Cita APA

Krylov, I., Xu, X., Zoubenko, E., Weinfeld, K., Boyeras Baldomá, S., Palumbo, F. R. M., . . . Ritter, D. (2018). Role of reactive gas on the structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition. Web

Citación estilo Chicago

Krylov, Igor, Xianbin Xu, Ekaterina Zoubenko, Kamira Weinfeld, Santiago Boyeras Baldomá, Félix Roberto Mario Palumbo, Moshe Eizenberg, and Dan Ritter. Role of Reactive Gas On the Structure and Properties of Titanium Nitride Films Grown By Plasma Enhanced Atomic Layer Deposition. 2018.

Cita MLA

Krylov, Igor, et al. Role of Reactive Gas On the Structure and Properties of Titanium Nitride Films Grown By Plasma Enhanced Atomic Layer Deposition. 2018.