Lerner, B., Perez, M. S., Toro Salazar, C. E., Lasorsa, C. A., Rinaldi, C. A., Boselli, A., & Lamagna, A. (2012). Generation of cavities in silicon wafers by laser ablation using silicon nitride as sacrificial layer. Web
Citación estilo ChicagoLerner, Betiana, Maximiliano Sebastian Perez, Cinthya Emma Toro Salazar, Carlos Alberto Lasorsa, Carlos Alberto Rinaldi, Alfredo Boselli, and Alberto Lamagna. Generation of Cavities in Silicon Wafers By Laser Ablation Using Silicon Nitride As Sacrificial Layer. 2012.
Cita MLALerner, Betiana, et al. Generation of Cavities in Silicon Wafers By Laser Ablation Using Silicon Nitride As Sacrificial Layer. 2012.
Precaución: Estas citas no son 100% exactas.