Microdomain orientation dependence on thickness in thin films of cylinder-forming PS-b-PMMA

Autores
Zucchi, Ileana Alicia; Poliani, Emanuele; Perego, Michele
Año de publicación
2010
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
The self-assembly of block-copolymer thin films in periodic nanostructures has received considerable attention during the last decade due to their potential applications in nanofabrication and nanolithography. We followed the morphologies developed in thin films of a cylinder-forming diblock copolymer polystyrene-b-poly(methylmethacrylate) ((PS-b-PMMA), PS 46.1 kg mol−1, PMMA 21.0 kg mol−1, lattice spacing L0 = 36 nm), as a function of the film thickness (t), analyzing the effect of thickness commensurability on domain orientation in respect to the substrate. The study was circumscribed to the unexplored range of thickness below L0. Two thickness windows with perpendicular orientation of the PMMA domains were identified: a well-known window at t ~ L0 and a new window at t ~L0/2. A half-parallel cylinder morphology was observed for t ~ ¾ L0 with a progressive change in morphology C┴ → C|| → C┴ when thickness increases from L0/2 to L0. This experimental evidence provides new insights on the mechanism of block copolymers self-organization and indicates the possibility to tune the thickness of the nanostructured polymeric film below L0, allowing the fabrication of ultrathin soft masks for advanced lithographic processes.
Fil: Zucchi, Ileana Alicia. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Mar del Plata. Instituto de Investigaciones en Ciencia y Tecnología de Materiales. Universidad Nacional de Mar del Plata. Facultad de Ingeniería. Instituto de Investigaciones en Ciencia y Tecnología de Materiales; Argentina. Istituto Nazionale per la Fisica della Materia; Italia
Fil: Poliani, Emanuele. Istituto Nazionale per la Fisica della Materia; Italia
Fil: Perego, Michele. Istituto Nazionale per la Fisica della Materia; Italia
Materia
Block-Copolymer
Thin Films
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/22997
Acceder
id CONICETDig_506f18900a9efd8704284569c188f622
oai_identifier_str oai:ri.conicet.gov.ar:11336/22997
network_acronym_str CONICETDig
repository_id_str 3498
network_name_str CONICET Digital (CONICET)
spelling Microdomain orientation dependence on thickness in thin films of cylinder-forming PS-b-PMMAZucchi, Ileana AliciaPoliani, EmanuelePerego, MicheleBlock-CopolymerThin Filmshttps://purl.org/becyt/ford/2.10https://purl.org/becyt/ford/2The self-assembly of block-copolymer thin films in periodic nanostructures has received considerable attention during the last decade due to their potential applications in nanofabrication and nanolithography. We followed the morphologies developed in thin films of a cylinder-forming diblock copolymer polystyrene-b-poly(methylmethacrylate) ((PS-b-PMMA), PS 46.1 kg mol−1, PMMA 21.0 kg mol−1, lattice spacing L0 = 36 nm), as a function of the film thickness (t), analyzing the effect of thickness commensurability on domain orientation in respect to the substrate. The study was circumscribed to the unexplored range of thickness below L0. Two thickness windows with perpendicular orientation of the PMMA domains were identified: a well-known window at t ~ L0 and a new window at t ~L0/2. A half-parallel cylinder morphology was observed for t ~ ¾ L0 with a progressive change in morphology C┴ → C|| → C┴ when thickness increases from L0/2 to L0. This experimental evidence provides new insights on the mechanism of block copolymers self-organization and indicates the possibility to tune the thickness of the nanostructured polymeric film below L0, allowing the fabrication of ultrathin soft masks for advanced lithographic processes.Fil: Zucchi, Ileana Alicia. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Mar del Plata. Instituto de Investigaciones en Ciencia y Tecnología de Materiales. Universidad Nacional de Mar del Plata. Facultad de Ingeniería. Instituto de Investigaciones en Ciencia y Tecnología de Materiales; Argentina. Istituto Nazionale per la Fisica della Materia; ItaliaFil: Poliani, Emanuele. Istituto Nazionale per la Fisica della Materia; ItaliaFil: Perego, Michele. Istituto Nazionale per la Fisica della Materia; ItaliaIop Publishing2010-04-09info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/22997Zucchi, Ileana Alicia; Poliani, Emanuele; Perego, Michele; Microdomain orientation dependence on thickness in thin films of cylinder-forming PS-b-PMMA; Iop Publishing; Nanotechnology; 21; 18; 9-4-2010; 185304-1853040957-4484CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/url/http://iopscience.iop.org/article/10.1088/0957-4484/21/18/185304/metainfo:eu-repo/semantics/altIdentifier/doi/10.1088/0957-4484/21/18/185304info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-09-03T09:52:03Zoai:ri.conicet.gov.ar:11336/22997instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-09-03 09:52:03.561CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv Microdomain orientation dependence on thickness in thin films of cylinder-forming PS-b-PMMA
title Microdomain orientation dependence on thickness in thin films of cylinder-forming PS-b-PMMA
