Ultra-fast direct growth of metallic micro- and nano-structures by focused ion beam irradiation

Autores
Córdoba, Rosa; Orús Calvet, Pablo; Strohauer, Stefan; Torres Molina, Teobaldo Enrique; De Teresa, José María
Año de publicación
2019
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
An ultra-fast method to directly grow metallic micro- and nano-structures is introduced. It relies on a Focused Ion Beam (FIB) and a condensed layer of suitable precursor material formed on the substrate under cryogenic conditions. The technique implies cooling the substrate below the condensation temperature of the gaseous precursor material, subsequently irradiating with ions according to the wanted pattern, and posteriorly heating the substrate above the condensation temperature. Here, using W(CO)6 as the precursor material, a Ga+ FIB, and a substrate temperature of −100 °C, W-C metallic layers and nanowires with resolution down to 38 nm have been grown by Cryogenic Focused Ion Beam Induced Deposition (Cryo-FIBID). The most important advantages of Cryo-FIBID are the fast growth rate (about 600 times higher than conventional FIBID with the precursor material in gas phase) and the low ion irradiation dose required (∼50 μC/cm2), which gives rise to very low Ga concentrations in the grown material and in the substrate (≤0.2%). Electrical measurements indicate that W-C layers and nanowires grown by Cryo-FIBID exhibit metallic resistivity. These features pave the way for the use of Cryo-FIBID in various applications in micro- and nano-lithography such as circuit editing, photomask repair, hard masks, and the growth of nanowires and contacts. As a proof of concept, we show the use of Cryo-FIBID to grow metallic contacts on a Pt-C nanowire and investigate its transport properties. The contacts have been grown in less than one minute, which is considerably faster than the time needed to grow the same contacts with conventional FIBID, around 10 hours.
Fil: Córdoba, Rosa. Universidad de Valencia; España. Universidad de Zaragoza; España
Fil: Orús Calvet, Pablo. Universidad de Zaragoza; España
Fil: Strohauer, Stefan. Universitat Technical Zu Munich; Alemania. Universidad de Zaragoza; España
Fil: Torres Molina, Teobaldo Enrique. Universidad de Zaragoza; España. Comisión Nacional de Energía Atómica. Unidad Ejecutora Instituto de Nanociencia y Nanotecnología. - Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Ciudad Universitaria. Unidad Ejecutora Instituto de Nanociencia y Nanotecnología; Argentina
Fil: De Teresa, José María. Universidad de Zaragoza; España. Consejo Superior de Investigaciones Científicas; España
Materia
CRYO-FIB
NANODEPOSITOS
FIBID
NANOTECNOLOGIA
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/123812
Acceder
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oai_identifier_str oai:ri.conicet.gov.ar:11336/123812
network_acronym_str CONICETDig
repository_id_str 3498
network_name_str CONICET Digital (CONICET)
spelling Ultra-fast direct growth of metallic micro- and nano-structures by focused ion beam irradiationCórdoba, RosaOrús Calvet, PabloStrohauer, StefanTorres Molina, Teobaldo EnriqueDe Teresa, José MaríaCRYO-FIBNANODEPOSITOSFIBIDNANOTECNOLOGIAhttps://purl.org/becyt/ford/1.3https://purl.org/becyt/ford/1An ultra-fast method to directly grow metallic micro- and nano-structures is introduced. It relies on a Focused Ion Beam (FIB) and a condensed layer of suitable precursor material formed on the substrate under cryogenic conditions. The technique implies cooling the substrate below the condensation temperature of the gaseous precursor material, subsequently irradiating with ions according to the wanted pattern, and posteriorly heating the substrate above the condensation temperature. Here, using W(CO)6 as the precursor material, a Ga+ FIB, and a substrate temperature of −100 °C, W-C metallic layers and nanowires with resolution down to 38 nm have been grown by Cryogenic Focused Ion Beam Induced Deposition (Cryo-FIBID). The most important advantages of Cryo-FIBID are the fast growth rate (about 600 times higher than conventional FIBID with the precursor material in gas phase) and the low ion irradiation dose required (∼50 μC/cm2), which gives rise to very low Ga concentrations in the grown material and in the substrate (≤0.2%). Electrical measurements indicate that W-C layers and nanowires grown by Cryo-FIBID exhibit metallic resistivity. These features pave the way for the use of Cryo-FIBID in various applications in micro- and nano-lithography such as circuit editing, photomask repair, hard masks, and the growth of nanowires and contacts. As a proof of concept, we show the use of Cryo-FIBID to grow metallic contacts on a Pt-C nanowire and investigate its transport properties. The contacts have been grown in less than one minute, which