Integrated Constraint Programming Scheduling Approach for Automated Wet-Etch Stations in Semiconductor Manufacturing
- Autores
- Zeballos, Luis Javier; Castro, Pedro; Mendez, Carlos Alberto
- Año de publicación
- 2011
- Idioma
- inglés
- Tipo de recurso
- artículo
- Estado
- versión publicada
- Descripción
- This article addresses a challenging resource constrained flow shop scheduling problem from automated wetetch stations (AWSs) in wafer fabrication of semiconductor manufacturing facilities by means of a constraint programming (CP) methodology. Wet etching in wafer fabrication is a difficult process considering the material handling limitations and mixed intermediate policies. The proposed integrated approach consists of both a CP model and an efficient search strategy in order to handle the different features of the process. The domainspecific search strategy significantly improves the computational performance, a key aspect given the high combinatorial complexity of the problem. The search strategy objective is to avoid losing time due to early bad choices in the exploration and to produce good quality solutions with low computational effort. The applicability of the proposed integrated CP methodology is successfully tested with several examples taken from the literature, featuring a different number of jobs and baths.
Fil: Zeballos, Luis Javier. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química (i); Argentina
Fil: Castro, Pedro. Laborato´rio Nacional de Energia e Geologia; Portugal
Fil: Mendez, Carlos Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química (i); Argentina - Materia
-
Scheduling
Constraint Programming
Wet-Etch Station - Nivel de accesibilidad
- acceso abierto
- Condiciones de uso
- https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
- Repositorio
- Institución
- Consejo Nacional de Investigaciones Científicas y Técnicas
- OAI Identificador
- oai:ri.conicet.gov.ar:11336/13351
Ver los metadatos del registro completo
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Integrated Constraint Programming Scheduling Approach for Automated Wet-Etch Stations in Semiconductor ManufacturingZeballos, Luis JavierCastro, PedroMendez, Carlos AlbertoSchedulingConstraint ProgrammingWet-Etch Stationhttps://purl.org/becyt/ford/2.4https://purl.org/becyt/ford/2This article addresses a challenging resource constrained flow shop scheduling problem from automated wetetch stations (AWSs) in wafer fabrication of semiconductor manufacturing facilities by means of a constraint programming (CP) methodology. Wet etching in wafer fabrication is a difficult process considering the material handling limitations and mixed intermediate policies. The proposed integrated approach consists of both a CP model and an efficient search strategy in order to handle the different features of the process. The domainspecific search strategy significantly improves the computational performance, a key aspect given the high combinatorial complexity of the problem. The search strategy objective is to avoid losing time due to early bad choices in the exploration and to produce good quality solutions with low computational effort. The applicability of the proposed integrated CP methodology is successfully tested with several examples taken from the literature, featuring a different number of jobs and baths.Fil: Zeballos, Luis Javier. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química (i); ArgentinaFil: Castro, Pedro. Laborato´rio Nacional de Energia e Geologia; PortugalFil: Mendez, Carlos Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química (i); ArgentinaAmerican Chemical Society2011-03info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/13351Zeballos, Luis Javier; Castro, Pedro; Mendez, Carlos Alberto; Integrated Constraint Programming Scheduling Approach for Automated Wet-Etch Stations in Semiconductor Manufacturing; American Chemical Society; Industrial & Engineering Chemical Research; 50; 3; 3-2011; 1705-17150888-5885enginfo:eu-repo/semantics/altIdentifier/doi/10.1021/ie1016199info:eu-repo/semantics/altIdentifier/url/http://pubs.acs.org/doi/abs/10.1021/ie1016199info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-03T09:53:19Zoai:ri.conicet.gov.ar:11336/13351instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-03 09:53:20.122CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse |
dc.title.none.fl_str_mv |
Integrated Constraint Programming Scheduling Approach for Automated Wet-Etch Stations in Semiconductor Manufacturing |
title |
Integrated Constraint Programming Scheduling Approach for Automated Wet-Etch Stations in Semiconductor Manufacturing |
spellingShingle |
Integrated Constraint Programming Scheduling Approach for Automated Wet-Etch Stations in Semiconductor Manufacturing Zeballos, Luis Javier Scheduling Constraint Programming Wet-Etch Station |
title_short |
Integrated Constraint Programming Scheduling Approach for Automated Wet-Etch Stations in Semiconductor Manufacturing |
title_full |
Integrated Constraint Programming Scheduling Approach for Automated Wet-Etch Stations in Semiconductor Manufacturing |
title_fullStr |
Integrated Constraint Programming Scheduling Approach for Automated Wet-Etch Stations in Semiconductor Manufacturing |
title_full_unstemmed |
Integrated Constraint Programming Scheduling Approach for Automated Wet-Etch Stations in Semiconductor Manufacturing |
