Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations

Autores
Duran, A.A.; Fazio, M.; Kleiman, A.; Giuliani, L.; Marquez, A.; Grondona, D.
Año de publicación
2012
Idioma
inglés
Tipo de recurso
documento de conferencia
Estado
versión publicada
Descripción
In the present work, we studied the efficiency of a magnetic island filter for two vacuum arc designs, pulsed and continuous. The magnetic island filter consisted in a straight duct with an external solenoid and a magnet enclosed in a housing (magnetic island) located inside the duct on its axis, and both magnetic fields are in opposite direction. The housing of the magnetic island obstructs the line of sight between the cathode and the substrate. In this arrangement, the charged plasma components move along the curved magnetic field lines, around the magnetic island, but the macroparticles move in straight paths and deposit on the wall of the magnetic island housing. The performance of the filter was characterized for different external and internal field strengths. The plasma transport efficiency was analyzed by measuring the ion saturation current with Langmuir probes and the deposited mass rate. The ion transmission efficiency around the system axis achieved values around 25%. Observation of the coating surface morphology with optical microscopy determined that the macroparticles were effectively removed.
Fil:Fazio, M. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.
Fil:Kleiman, A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.
Fil:Giuliani, L. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.
Fil:Marquez, A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.
Fil:Grondona, D. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.
Fuente
J. Phys. Conf. Ser. 2012;370(1)
Materia
Bandpass filters
Ducts
Efficiency
Housing
Magnetic fields
Magnetism
Vacuum applications
Vacuum technology
Coating surface morphologies
Ion saturation current
Ion transmission efficiency
Macro-particles
Macroparticle filter
Magnetic field line
Magnetic island
Plasma transport
Magnetoplasma
Nivel de accesibilidad
acceso abierto
Condiciones de uso
http://creativecommons.org/licenses/by/2.5/ar
Repositorio
Biblioteca Digital (UBA-FCEN)
Institución
Universidad Nacional de Buenos Aires. Facultad de Ciencias Exactas y Naturales
OAI Identificador
paperaa:paper_17426588_v370_n1_p_Duran
Acceder
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oai_identifier_str paperaa:paper_17426588_v370_n1_p_Duran
network_acronym_str BDUBAFCEN
repository_id_str 1896
network_name_str Biblioteca Digital (UBA-FCEN)
spelling Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurationsDuran, A.A.Fazio, M.Kleiman, A.Giuliani, L.Marquez, A.Grondona, D.Bandpass filtersDuctsEfficiencyHousingMagnetic fieldsMagnetismVacuum applicationsVacuum technologyCoating surface morphologiesIon saturation currentIon transmission efficiencyMacro-particlesMacroparticle filterMagnetic field lineMagnetic islandPlasma transportMagnetoplasmaIn the present work, we studied the efficiency of a magnetic island filter for two vacuum arc designs, pulsed and continuous. The magnetic island filter consisted in a straight duct with an external solenoid and a magnet enclosed in a housing (magnetic island) located inside the duct on its axis, and both magnetic fields are in opposite direction. The housing of the magnetic island obstructs the line of sight between the cathode and the substrate. In this arrangement, the charged plasma components move along the curved magnetic field lines, around the magnetic island, but the macroparticles move in straight paths and deposit on the wall of the magnetic island housing. The performance of the filter was characterized for different external and internal field strengths. The plasma transport efficiency was analyzed by measuring the ion saturation current with Langmuir probes and the deposited mass rate. The ion transmission efficiency around the system axis achieved values around 25%. Observation of the coating surface morphology with optical microscopy determined that the macroparticles were effectively removed.Fil:Fazio, M. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.Fil:Kleiman, A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.Fil:Giuliani, L. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.Fil:Marquez, A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.Fil:Grondona, D. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.2012info:eu-repo/semantics/conferenceObjectinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_5794info:ar-repo/semantics/documentoDeConferenciaapplication/pdfhttp://hdl.handle.net/20.500.12110/paper_17426588_v370_n1_p_DuranJ. Phys. Conf. Ser. 2012;370(1)reponame:Biblioteca Digital (UBA-FCEN)instname:Universidad Nacional de Buenos Aires. Facultad de Ciencias Exactas y Naturalesinstacron:UBA-FCENenginfo:eu-repo/semantics/openAccesshttp://creativecommons.org/licenses/by/2.5/ar2025-09-29T13:43:00Zpaperaa:paper_17426588_v370_n1_p_DuranInstitucionalhttps://digital.bl.fcen.uba.ar/Universidad públicaNo correspondehttps://digital.bl.fcen.uba.ar/cgi-bin/oaiserver.cgiana@bl.fcen.uba.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:18962025-09-29 13:43:01.594Biblioteca Digital (UBA-FCEN) - Universidad Nacional de Buenos Aires. Facultad de Ciencias Exactas y Naturalesfalse
dc.title.none.fl_str_mv Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations
title Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations
spellingShingle Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations
Duran, A.A.
