Electron induced reduction on AlF3 thin films

Autores
Vergara, L. I.; Vidal, Ricardo Alberto; Ferron, Julio
Año de publicación
2004
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
We studied the modifications introduced in the chemical structure of AlF3 films by electron irradiation using Auger electron spectroscopy (AES) and factor analysis (FA). We examined the effects of the current density and energy of the electrons on the film composition. We found that the irradiation produces lower aluminum oxidation states (AlFx with 0 < x < 3, and Al0), and that while this effect is independent of the electron density it presents a clear dependence on the primary electrons energy. After comparison of experiments on the dose dependence of AlF3 and AlFx reduction, for different energies, with Monte Carlo (MC) simulations, we propose possible mechanisms that lead to electron induced fluorine desorption.
Fil: Vergara, L. I.. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Fil: Vidal, Ricardo Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Fil: Ferron, Julio. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Materia
Fluoruro
Aluminum
Electron Desorption
Auger
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-nd/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/26823
Acceder
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network_name_str CONICET Digital (CONICET)
spelling Electron induced reduction on AlF3 thin filmsVergara, L. I.Vidal, Ricardo AlbertoFerron, JulioFluoruroAluminumElectron DesorptionAugerhttps://purl.org/becyt/ford/1.3https://purl.org/becyt/ford/1We studied the modifications introduced in the chemical structure of AlF3 films by electron irradiation using Auger electron spectroscopy (AES) and factor analysis (FA). We examined the effects of the current density and energy of the electrons on the film composition. We found that the irradiation produces lower aluminum oxidation states (AlFx with 0 < x < 3, and Al0), and that while this effect is independent of the electron density it presents a clear dependence on the primary electrons energy. After comparison of experiments on the dose dependence of AlF3 and AlFx reduction, for different energies, with Monte Carlo (MC) simulations, we propose possible mechanisms that lead to electron induced fluorine desorption.Fil: Vergara, L. I.. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; ArgentinaFil: Vidal, Ricardo Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; ArgentinaFil: Ferron, Julio. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; ArgentinaElsevier Science2004-03info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/26823Vergara, L. I.; Vidal, Ricardo Alberto; Ferron, Julio; Electron induced reduction on AlF3 thin films; Elsevier Science; Applied Surface Science; 229; 1-4; 3-2004; 301-3100169-4332CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/doi/10.1016/j.apsusc.2004.02.008info:eu-repo/semantics/altIdentifier/url/http://www.sciencedirect.com/science/article/pii/S0169433204001084info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-nd/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-03T10:07:08Zoai:ri.conicet.gov.ar:11336/26823instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-03 10:07:08.377CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv Electron induced reduction on AlF3 thin films
title Electron induced reduction on AlF3 thin films
spellingShingle Electron induced reduction on AlF3 thin films
Vergara, L. I.
Fluoruro
Aluminum
Electron Desorption
Auger
title_short Electron induced reduction on AlF3 thin films
title_full Electron induced reduction on AlF3 thin films
title_fullStr Electron induced reduction on AlF3 thin films
title_full_unstemmed Electron induced reduction on AlF3 thin films
title_sort Electron induced reduction on AlF3 thin films
dc.creator.none.fl_str_mv Vergara, L. I.
Vidal, Ricardo Alberto
Ferron, Julio
author Vergara, L. I.
author_facet Vergara, L. I.
Vidal, Ricardo Alberto
Ferron, Julio
author_role author
author2 Vidal, Ricardo Alberto
Ferron, Julio
author2_role author
author
dc.subject.none.fl_str_mv Fluoruro
Aluminum
Electron Desorption
Auger
topic Fluoruro
Aluminum
Electron Desorption
Auger
purl_subject.fl_str_mv https://purl.org/becyt/ford/1.3
https://purl.org/becyt/ford/1
dc.description.none.fl_txt_mv We studied the modifications introduced in the chemical structure of AlF3 films by electron irradiation using Auger electron spectroscopy (AES) and factor analysis (FA). We examined the effects of the current density and energy of the electrons on the film composition. We found that the irradiation produces lower aluminum oxidation states (AlFx with 0 < x < 3, and Al0), and that while this effect is independent of the electron density it presents a clear dependence on the primary electrons energy. After comparison of experiments on the dose dependence of AlF3 and AlFx reduction, for different energies, with Monte Carlo (MC) simulations, we propose possible mechanisms that lead to electron induced fluorine desorption.
Fil: Vergara, L. I.. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Fil: Vidal, Ricardo Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
Fil: Ferron, Julio. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química. Universidad Nacional del Litoral. Instituto de Desarrollo Tecnológico para la Industria Química; Argentina
description We studied the modifications introduced in the chemical structure of AlF3 films by electron irradiation using Auger electron spectroscopy (AES) and factor analysis (FA). We examined the effects of the current density and energy of the electrons on the film composition. We found that the irradiation produces lower aluminum oxidation states (AlFx with 0 < x < 3, and Al0), and that while this effect is independent of the electron density it presents a clear dependence on the primary electrons energy. After comparison of experiments on the dose dependence of AlF3 and AlFx reduction, for different energies, with Monte Carlo (MC) simulations, we propose possible mechanisms that lead to electron induced fluorine desorption.
publishDate 2004
dc.date.none.fl_str_mv 2004-03
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/26823
Vergara, L. I.; Vidal, Ricardo Alberto; Ferron, Julio; Electron induced reduction on AlF3 thin films; Elsevier Science; Applied Surface Science; 229; 1-4; 3-2004; 301-310
0169-4332
CONICET Digital
CONICET
url http://hdl.handle.net/11336/26823
identifier_str_mv Vergara, L. I.; Vidal, Ricardo Alberto; Ferron, Julio; Electron induced reduction on AlF3 thin films; Elsevier Science; Applied Surface Science; 229; 1-4; 3-2004; 301-310
0169-4332
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/doi/10.1016/j.apsusc.2004.02.008
info:eu-repo/semantics/altIdentifier/url/http://www.sciencedirect.com/science/article/pii/S0169433204001084
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-nd/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-nd/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
application/pdf
dc.publisher.none.fl_str_mv Elsevier Science
publisher.none.fl_str_mv Elsevier Science
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
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score 13.13397

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