García Molleja, J., Gomez, B. J. A., Ferron, J., Gautron, E., Burgi, J. M., Abdallah, B., . . . Jouan, P. (2013). AlN thin films deposited by DC reactive magnetron sputtering: Effect of oxygen on film growth. Web
Citación estilo ChicagoGarcía Molleja, Javier, Bernardo Jose Armando Gomez, Julio Ferron, Eric Gautron, Juan Mauel Burgi, Bassam Abdallah, Mohamed Abdou Djouadi, Jorge Nestor Feugeas, and Pierre-Yves Jouan. AlN Thin Films Deposited By DC Reactive Magnetron Sputtering: Effect of Oxygen On Film Growth. 2013.
Cita MLAGarcía Molleja, Javier, et al. AlN Thin Films Deposited By DC Reactive Magnetron Sputtering: Effect of Oxygen On Film Growth. 2013.
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