On the calculation of viscous damping of microbeam resonators in air
- Autores
- Berli, Claudio Luis Alberto; Cardona, Alberto
- Año de publicación
- 2009
- Idioma
- inglés
- Tipo de recurso
- artículo
- Estado
- versión publicada
- Descripción
- Theoretical aspects concerning the calculation of the air damping of microbeam resonators in the framework of continuum fluid mechanics are discussed. A closed relationship between Knudsen and Stokes numbers is derived, which indicates that the no-slip flow regime is attained in systems that operate at high Stokes numbers only, while systems that operate at low Stokes numbers invariably enter the slip flow regime. These observations are relevant to improve the modelling and simulation of microbeam resonators integrated to micro-electromechanical systems (MEMS). In addition, analytical expressions of the viscous damping coefficients for different flow regimes are discussed in relation to experimental data.
Fil: Berli, Claudio Luis Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Fil: Cardona, Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina - Materia
-
Air Damping
Mems
Microresonators
Gas Microflows - Nivel de accesibilidad
- acceso abierto
- Condiciones de uso
- https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
- Repositorio
- Institución
- Consejo Nacional de Investigaciones Científicas y Técnicas
- OAI Identificador
- oai:ri.conicet.gov.ar:11336/25445
Ver los metadatos del registro completo
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On the calculation of viscous damping of microbeam resonators in airBerli, Claudio Luis AlbertoCardona, AlbertoAir DampingMemsMicroresonatorsGas MicroflowsTheoretical aspects concerning the calculation of the air damping of microbeam resonators in the framework of continuum fluid mechanics are discussed. A closed relationship between Knudsen and Stokes numbers is derived, which indicates that the no-slip flow regime is attained in systems that operate at high Stokes numbers only, while systems that operate at low Stokes numbers invariably enter the slip flow regime. These observations are relevant to improve the modelling and simulation of microbeam resonators integrated to micro-electromechanical systems (MEMS). In addition, analytical expressions of the viscous damping coefficients for different flow regimes are discussed in relation to experimental data.Fil: Berli, Claudio Luis Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; ArgentinaFil: Cardona, Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; ArgentinaElsevier2009-06info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/25445Berli, Claudio Luis Alberto; Cardona, Alberto; On the calculation of viscous damping of microbeam resonators in air; Elsevier; Journal of Sound and Vibration; 327; 1-2; 6-2009; 249-2530022-460XCONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/url/http://www.sciencedirect.com/science/article/pii/S0022460X09004921info:eu-repo/semantics/altIdentifier/doi/10.1016/j.jsv.2009.06.003info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-29T10:20:05Zoai:ri.conicet.gov.ar:11336/25445instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-29 10:20:05.967CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse |
dc.title.none.fl_str_mv |
On the calculation of viscous damping of microbeam resonators in air |
title |
On the calculation of viscous damping of microbeam resonators in air |
spellingShingle |
On the calculation of viscous damping of microbeam resonators in air Berli, Claudio Luis Alberto Air Damping Mems Microresonators Gas Microflows |
title_short |
On the calculation of viscous damping of microbeam resonators in air |
title_full |
On the calculation of viscous damping of microbeam resonators in air |
title_fullStr |
On the calculation of viscous damping of microbeam resonators in air |
title_full_unstemmed |
On the calculation of viscous damping of microbeam resonators in air |
title_sort |
On the calculation of viscous damping of microbeam resonators in air |
dc.creator.none.fl_str_mv |
Berli, Claudio Luis Alberto Cardona, Alberto |
author |
Berli, Claudio Luis Alberto |
author_facet |
Berli, Claudio Luis Alberto Cardona, Alberto |
author_role |
author |
author2 |
Cardona, Alberto |
author2_role |
author |
dc.subject.none.fl_str_mv |
Air Damping Mems Microresonators Gas Microflows |
topic |
Air Damping Mems Microresonators Gas Microflows |
dc.description.none.fl_txt_mv |
Theoretical aspects concerning the calculation of the air damping of microbeam resonators in the framework of continuum fluid mechanics are discussed. A closed relationship between Knudsen and Stokes numbers is derived, which indicates that the no-slip flow regime is attained in systems that operate at high Stokes numbers only, while systems that operate at low Stokes numbers invariably enter the slip flow regime. These observations are relevant to improve the modelling and simulation of microbeam resonators integrated to micro-electromechanical systems (MEMS). In addition, analytical expressions of the viscous damping coefficients for different flow regimes are discussed in relation to experimental data. Fil: Berli, Claudio Luis Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina Fil: Cardona, Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina |
description |
Theoretical aspects concerning the calculation of the air damping of microbeam resonators in the framework of continuum fluid mechanics are discussed. A closed relationship between Knudsen and Stokes numbers is derived, which indicates that the no-slip flow regime is attained in systems that operate at high Stokes numbers only, while systems that operate at low Stokes numbers invariably enter the slip flow regime. These observations are relevant to improve the modelling and simulation of microbeam resonators integrated to micro-electromechanical systems (MEMS). In addition, analytical expressions of the viscous damping coefficients for different flow regimes are discussed in relation to experimental data. |
publishDate |
2009 |
dc.date.none.fl_str_mv |
2009-06 |
dc.type.none.fl_str_mv |
info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion http://purl.org/coar/resource_type/c_6501 info:ar-repo/semantics/articulo |
format |
article |
status_str |
publishedVersion |
dc.identifier.none.fl_str_mv |
http://hdl.handle.net/11336/25445 Berli, Claudio Luis Alberto; Cardona, Alberto; On the calculation of viscous damping of microbeam resonators in air; Elsevier; Journal of Sound and Vibration; 327; 1-2; 6-2009; 249-253 0022-460X CONICET Digital CONICET |
url |
http://hdl.handle.net/11336/25445 |
identifier_str_mv |
Berli, Claudio Luis Alberto; Cardona, Alberto; On the calculation of viscous damping of microbeam resonators in air; Elsevier; Journal of Sound and Vibration; 327; 1-2; 6-2009; 249-253 0022-460X CONICET Digital CONICET |
dc.language.none.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
info:eu-repo/semantics/altIdentifier/url/http://www.sciencedirect.com/science/article/pii/S0022460X09004921 info:eu-repo/semantics/altIdentifier/doi/10.1016/j.jsv.2009.06.003 |
dc.rights.none.fl_str_mv |
info:eu-repo/semantics/openAccess https://creativecommons.org/licenses/by-nc-sa/2.5/ar/ |
eu_rights_str_mv |
openAccess |
rights_invalid_str_mv |
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/ |
dc.format.none.fl_str_mv |
application/pdf application/pdf application/pdf |
dc.publisher.none.fl_str_mv |
Elsevier |
publisher.none.fl_str_mv |
Elsevier |
dc.source.none.fl_str_mv |
reponame:CONICET Digital (CONICET) instname:Consejo Nacional de Investigaciones Científicas y Técnicas |
reponame_str |
CONICET Digital (CONICET) |
collection |
CONICET Digital (CONICET) |
instname_str |
Consejo Nacional de Investigaciones Científicas y Técnicas |
repository.name.fl_str_mv |
CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas |
repository.mail.fl_str_mv |
dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar |
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1844614178243870720 |
score |
13.070432 |