Cita APA

Macchi, C. E., Burgi, J. M., García Molleja, J., Mariazzi, S., Piccoli, M., Bemporad, E., . . . Somoza, A. H. (2014). Depth profiling and morphological characterization of AlN thin films deposited on Si substrates using a reactive sputter magnetron. Web

Citación estilo Chicago

Macchi, Carlos Eugenio, Juan Mauel Burgi, Javier García Molleja, Sebastiano Mariazzi, Mattia Piccoli, Edoardo Bemporad, Jorge Nestor Feugeas, Roberto Sennen Brusa, and Alberto Horacio Somoza. Depth Profiling and Morphological Characterization of AlN Thin Films Deposited On Si Substrates Using a Reactive Sputter Magnetron. 2014.

Cita MLA

Macchi, Carlos Eugenio, et al. Depth Profiling and Morphological Characterization of AlN Thin Films Deposited On Si Substrates Using a Reactive Sputter Magnetron. 2014.