Evolution of the quadrupole hyperfine interaction while milling a Si-HfO2? blend Original Research Article

Autores
Chain, Cecilia Yamil; Ferrari, Sergio; Damonte, Laura Cristina; Martinez, J. A.; Pasquevich, A. F.
Año de publicación
2012
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
As HfO2 appears as a good candidate to replace SiO2 in Si complementary metal-oxide-semiconductor devices, a refined knowledge of the possible solid-state reactions between Si and HfO2 is valuable. Being the Perturbed Angular Correlations technique a very sensitive method to detect small changes in solid state, the goal of this work is to follow the different stages that occur while ball milling a blend Si-HfO2 by inspecting the hyperfine quadrupole interaction at Hf sites. The characterization is complemented by X-ray diffraction analysis. For comparison, a similar study on pure m-HfO2 is carried out. The results seem to reveal a gradual incorporation of Si in a tetragonal defective phase of hafnia with milling time. In addition, the formation of precursor arrays of the HfSiO4 structure takes place. After an annealing at 1000 °C an important amount of crystalline hafnon appears.
Fil: Chain, Cecilia Yamil. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Universidad Nacional de la Plata. Facultad de Ciencias Exactas. Departamento de Física; Argentina
Fil: Ferrari, Sergio. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Universidad Nacional de la Plata. Facultad de Ciencias Exactas. Departamento de Física; Argentina
Fil: Damonte, Laura Cristina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Universidad Nacional de la Plata. Facultad de Ciencias Exactas. Departamento de Física; Argentina
Fil: Martinez, J. A.. Universidad Nacional de la Plata. Facultad de Ciencias Exactas. Departamento de Física; Argentina. Provincia de Buenos Aires. Gobernación. Comisión de Investigaciones Científicas; Argentina
Fil: Pasquevich, A. F.. Universidad Nacional de la Plata. Facultad de Ciencias Exactas. Departamento de Física; Argentina. Provincia de Buenos Aires. Gobernación. Comisión de Investigaciones Científicas; Argentina
Materia
Oxide Materials
Mechanical Alloying
Hyperfine Interaccions
Perturbed Angular Correlation
Pac
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/20082
Acceder
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oai_identifier_str oai:ri.conicet.gov.ar:11336/20082
network_acronym_str CONICETDig
repository_id_str 3498
network_name_str CONICET Digital (CONICET)
spelling Evolution of the quadrupole hyperfine interaction while milling a Si-HfO2? blend Original Research ArticleChain, Cecilia YamilFerrari, SergioDamonte, Laura CristinaMartinez, J. A.Pasquevich, A. F.Oxide MaterialsMechanical AlloyingHyperfine InteraccionsPerturbed Angular CorrelationPachttps://purl.org/becyt/ford/1.3https://purl.org/becyt/ford/1As HfO2 appears as a good candidate to replace SiO2 in Si complementary metal-oxide-semiconductor devices, a refined knowledge of the possible solid-state reactions between Si and HfO2 is valuable. Being the Perturbed Angular Correlations technique a very sensitive method to detect small changes in solid state, the goal of this work is to follow the different stages that occur while ball milling a blend Si-HfO2 by inspecting the hyperfine quadrupole interaction at Hf sites. The characterization is complemented by X-ray diffraction analysis. For comparison, a similar study on pure m-HfO2 is carried out. The results seem to reveal a gradual incorporation of Si in a tetragonal defective phase of hafnia with milling time. In addition, the formation of precursor arrays of the HfSiO4 structure takes place. After an annealing at 1000 °C an important amount of crystalline hafnon appears.Fil: Chain, Cecilia Yamil. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Universidad Nacional de la Plata. Facultad de Ciencias Exactas. Departamento de Física; ArgentinaFil: Ferrari, Sergio. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Universidad Nacional de la Plata. Facultad de Ciencias Exactas. Departamento de Física; ArgentinaFil: Damonte, Laura Cristina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Universidad Nacional de la Plata. Facultad de Ciencias Exactas. Departamento de Física; ArgentinaFil: Martinez, J. A.. Universidad Nacional de la Plata. Facultad de Ciencias Exactas. Departamento de Física; Argentina. Provincia de Buenos Aires. Gobernación. Comisión de Investigaciones Científicas; ArgentinaFil: Pasquevich, A. F.. Universidad Nacional de la Plata. Facultad de Ciencias Exactas. Departamento de Física; Argentina. Provincia de Buenos Aires. Gobernación. Comisión de Investigaciones Científicas; ArgentinaElsevier Science2012-09info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfapplication/pdfapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/20082Chain, Cecilia Yamil; Ferrari, Sergio; Damonte, Laura Cristina; Martinez, J. A.; Pasquevich, A. F.; Evolution of the quadrupole hyperfine interaction while milling a Si-HfO2? blend Original Research Article; Elsevier Science; Journal of Alloys and Compounds; 536; Supl. 1; 9-2012; 50-540925-8388CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/url/http://www.sciencedirect.com/science/article/pii/S092583881200357Xinfo:eu-repo/semantics/altIdentifier/doi/10.1016/j.jallcom.2012.02.082info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-10T13:01:25Zoai:ri.conicet.gov.ar:11336/20082instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-10 13:01:25.681CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv Evolution of the quadrupole hyperfine interaction while milling a Si-HfO2? blend Original Research Article
title Evolution of the quadrupole hyperfine interaction while milling a Si-HfO2? blend Original Research Article
spellingShingle Evolution of the quadrupole hyperfine interaction while milling a Si-HfO2? blend Original Research Article
Chain, Cecilia Yamil
Oxide Materials
Mechanical Alloying
Hyperfine Interaccions
Perturbed Angular Correlation
Pac
title_short Evolution of the quadrupole hyperfine interaction while milling a Si-HfO2? blend Original Research Article
title_full Evolution of the quadrupole hyperfine interaction while milling a Si-HfO2? blend Original Research Article
title_fullStr Evolution of the quadrupole hyperfine interaction while milling a Si-HfO2? blend Original Research Article
title_full_unstemmed Evolution of the quadrupole hyperfine interaction while milling a Si-HfO2? blend Original Research Article
title_sort Evolution of the quadrupole hyperfine interaction while milling a Si-HfO2? blend Original Research Article
dc.creator.none.fl_str_mv Chain, Cecilia Yamil
Ferrari, Sergio
Damonte, Laura Cristina
Martinez, J. A.
