Tilt scanning interferometry: A numerical simulation benchmark for 3D metrology

Autores
Galizzi, Gustavo Ernesto; Ruiz, Pablo D.; Kaufmann, Guillermo Hector
Año de publicación
2009
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
Tilt scanning interferometry (TSI) is a novel experimental technique that allows the measurement of multicomponent displacement fields inside the volume of a sample. In this paper, we present a simulation model that allows for the evaluation of the speckle fields recorded in TSI when this technique is applied to the analysis of semitransparent scattering materials. The simulation is based on the convolution of the optical impulsive response of the optical system and the incident field amplitude. Different sections of the simulated imaging system are identified and the corresponding optical impulsive responses are determined. To evaluate the performance of the proposed model, a known internal displacement field as well as the illumination and detection strategies in a real TSI system are numerically simulated. Then, the corresponding depth-resolved out-of-plane and in-plane changes of phase are obtained by means of the data processing algorithm implemented in a TSI system.
Fil: Galizzi, Gustavo Ernesto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina. University of Loughborough; Reino Unido
Fil: Ruiz, Pablo D.. University of Loughborough; Reino Unido
Fil: Kaufmann, Guillermo Hector. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Centro Internacional Franco Argentino de Ciencias de la Información y de Sistemas. Universidad Nacional de Rosario. Centro Internacional Franco Argentino de Ciencias de la Información y de Sistemas; Argentina
Materia
Speckle interferometry
3D displacement measurement
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/118481
Acceder
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spelling Tilt scanning interferometry: A numerical simulation benchmark for 3D metrologyGalizzi, Gustavo ErnestoRuiz, Pablo D.Kaufmann, Guillermo HectorSpeckle interferometry3D displacement measurementhttps://purl.org/becyt/ford/2.11https://purl.org/becyt/ford/2Tilt scanning interferometry (TSI) is a novel experimental technique that allows the measurement of multicomponent displacement fields inside the volume of a sample. In this paper, we present a simulation model that allows for the evaluation of the speckle fields recorded in TSI when this technique is applied to the analysis of semitransparent scattering materials. The simulation is based on the convolution of the optical impulsive response of the optical system and the incident field amplitude. Different sections of the simulated imaging system are identified and the corresponding optical impulsive responses are determined. To evaluate the performance of the proposed model, a known internal displacement field as well as the illumination and detection strategies in a real TSI system are numerically simulated. Then, the corresponding depth-resolved out-of-plane and in-plane changes of phase are obtained by means of the data processing algorithm implemented in a TSI system.Fil: Galizzi, Gustavo Ernesto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina. University of Loughborough; Reino UnidoFil: Ruiz, Pablo D.. University of Loughborough; Reino UnidoFil: Kaufmann, Guillermo Hector. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Centro Internacional Franco Argentino de Ciencias de la Información y de Sistemas. Universidad Nacional de Rosario. Centro Internacional Franco Argentino de Ciencias de la Información y de Sistemas; ArgentinaOptical Society of America2009-06info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/118481Galizzi, Gustavo Ernesto; Ruiz, Pablo D.; Kaufmann, Guillermo Hector; Tilt scanning interferometry: A numerical simulation benchmark for 3D metrology; Optical Society of America; Applied Optics; 48; 17; 6-2009; 3184-31910003-69351539-4522CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/url/https://www.osapublishing.org/ao/abstract.cfm?uri=ao-48-17-3184info:eu-repo/semantics/altIdentifier/doi/10.1364/AO.48.003184info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-10-15T15:05:52Zoai:ri.conicet.gov.ar:11336/118481instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-10-15 15:05:52.625CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv Tilt scanning interferometry: A numerical simulation benchmark for 3D metrology
title Tilt scanning interferometry: A numerical simulation benchmark for 3D metrology
spellingShingle Tilt scanning interferometry: A numerical simulation benchmark for 3D metrology
Galizzi, Gustavo Ernesto
Speckle interferometry
3D displacement measurement
title_short Tilt scanning interferometry: A numerical simulation benchmark for 3D metrology
title_full Tilt scanning interferometry: A numerical simulation benchmark for 3D metrology
title_fullStr Tilt scanning interferometry: A numerical simulation benchmark for 3D metrology
title_full_unstemmed Tilt scanning interferometry: A numerical simulation benchmark for 3D metrology
title_sort Tilt scanning interferometry: A numerical simulation benchmark for 3D metrology
dc.creator.none.fl_str_mv Galizzi, Gustavo Ernesto
Ruiz, Pablo D.
