlos. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - La Plata. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas. Universidad Nacional de La Plata. Facultad de Ciencias Exactas. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas; Argentina
Fil: Nakamura, Jun. Osaka University; Japón
Fil: Sudoh, Koichi. Osaka University; Japón
Materia
Nanostructures
Thermal decay
Microscopies
Modelling
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/279368
Acceder
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spelling A theoretical framework to obtain interface’s shapes during the high-temperature annealing of high-aspect-ratio gratingsCastez, Marcos FedericoSalvarezza, Roberto CarlosNakamura, JunSudoh, KoichiNanostructuresThermal decayMicroscopiesModellinghttps://purl.org/becyt/ford/2.10https://purl.org/becyt/ford/2High-temperature annealing applied to solid samples produces important morphological modifications on their surfaces, particularly in high-aspect-ratio gratings. We show, how by means of a framework based in a nonlinear analysis of the Mullins’ equation J. Appl. Phys. 28, 333 1957 , we can mathematically reproduce surface’s shapes just by measuring a few characteristic features of the interfaces essentially pattern’s amplitudes and wavelengths. We compared our results with experimental data on silicon samples, finding a close agreement between experimental shapes and those theoretically predicted. The introduced framework could be particularly useful in those situations where no cross-sectional information were available.Fil: Castez, Marcos Federico. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - La Plata. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas. Universidad Nacional de La Plata. Facultad de Ciencias Exactas. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas; ArgentinaFil: Salvarezza, Roberto Carlos. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - La Plata. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas. Universidad Nacional de La Plata. Facultad de Ciencias Exactas. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas; ArgentinaFil: Nakamura, Jun. Osaka University; JapónFil: Sudoh, Koichi. Osaka University; JapónAmerican Institute of Physics2010-09info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/279368Castez, Marcos Federico; Salvarezza, Roberto Carlos; Nakamura, Jun; Sudoh, Koichi; A theoretical framework to obtain interface’s shapes during the high-temperature annealing of high-aspect-ratio gratings; American Institute of Physics; Applied Physics Letters; 97; 12; 9-2010; 1-30003-6951CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/url/https://pubs.aip.org/aip/apl/article-abstract/97/12/123104/810772/A-theoretical-framework-to-obtain-interface-sinfo:eu-repo/semantics/altIdentifier/doi/10.1063/1.3492442info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2026-02-26T10:11:03Zoai:ri.conicet.gov.ar:11336/279368instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982026-02-26 10:11:03.734CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv A theoretical framework to obtain interface’s shapes during the high-temperature annealing of high-aspect-ratio gratings
title A theoretical framework to obtain interface’s shapes during the high-temperature annealing of high-aspect-ratio gratings
spellingShingle A theoretical framework to obtain interface’s shapes during the high-temperature annealing of high-aspect-ratio gratings
Castez, Marcos Federico
Nanostructures
Thermal decay
Microscopies
Modelling
title_short A theoretical framework to obtain interface’s shapes during the high-temperature annealing of high-aspect-ratio gratings
title_full A theoretical framework to obtain interface’s shapes during the high-temperature annealing of high-aspect-ratio gratings
title_fullStr A theoretical framework to obtain interface’s shapes during the high-temperature annealing of high-aspect-ratio gratings
title_full_unstemmed A theoretical framework to obtain interface’s shapes during the high-temperature annealing of high-aspect-ratio gratings
title_sort A theoretical framework to obtain interface’s shapes during the high-temperature annealing of high-aspect-ratio gratings
dc.creator.none.fl_str_mv Castez, Marcos Federico
Salvarezza, Roberto Carlos
Nakamura, Jun
Sudoh, Koichi
author Castez, Marcos Federico
author_facet Castez, Marcos Federico
Salvarezza, Roberto Carlos
Nakamura, Jun
Sudoh, Koichi
author_role author
author2 Salvarezza, Roberto Carlos
Nakamura, Jun
Sudoh, Koichi
author2_role author
author
author
dc.subject.none.fl_str_mv Nanostructures
Thermal decay
Microscopies
Modelling
topic Nanostructures
Thermal decay
Microscopies
Modelling
purl_subject.fl_str_mv https://purl.org/becyt/ford/2.10
https://purl.org/becyt/ford/2
dc.description.none.fl_txt_mv High-temperature annealing applied to solid samples produces important morphological modifications on their surfaces, particularly in high-aspect-ratio gratings. We show, how by means of a framework based in a nonlinear analysis of the Mullins’ equation J. Appl. Phys. 28, 333 1957 , we can mathematically reproduce surface’s shapes just by measuring a few characteristic features of the interfaces essentially pattern’s amplitudes and wavelengths. We compared our results with experimental data on silicon samples, finding a close agreement between experimental shapes and those theoretically predicted. The introduced framework could be particularly useful in those situations where no cross-sectional information were available.
Fil: Castez, Marcos Federico. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - La Plata. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas. Universidad Nacional de La Plata. Facultad de Ciencias Exactas. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas; Argentina
Fil: Salvarezza, Roberto Carlos. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - La Plata. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas. Universidad Nacional de La Plata. Facultad de Ciencias Exactas. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas; Argentina
Fil: Nakamura, Jun. Osaka University; Japón
Fil: Sudoh, Koichi. Osaka University; Japón
description High-temperature annealing applied to solid samples produces important morphological modifications on their surfaces, particularly in high-aspect-ratio gratings. We show, how by means of a framework based in a nonlinear analysis of the Mullins’ equation J. Appl. Phys. 28, 333 1957 , we can mathematically reproduce surface’s shapes just by measuring a few characteristic features of the interfaces essentially pattern’s amplitudes and wavelengths. We compared our results with experimental data on silicon samples, finding a close agreement between experimental shapes and those theoretically predicted. The introduced framework could be particularly useful in those situations where no cross-sectional information were available.
publishDate 2010
dc.date.none.fl_str_mv 2010-09
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/279368
Castez, Marcos Federico; Salvarezza, Roberto Carlos; Nakamura, Jun; Sudoh, Koichi; A theoretical framework to obtain interface’s shapes during the high-temperature annealing of high-aspect-ratio gratings; American Institute of Physics; Applied Physics Letters; 97; 12; 9-2010; 1-3
0003-6951
CONICET Digital
CONICET
url http://hdl.handle.net/11336/279368
identifier_str_mv Castez, Marcos Federico; Salvarezza, Roberto Carlos; Nakamura, Jun; Sudoh, Koichi; A theoretical framework to obtain interface’s shapes during the high-temperature annealing of high-aspect-ratio gratings; American Institute of Physics; Applied Physics Letters; 97; 12; 9-2010; 1-3
0003-6951
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/url/https://pubs.aip.org/aip/apl/article-abstract/97/12/123104/810772/A-theoretical-framework-to-obtain-interface-s
info:eu-repo/semantics/altIdentifier/doi/10.1063/1.3492442
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
application/pdf
dc.publisher.none.fl_str_mv American Institute of Physics
publisher.none.fl_str_mv American Institute of Physics
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
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score 13.176822

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