spellingShingle Microdomain orientation dependence on thickness in thin films of cylinder-forming PS-b-PMMA
Zucchi, Ileana Alicia
Block-Copolymer
Thin Films
title_short Microdomain orientation dependence on thickness in thin films of cylinder-forming PS-b-PMMA
title_full Microdomain orientation dependence on thickness in thin films of cylinder-forming PS-b-PMMA
title_fullStr Microdomain orientation dependence on thickness in thin films of cylinder-forming PS-b-PMMA
title_full_unstemmed Microdomain orientation dependence on thickness in thin films of cylinder-forming PS-b-PMMA
title_sort Microdomain orientation dependence on thickness in thin films of cylinder-forming PS-b-PMMA
dc.creator.none.fl_str_mv Zucchi, Ileana Alicia
Poliani, Emanuele
Perego, Michele
author Zucchi, Ileana Alicia
author_facet Zucchi, Ileana Alicia
Poliani, Emanuele
Perego, Michele
author_role author
author2 Poliani, Emanuele
Perego, Michele
author2_role author
author
dc.subject.none.fl_str_mv Block-Copolymer
Thin Films
topic Block-Copolymer
Thin Films
purl_subject.fl_str_mv https://purl.org/becyt/ford/2.10
https://purl.org/becyt/ford/2
dc.description.none.fl_txt_mv The self-assembly of block-copolymer thin films in periodic nanostructures has received considerable attention during the last decade due to their potential applications in nanofabrication and nanolithography. We followed the morphologies developed in thin films of a cylinder-forming diblock copolymer polystyrene-b-poly(methylmethacrylate) ((PS-b-PMMA), PS 46.1 kg mol−1, PMMA 21.0 kg mol−1, lattice spacing L0 = 36 nm), as a function of the film thickness (t), analyzing the effect of thickness commensurability on domain orientation in respect to the substrate. The study was circumscribed to the unexplored range of thickness below L0. Two thickness windows with perpendicular orientation of the PMMA domains were identified: a well-known window at t ~ L0 and a new window at t ~L0/2. A half-parallel cylinder morphology was observed for t ~ ¾ L0 with a progressive change in morphology C┴ → C|| → C┴ when thickness increases from L0/2 to L0. This experimental evidence provides new insights on the mechanism of block copolymers self-organization and indicates the possibility to tune the thickness of the nanostructured polymeric film below L0, allowing the fabrication of ultrathin soft masks for advanced lithographic processes.
Fil: Zucchi, Ileana Alicia. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Mar del Plata. Instituto de Investigaciones en Ciencia y Tecnología de Materiales. Universidad Nacional de Mar del Plata. Facultad de Ingeniería. Instituto de Investigaciones en Ciencia y Tecnología de Materiales; Argentina. Istituto Nazionale per la Fisica della Materia; Italia
Fil: Poliani, Emanuele. Istituto Nazionale per la Fisica della Materia; Italia
Fil: Perego, Michele. Istituto Nazionale per la Fisica della Materia; Italia
description The self-assembly of block-copolymer thin films in periodic nanostructures has received considerable attention during the last decade due to their potential applications in nanofabrication and nanolithography. We followed the morphologies developed in thin films of a cylinder-forming diblock copolymer polystyrene-b-poly(methylmethacrylate) ((PS-b-PMMA), PS 46.1 kg mol−1, PMMA 21.0 kg mol−1, lattice spacing L0 = 36 nm), as a function of the film thickness (t), analyzing the effect of thickness commensurability on domain orientation in respect to the substrate. The study was circumscribed to the unexplored range of thickness below L0. Two thickness windows with perpendicular orientation of the PMMA domains were identified: a well-known window at t ~ L0 and a new window at t ~L0/2. A half-parallel cylinder morphology was observed for t ~ ¾ L0 with a progressive change in morphology C┴ → C|| → C┴ when thickness increases from L0/2 to L0. This experimental evidence provides new insights on the mechanism of block copolymers self-organization and indicates the possibility to tune the thickness of the nanostructured polymeric film below L0, allowing the fabrication of ultrathin soft masks for advanced lithographic processes.
publishDate 2010
dc.date.none.fl_str_mv 2010-04-09
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/22997
Zucchi, Ileana Alicia; Poliani, Emanuele; Perego, Michele; Microdomain orientation dependence on thickness in thin films of cylinder-forming PS-b-PMMA; Iop Publishing; Nanotechnology; 21; 18; 9-4-2010; 185304-185304
0957-4484
CONICET Digital
CONICET
url http://hdl.handle.net/11336/22997
identifier_str_mv Zucchi, Ileana Alicia; Poliani, Emanuele; Perego, Michele; Microdomain orientation dependence on thickness in thin films of cylinder-forming PS-b-PMMA; Iop Publishing; Nanotechnology; 21; 18; 9-4-2010; 185304-185304
0957-4484
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/url/http://iopscience.iop.org/article/10.1088/0957-4484/21/18/185304/meta
info:eu-repo/semantics/altIdentifier/doi/10.1088/0957-4484/21/18/185304
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
dc.publisher.none.fl_str_mv Iop Publishing
publisher.none.fl_str_mv Iop Publishing
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
_version_ 1842269133103693824
score 13.13397

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