Kaufmann, Guillermo Hector
author Galizzi, Gustavo Ernesto
author_facet Galizzi, Gustavo Ernesto
Ruiz, Pablo D.
Kaufmann, Guillermo Hector
author_role author
author2 Ruiz, Pablo D.
Kaufmann, Guillermo Hector
author2_role author
author
dc.subject.none.fl_str_mv Speckle interferometry
3D displacement measurement
topic Speckle interferometry
3D displacement measurement
purl_subject.fl_str_mv https://purl.org/becyt/ford/2.11
https://purl.org/becyt/ford/2
dc.description.none.fl_txt_mv Tilt scanning interferometry (TSI) is a novel experimental technique that allows the measurement of multicomponent displacement fields inside the volume of a sample. In this paper, we present a simulation model that allows for the evaluation of the speckle fields recorded in TSI when this technique is applied to the analysis of semitransparent scattering materials. The simulation is based on the convolution of the optical impulsive response of the optical system and the incident field amplitude. Different sections of the simulated imaging system are identified and the corresponding optical impulsive responses are determined. To evaluate the performance of the proposed model, a known internal displacement field as well as the illumination and detection strategies in a real TSI system are numerically simulated. Then, the corresponding depth-resolved out-of-plane and in-plane changes of phase are obtained by means of the data processing algorithm implemented in a TSI system.
Fil: Galizzi, Gustavo Ernesto. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina. University of Loughborough; Reino Unido
Fil: Ruiz, Pablo D.. University of Loughborough; Reino Unido
Fil: Kaufmann, Guillermo Hector. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Centro Internacional Franco Argentino de Ciencias de la Información y de Sistemas. Universidad Nacional de Rosario. Centro Internacional Franco Argentino de Ciencias de la Información y de Sistemas; Argentina
description Tilt scanning interferometry (TSI) is a novel experimental technique that allows the measurement of multicomponent displacement fields inside the volume of a sample. In this paper, we present a simulation model that allows for the evaluation of the speckle fields recorded in TSI when this technique is applied to the analysis of semitransparent scattering materials. The simulation is based on the convolution of the optical impulsive response of the optical system and the incident field amplitude. Different sections of the simulated imaging system are identified and the corresponding optical impulsive responses are determined. To evaluate the performance of the proposed model, a known internal displacement field as well as the illumination and detection strategies in a real TSI system are numerically simulated. Then, the corresponding depth-resolved out-of-plane and in-plane changes of phase are obtained by means of the data processing algorithm implemented in a TSI system.
publishDate 2009
dc.date.none.fl_str_mv 2009-06
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/118481
Galizzi, Gustavo Ernesto; Ruiz, Pablo D.; Kaufmann, Guillermo Hector; Tilt scanning interferometry: A numerical simulation benchmark for 3D metrology; Optical Society of America; Applied Optics; 48; 17; 6-2009; 3184-3191
0003-6935
1539-4522
CONICET Digital
CONICET
url http://hdl.handle.net/11336/118481
identifier_str_mv Galizzi, Gustavo Ernesto; Ruiz, Pablo D.; Kaufmann, Guillermo Hector; Tilt scanning interferometry: A numerical simulation benchmark for 3D metrology; Optical Society of America; Applied Optics; 48; 17; 6-2009; 3184-3191
0003-6935
1539-4522
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/url/https://www.osapublishing.org/ao/abstract.cfm?uri=ao-48-17-3184
info:eu-repo/semantics/altIdentifier/doi/10.1364/AO.48.003184
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
application/pdf
dc.publisher.none.fl_str_mv Optical Society of America
publisher.none.fl_str_mv Optical Society of America
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
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score 13.22299

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