On the calculation of viscous damping of microbeam resonators in air

Autores
Berli, Claudio Luis Alberto; Cardona, Alberto
Año de publicación
2009
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
Theoretical aspects concerning the calculation of the air damping of microbeam resonators in the framework of continuum fluid mechanics are discussed. A closed relationship between Knudsen and Stokes numbers is derived, which indicates that the no-slip flow regime is attained in systems that operate at high Stokes numbers only, while systems that operate at low Stokes numbers invariably enter the slip flow regime. These observations are relevant to improve the modelling and simulation of microbeam resonators integrated to micro-electromechanical systems (MEMS). In addition, analytical expressions of the viscous damping coefficients for different flow regimes are discussed in relation to experimental data.
Fil: Berli, Claudio Luis Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Fil: Cardona, Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Materia
Air Damping
Mems
Microresonators
Gas Microflows
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/25445
Acceder
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oai_identifier_str oai:ri.conicet.gov.ar:11336/25445
network_acronym_str CONICETDig
repository_id_str 3498
network_name_str CONICET Digital (CONICET)
spelling On the calculation of viscous damping of microbeam resonators in airBerli, Claudio Luis AlbertoCardona, AlbertoAir DampingMemsMicroresonatorsGas MicroflowsTheoretical aspects concerning the calculation of the air damping of microbeam resonators in the framework of continuum fluid mechanics are discussed. A closed relationship between Knudsen and Stokes numbers is derived, which indicates that the no-slip flow regime is attained in systems that operate at high Stokes numbers only, while systems that operate at low Stokes numbers invariably enter the slip flow regime. These observations are relevant to improve the modelling and simulation of microbeam resonators integrated to micro-electromechanical systems (MEMS). In addition, analytical expressions of the viscous damping coefficients for different flow regimes are discussed in relation to experimental data.Fil: Berli, Claudio Luis Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; ArgentinaFil: Cardona, Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; ArgentinaElsevier2009-06info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/25445Berli, Claudio Luis Alberto; Cardona, Alberto; On the calculation of viscous damping of microbeam resonators in air; Elsevier; Journal of Sound and Vibration; 327; 1-2; 6-2009; 249-2530022-460XCONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/url/http://www.sciencedirect.com/science/article/pii/S0022460X09004921info:eu-repo/semantics/altIdentifier/doi/10.1016/j.jsv.2009.06.003info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-10-22T11:52:44Zoai:ri.conicet.gov.ar:11336/25445instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-10-22 11:52:44.473CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv On the calculation of viscous damping of microbeam resonators in air
title On the calculation of viscous damping of microbeam resonators in air
spellingShingle On the calculation of viscous damping of microbeam resonators in air
Berli, Claudio Luis Alberto
Air Damping
Mems
Microresonators
Gas Microflows
title_short On the calculation of viscous damping of microbeam resonators in air
title_full On the calculation of viscous damping of microbeam resonators in air
title_fullStr On the calculation of viscous damping of microbeam resonators in air
title_full_unstemmed On the calculation of viscous damping of microbeam resonators in air
title_sort On the calculation of viscous damping of microbeam resonators in air
dc.creator.none.fl_str_mv Berli, Claudio Luis Alberto
Cardona, Alberto
author Berli, Claudio Luis Alberto
author_facet Berli, Claudio Luis Alberto
Cardona, Alberto
author_role author
author2 Cardona, Alberto
author2_role author
dc.subject.none.fl_str_mv Air Damping
Mems
Microresonators
Gas Microflows
topic Air Damping
Mems
Microresonators
Gas Microflows
dc.description.none.fl_txt_mv Theoretical aspects concerning the calculation of the air damping of microbeam resonators in the framework of continuum fluid mechanics are discussed. A closed relationship between Knudsen and Stokes numbers is derived, which indicates that the no-slip flow regime is attained in systems that operate at high Stokes numbers only, while systems that operate at low Stokes numbers invariably enter the slip flow regime. These observations are relevant to improve the modelling and simulation of microbeam resonators integrated to micro-electromechanical systems (MEMS). In addition, analytical expressions of the viscous damping coefficients for different flow regimes are discussed in relation to experimental data.
Fil: Berli, Claudio Luis Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Fil: Cardona, Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
description Theoretical aspects concerning the calculation of the air damping of microbeam resonators in the framework of continuum fluid mechanics are discussed. A closed relationship between Knudsen and Stokes numbers is derived, which indicates that the no-slip flow regime is attained in systems that operate at high Stokes numbers only, while systems that operate at low Stokes numbers invariably enter the slip flow regime. These observations are relevant to improve the modelling and simulation of microbeam resonators integrated to micro-electromechanical systems (MEMS). In addition, analytical expressions of the viscous damping coefficients for different flow regimes are discussed in relation to experimental data.
publishDate 2009
dc.date.none.fl_str_mv 2009-06
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/25445
Berli, Claudio Luis Alberto; Cardona, Alberto; On the calculation of viscous damping of microbeam resonators in air; Elsevier; Journal of Sound and Vibration; 327; 1-2; 6-2009; 249-253
0022-460X
CONICET Digital
CONICET
url http://hdl.handle.net/11336/25445
identifier_str_mv Berli, Claudio Luis Alberto; Cardona, Alberto; On the calculation of viscous damping of microbeam resonators in air; Elsevier; Journal of Sound and Vibration; 327; 1-2; 6-2009; 249-253
0022-460X
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/url/http://www.sciencedirect.com/science/article/pii/S0022460X09004921
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.jsv.2009.06.003
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
application/pdf
dc.publisher.none.fl_str_mv Elsevier
publisher.none.fl_str_mv Elsevier
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
_version_ 1846782220460621824
score 12.982451

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