is considerably faster than the time needed to grow the same contacts with conventional FIBID, around 10 hours.Fil: Córdoba, Rosa. Universidad de Valencia; España. Universidad de Zaragoza; EspañaFil: Orús Calvet, Pablo. Universidad de Zaragoza; EspañaFil: Strohauer, Stefan. Universitat Technical Zu Munich; Alemania. Universidad de Zaragoza; EspañaFil: Torres Molina, Teobaldo Enrique. Universidad de Zaragoza; España. Comisión Nacional de Energía Atómica. Unidad Ejecutora Instituto de Nanociencia y Nanotecnología. - Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Ciudad Universitaria. Unidad Ejecutora Instituto de Nanociencia y Nanotecnología; ArgentinaFil: De Teresa, José María. Universidad de Zaragoza; España. Consejo Superior de Investigaciones Científicas; EspañaNature Publishing Group2019-10-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/123812Córdoba, Rosa; Orús Calvet, Pablo; Strohauer, Stefan; Torres Molina, Teobaldo Enrique; De Teresa, José María; Ultra-fast direct growth of metallic micro- and nano-structures by focused ion beam irradiation; Nature Publishing Group; Scientific Reports; 9; 1; 1-10-2019; 1-102045-2322CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/doi/10.1038/s41598-019-50411-winfo:eu-repo/semantics/altIdentifier/url/https://www.nature.com/articles/s41598-019-50411-winfo:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-29T10:15:57Zoai:ri.conicet.gov.ar:11336/123812instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-29 10:15:57.799CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv Ultra-fast direct growth of metallic micro- and nano-structures by focused ion beam irradiation
title Ultra-fast direct growth of metallic micro- and nano-structures by focused ion beam irradiation
spellingShingle Ultra-fast direct growth of metallic micro- and nano-structures by focused ion beam irradiation
Córdoba, Rosa
CRYO-FIB
NANODEPOSITOS
FIBID
NANOTECNOLOGIA
title_short Ultra-fast direct growth of metallic micro- and nano-structures by focused ion beam irradiation
title_full Ultra-fast direct growth of metallic micro- and nano-structures by focused ion beam irradiation
title_fullStr Ultra-fast direct growth of metallic micro- and nano-structures by focused ion beam irradiation
title_full_unstemmed Ultra-fast direct growth of metallic micro- and nano-structures by focused ion beam irradiation
title_sort Ultra-fast direct growth of metallic micro- and nano-structures by focused ion beam irradiation
dc.creator.none.fl_str_mv Córdoba, Rosa
Orús Calvet, Pablo
Strohauer, Stefan
Torres Molina, Teobaldo Enrique
De Teresa, José María
author Córdoba, Rosa
author_facet Córdoba, Rosa
Orús Calvet, Pablo
Strohauer, Stefan
Torres Molina, Teobaldo Enrique
De Teresa, José María
author_role author
author2 Orús Calvet, Pablo
Strohauer, Stefan
Torres Molina, Teobaldo Enrique
De Teresa, José María
author2_role author
author
author
author
dc.subject.none.fl_str_mv CRYO-FIB
NANODEPOSITOS
FIBID
NANOTECNOLOGIA
topic CRYO-FIB
NANODEPOSITOS
FIBID
NANOTECNOLOGIA
purl_subject.fl_str_mv https://purl.org/becyt/ford/1.3
https://purl.org/becyt/ford/1
dc.description.none.fl_txt_mv An ultra-fast method to directly grow metallic micro- and nano-structures is introduced. It relies on a Focused Ion Beam (FIB) and a condensed layer of suitable precursor material formed on the substrate under cryogenic conditions. The technique implies cooling the substrate below the condensation temperature of the gaseous precursor material, subsequently irradiating with ions according to the wanted pattern, and posteriorly heating the substrate above the condensation temperature. Here, using W(CO)6 as the precursor material, a Ga+ FIB, and a substrate temperature of −100 °C, W-C metallic layers and nanowires with resolution down to 38 nm have been grown by Cryogenic Focused Ion Beam Induced Deposition (Cryo-FIBID). The most important advantages of Cryo-FIBID are the fast growth rate (about 600 times higher than conventional FIBID with the precursor material in gas phase) and the low ion irradiation dose required (∼50 μC/cm2), which gives rise to very low Ga concentrations in the grown material and in the substrate (≤0.2%). Electrical measurements indicate that W-C layers and nanowires grown by Cryo-FIBID exhibit metallic resistivity. These features pave the way for the use of Cryo-FIBID in various applications in micro- and nano-lithography such as circuit editing, photomask repair, hard masks, and the growth of nanowires and contacts. As a proof of concept, we show the use of Cryo-FIBID to grow metallic contacts on a Pt-C nanowire and investigate its transport properties. The contacts have been grown in less than one minute, which is considerably faster than the time needed to grow the same contacts with conventional FIBID, around 10 hours.