Pasquevich, A. F.
author Chain, Cecilia Yamil
author_facet Chain, Cecilia Yamil
Ferrari, Sergio
Damonte, Laura Cristina
Martinez, J. A.
Pasquevich, A. F.
author_role author
author2 Ferrari, Sergio
Damonte, Laura Cristina
Martinez, J. A.
Pasquevich, A. F.
author2_role author
author
author
author
dc.subject.none.fl_str_mv Oxide Materials
Mechanical Alloying
Hyperfine Interaccions
Perturbed Angular Correlation
Pac
topic Oxide Materials
Mechanical Alloying
Hyperfine Interaccions
Perturbed Angular Correlation
Pac
purl_subject.fl_str_mv https://purl.org/becyt/ford/1.3
https://purl.org/becyt/ford/1
dc.description.none.fl_txt_mv As HfO2 appears as a good candidate to replace SiO2 in Si complementary metal-oxide-semiconductor devices, a refined knowledge of the possible solid-state reactions between Si and HfO2 is valuable. Being the Perturbed Angular Correlations technique a very sensitive method to detect small changes in solid state, the goal of this work is to follow the different stages that occur while ball milling a blend Si-HfO2 by inspecting the hyperfine quadrupole interaction at Hf sites. The characterization is complemented by X-ray diffraction analysis. For comparison, a similar study on pure m-HfO2 is carried out. The results seem to reveal a gradual incorporation of Si in a tetragonal defective phase of hafnia with milling time. In addition, the formation of precursor arrays of the HfSiO4 structure takes place. After an annealing at 1000 °C an important amount of crystalline hafnon appears.
Fil: Chain, Cecilia Yamil. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Universidad Nacional de la Plata. Facultad de Ciencias Exactas. Departamento de Física; Argentina
Fil: Ferrari, Sergio. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Universidad Nacional de la Plata. Facultad de Ciencias Exactas. Departamento de Física; Argentina
Fil: Damonte, Laura Cristina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Universidad Nacional de la Plata. Facultad de Ciencias Exactas. Departamento de Física; Argentina
Fil: Martinez, J. A.. Universidad Nacional de la Plata. Facultad de Ciencias Exactas. Departamento de Física; Argentina. Provincia de Buenos Aires. Gobernación. Comisión de Investigaciones Científicas; Argentina
Fil: Pasquevich, A. F.. Universidad Nacional de la Plata. Facultad de Ciencias Exactas. Departamento de Física; Argentina. Provincia de Buenos Aires. Gobernación. Comisión de Investigaciones Científicas; Argentina
description As HfO2 appears as a good candidate to replace SiO2 in Si complementary metal-oxide-semiconductor devices, a refined knowledge of the possible solid-state reactions between Si and HfO2 is valuable. Being the Perturbed Angular Correlations technique a very sensitive method to detect small changes in solid state, the goal of this work is to follow the different stages that occur while ball milling a blend Si-HfO2 by inspecting the hyperfine quadrupole interaction at Hf sites. The characterization is complemented by X-ray diffraction analysis. For comparison, a similar study on pure m-HfO2 is carried out. The results seem to reveal a gradual incorporation of Si in a tetragonal defective phase of hafnia with milling time. In addition, the formation of precursor arrays of the HfSiO4 structure takes place. After an annealing at 1000 °C an important amount of crystalline hafnon appears.
publishDate 2012
dc.date.none.fl_str_mv 2012-09
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/20082
Chain, Cecilia Yamil; Ferrari, Sergio; Damonte, Laura Cristina; Martinez, J. A.; Pasquevich, A. F.; Evolution of the quadrupole hyperfine interaction while milling a Si-HfO2? blend Original Research Article; Elsevier Science; Journal of Alloys and Compounds; 536; Supl. 1; 9-2012; 50-54
0925-8388
CONICET Digital
CONICET
url http://hdl.handle.net/11336/20082
identifier_str_mv Chain, Cecilia Yamil; Ferrari, Sergio; Damonte, Laura Cristina; Martinez, J. A.; Pasquevich, A. F.; Evolution of the quadrupole hyperfine interaction while milling a Si-HfO2? blend Original Research Article; Elsevier Science; Journal of Alloys and Compounds; 536; Supl. 1; 9-2012; 50-54
0925-8388
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/url/http://www.sciencedirect.com/science/article/pii/S092583881200357X
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.jallcom.2012.02.082
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
application/pdf
application/pdf
application/pdf
application/pdf
application/pdf
dc.publisher.none.fl_str_mv Elsevier Science
publisher.none.fl_str_mv Elsevier Science
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
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score 12.993085

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