Bandpass filters
Ducts
Efficiency
Housing
Magnetic fields
Magnetism
Vacuum applications
Vacuum technology
Coating surface morphologies
Ion saturation current
Ion transmission efficiency
Macro-particles
Macroparticle filter
Magnetic field line
Magnetic island
Plasma transport
Magnetoplasma
title_short Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations
title_full Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations
title_fullStr Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations
title_full_unstemmed Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations
title_sort Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations
dc.creator.none.fl_str_mv Duran, A.A.
Fazio, M.
Kleiman, A.
Giuliani, L.
Marquez, A.
Grondona, D.
author Duran, A.A.
author_facet Duran, A.A.
Fazio, M.
Kleiman, A.
Giuliani, L.
Marquez, A.
Grondona, D.
author_role author
author2 Fazio, M.
Kleiman, A.
Giuliani, L.
Marquez, A.
Grondona, D.
author2_role author
author
author
author
author
dc.subject.none.fl_str_mv Bandpass filters
Ducts
Efficiency
Housing
Magnetic fields
Magnetism
Vacuum applications
Vacuum technology
Coating surface morphologies
Ion saturation current
Ion transmission efficiency
Macro-particles
Macroparticle filter
Magnetic field line
Magnetic island
Plasma transport
Magnetoplasma
topic Bandpass filters
Ducts
Efficiency
Housing
Magnetic fields
Magnetism
Vacuum applications
Vacuum technology
Coating surface morphologies
Ion saturation current
Ion transmission efficiency
Macro-particles
Macroparticle filter
Magnetic field line
Magnetic island
Plasma transport
Magnetoplasma
dc.description.none.fl_txt_mv In the present work, we studied the efficiency of a magnetic island filter for two vacuum arc designs, pulsed and continuous. The magnetic island filter consisted in a straight duct with an external solenoid and a magnet enclosed in a housing (magnetic island) located inside the duct on its axis, and both magnetic fields are in opposite direction. The housing of the magnetic island obstructs the line of sight between the cathode and the substrate. In this arrangement, the charged plasma components move along the curved magnetic field lines, around the magnetic island, but the macroparticles move in straight paths and deposit on the wall of the magnetic island housing. The performance of the filter was characterized for different external and internal field strengths. The plasma transport efficiency was analyzed by measuring the ion saturation current with Langmuir probes and the deposited mass rate. The ion transmission efficiency around the system axis achieved values around 25%. Observation of the coating surface morphology with optical microscopy determined that the macroparticles were effectively removed.
Fil:Fazio, M. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.
Fil:Kleiman, A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.
Fil:Giuliani, L. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.
Fil:Marquez, A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.
Fil:Grondona, D. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina.
description In the present work, we studied the efficiency of a magnetic island filter for two vacuum arc designs, pulsed and continuous. The magnetic island filter consisted in a straight duct with an external solenoid and a magnet enclosed in a housing (magnetic island) located inside the duct on its axis, and both magnetic fields are in opposite direction. The housing of the magnetic island obstructs the line of sight between the cathode and the substrate. In this arrangement, the charged plasma components move along the curved magnetic field lines, around the magnetic island, but the macroparticles move in straight paths and deposit on the wall of the magnetic island housing. The performance of the filter was characterized for different external and internal field strengths. The plasma transport efficiency was analyzed by measuring the ion saturation current with Langmuir probes and the deposited mass rate. The ion transmission efficiency around the system axis achieved values around 25%. Observation of the coating surface morphology with optical microscopy determined that the macroparticles were effectively removed.
publishDate 2012
dc.date.none.fl_str_mv 2012
dc.type.none.fl_str_mv info:eu-repo/semantics/conferenceObject
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_5794
info:ar-repo/semantics/documentoDeConferencia
format conferenceObject
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/20.500.12110/paper_17426588_v370_n1_p_Duran
url http://hdl.handle.net/20.500.12110/paper_17426588_v370_n1_p_Duran
dc.language.none.fl_str_mv eng
language eng
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
http://creativecommons.org/licenses/by/2.5/ar
eu_rights_str_mv openAccess
rights_invalid_str_mv http://creativecommons.org/licenses/by/2.5/ar
dc.format.none.fl_str_mv application/pdf
dc.source.none.fl_str_mv J. Phys. Conf. Ser. 2012;370(1)
reponame:Biblioteca Digital (UBA-FCEN)
instname:Universidad Nacional de Buenos Aires. Facultad de Ciencias Exactas y Naturales
instacron:UBA-FCEN
reponame_str Biblioteca Digital (UBA-FCEN)
collection Biblioteca Digital (UBA-FCEN)
instname_str Universidad Nacional de Buenos Aires. Facultad de Ciencias Exactas y Naturales
instacron_str UBA-FCEN
institution UBA-FCEN
repository.name.fl_str_mv Biblioteca Digital (UBA-FCEN) - Universidad Nacional de Buenos Aires. Facultad de Ciencias Exactas y Naturales
repository.mail.fl_str_mv ana@bl.fcen.uba.ar
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