Fil: Córdoba, Rosa. Universidad de Valencia; España. Universidad de Zaragoza; España
Fil: Orús Calvet, Pablo. Universidad de Zaragoza; España
Fil: Strohauer, Stefan. Universitat Technical Zu Munich; Alemania. Universidad de Zaragoza; España
Fil: Torres Molina, Teobaldo Enrique. Universidad de Zaragoza; España. Comisión Nacional de Energía Atómica. Unidad Ejecutora Instituto de Nanociencia y Nanotecnología. - Consejo Nacional de Investigaciones Científicas y Técnicas. Oficina de Coordinación Administrativa Ciudad Universitaria. Unidad Ejecutora Instituto de Nanociencia y Nanotecnología; Argentina
Fil: De Teresa, José María. Universidad de Zaragoza; España. Consejo Superior de Investigaciones Científicas; España
description An ultra-fast method to directly grow metallic micro- and nano-structures is introduced. It relies on a Focused Ion Beam (FIB) and a condensed layer of suitable precursor material formed on the substrate under cryogenic conditions. The technique implies cooling the substrate below the condensation temperature of the gaseous precursor material, subsequently irradiating with ions according to the wanted pattern, and posteriorly heating the substrate above the condensation temperature. Here, using W(CO)6 as the precursor material, a Ga+ FIB, and a substrate temperature of −100 °C, W-C metallic layers and nanowires with resolution down to 38 nm have been grown by Cryogenic Focused Ion Beam Induced Deposition (Cryo-FIBID). The most important advantages of Cryo-FIBID are the fast growth rate (about 600 times higher than conventional FIBID with the precursor material in gas phase) and the low ion irradiation dose required (∼50 μC/cm2), which gives rise to very low Ga concentrations in the grown material and in the substrate (≤0.2%). Electrical measurements indicate that W-C layers and nanowires grown by Cryo-FIBID exhibit metallic resistivity. These features pave the way for the use of Cryo-FIBID in various applications in micro- and nano-lithography such as circuit editing, photomask repair, hard masks, and the growth of nanowires and contacts. As a proof of concept, we show the use of Cryo-FIBID to grow metallic contacts on a Pt-C nanowire and investigate its transport properties. The contacts have been grown in less than one minute, which is considerably faster than the time needed to grow the same contacts with conventional FIBID, around 10 hours.
publishDate 2019
dc.date.none.fl_str_mv 2019-10-01
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/123812
Córdoba, Rosa; Orús Calvet, Pablo; Strohauer, Stefan; Torres Molina, Teobaldo Enrique; De Teresa, José María; Ultra-fast direct growth of metallic micro- and nano-structures by focused ion beam irradiation; Nature Publishing Group; Scientific Reports; 9; 1; 1-10-2019; 1-10
2045-2322
CONICET Digital
CONICET
url http://hdl.handle.net/11336/123812
identifier_str_mv Córdoba, Rosa; Orús Calvet, Pablo; Strohauer, Stefan; Torres Molina, Teobaldo Enrique; De Teresa, José María; Ultra-fast direct growth of metallic micro- and nano-structures by focused ion beam irradiation; Nature Publishing Group; Scientific Reports; 9; 1; 1-10-2019; 1-10
2045-2322
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/doi/10.1038/s41598-019-50411-w
info:eu-repo/semantics/altIdentifier/url/https://www.nature.com/articles/s41598-019-50411-w
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
dc.publisher.none.fl_str_mv Nature Publishing Group
publisher.none.fl_str_mv Nature Publishing Group
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
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score 13.070432

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