title_sort |
Integrated Constraint Programming Scheduling Approach for Automated Wet-Etch Stations in Semiconductor Manufacturing |
dc.creator.none.fl_str_mv |
Zeballos, Luis Javier Castro, Pedro Mendez, Carlos Alberto |
author |
Zeballos, Luis Javier |
author_facet |
Zeballos, Luis Javier Castro, Pedro Mendez, Carlos Alberto |
author_role |
author |
author2 |
Castro, Pedro Mendez, Carlos Alberto |
author2_role |
author author |
dc.subject.none.fl_str_mv |
Scheduling Constraint Programming Wet-Etch Station |
topic |
Scheduling Constraint Programming Wet-Etch Station |
purl_subject.fl_str_mv |
https://purl.org/becyt/ford/2.4 https://purl.org/becyt/ford/2 |
dc.description.none.fl_txt_mv |
This article addresses a challenging resource constrained flow shop scheduling problem from automated wetetch stations (AWSs) in wafer fabrication of semiconductor manufacturing facilities by means of a constraint programming (CP) methodology. Wet etching in wafer fabrication is a difficult process considering the material handling limitations and mixed intermediate policies. The proposed integrated approach consists of both a CP model and an efficient search strategy in order to handle the different features of the process. The domainspecific search strategy significantly improves the computational performance, a key aspect given the high combinatorial complexity of the problem. The search strategy objective is to avoid losing time due to early bad choices in the exploration and to produce good quality solutions with low computational effort. The applicability of the proposed integrated CP methodology is successfully tested with several examples taken from the literature, featuring a different number of jobs and baths. Fil: Zeballos, Luis Javier. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química (i); Argentina Fil: Castro, Pedro. Laborato´rio Nacional de Energia e Geologia; Portugal Fil: Mendez, Carlos Alberto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Desarrollo Tecnológico para la Industria Química (i); Argentina |
description |
This article addresses a challenging resource constrained flow shop scheduling problem from automated wetetch stations (AWSs) in wafer fabrication of semiconductor manufacturing facilities by means of a constraint programming (CP) methodology. Wet etching in wafer fabrication is a difficult process considering the material handling limitations and mixed intermediate policies. The proposed integrated approach consists of both a CP model and an efficient search strategy in order to handle the different features of the process. The domainspecific search strategy significantly improves the computational performance, a key aspect given the high combinatorial complexity of the problem. The search strategy objective is to avoid losing time due to early bad choices in the exploration and to produce good quality solutions with low computational effort. The applicability of the proposed integrated CP methodology is successfully tested with several examples taken from the literature, featuring a different number of jobs and baths. |
publishDate |
2011 |
dc.date.none.fl_str_mv |
2011-03 |
dc.type.none.fl_str_mv |
info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion http://purl.org/coar/resource_type/c_6501 info:ar-repo/semantics/articulo |
format |
article |
status_str |
publishedVersion |
dc.identifier.none.fl_str_mv |
http://hdl.handle.net/11336/13351 Zeballos, Luis Javier; Castro, Pedro; Mendez, Carlos Alberto; Integrated Constraint Programming Scheduling Approach for Automated Wet-Etch Stations in Semiconductor Manufacturing; American Chemical Society; Industrial & Engineering Chemical Research; 50; 3; 3-2011; 1705-1715 0888-5885 |
url |
http://hdl.handle.net/11336/13351 |
identifier_str_mv |
Zeballos, Luis Javier; Castro, Pedro; Mendez, Carlos Alberto; Integrated Constraint Programming Scheduling Approach for Automated Wet-Etch Stations in Semiconductor Manufacturing; American Chemical Society; Industrial & Engineering Chemical Research; 50; 3; 3-2011; 1705-1715 0888-5885 |
dc.language.none.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
info:eu-repo/semantics/altIdentifier/doi/10.1021/ie1016199 info:eu-repo/semantics/altIdentifier/url/http://pubs.acs.org/doi/abs/10.1021/ie1016199 |
dc.rights.none.fl_str_mv |
info:eu-repo/semantics/openAccess https://creativecommons.org/licenses/by-nc-sa/2.5/ar/ |
eu_rights_str_mv |
openAccess |
rights_invalid_str_mv |
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/ |
dc.format.none.fl_str_mv |
application/pdf application/pdf application/pdf |
dc.publisher.none.fl_str_mv |
American Chemical Society |
publisher.none.fl_str_mv |
American Chemical Society |
dc.source.none.fl_str_mv |
reponame:CONICET Digital (CONICET) instname:Consejo Nacional de Investigaciones Científicas y Técnicas |
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CONICET Digital (CONICET) |
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CONICET Digital (CONICET) |
instname_str |
Consejo Nacional de Investigaciones Científicas y Técnicas |
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CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas |
repository.mail.fl_str_mv |
dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar |
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1842269217185857536 |
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13.13397 |