On the influence of metastable states and the behavior of the EEDF in the characterization of the negative glow of a N2-Ar discharge by OES

Autores
Isola, Lucio Manuel; López, Maia Melina; Gomez, Bernardo Jose Armando; Guerra, Vasco
Año de publicación
2014
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
Optical emission spectroscopy (OES) is an essential diagnostic technique in many plasma systems, such as those used for surface treatments or fabrication of thin films. Despite the simplicity of application of OES, its interpretation is not straightforward. In particular, it requires the use of models, which due to the complexity and variety of discharge conditions, have not yet been fully understood [1]–[3]. In addition, Langmuir probes have been widely used to characterize plasmas. They allow the measurement of several parameters of interest, such as the electron density and temperature, as well as the determination of the electron energy distribution function (EEDF) by numerical derivation of the characteristic V − I [4] or by probe-current modulation [5]. In this work, some second positive system bands in the negative glow of an Ar-N2 plasma at a pressure of 2.5 Torr were investigated both by OES and Langmuir probes, for different mixture concentrations. The main purpose of this study was to verify how metastable states and the behavior of the EEDF may influence the interpretation of OES data
Fil: Isola, Lucio Manuel. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
Fil: López, Maia Melina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
Fil: Gomez, Bernardo Jose Armando. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
Fil: Guerra, Vasco. Instituto Superior Tecnico; Portugal
Materia
PLASMA
OPTICAL EMISSION SPECTROSCOPY
Ar-N2
NEGATIVE GLOW
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/29799
Acceder
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spelling On the influence of metastable states and the behavior of the EEDF in the characterization of the negative glow of a N2-Ar discharge by OESIsola, Lucio ManuelLópez, Maia MelinaGomez, Bernardo Jose ArmandoGuerra, VascoPLASMAOPTICAL EMISSION SPECTROSCOPYAr-N2NEGATIVE GLOWhttps://purl.org/becyt/ford/1.3https://purl.org/becyt/ford/1Optical emission spectroscopy (OES) is an essential diagnostic technique in many plasma systems, such as those used for surface treatments or fabrication of thin films. Despite the simplicity of application of OES, its interpretation is not straightforward. In particular, it requires the use of models, which due to the complexity and variety of discharge conditions, have not yet been fully understood [1]–[3]. In addition, Langmuir probes have been widely used to characterize plasmas. They allow the measurement of several parameters of interest, such as the electron density and temperature, as well as the determination of the electron energy distribution function (EEDF) by numerical derivation of the characteristic V − I [4] or by probe-current modulation [5]. In this work, some second positive system bands in the negative glow of an Ar-N2 plasma at a pressure of 2.5 Torr were investigated both by OES and Langmuir probes, for different mixture concentrations. The main purpose of this study was to verify how metastable states and the behavior of the EEDF may influence the interpretation of OES dataFil: Isola, Lucio Manuel. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; ArgentinaFil: López, Maia Melina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; ArgentinaFil: Gomez, Bernardo Jose Armando. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; ArgentinaFil: Guerra, Vasco. Instituto Superior Tecnico; PortugalInstitute of Physics Publishing2014-05info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/29799Isola, Lucio Manuel; López, Maia Melina; Gomez, Bernardo Jose Armando; Guerra, Vasco; On the influence of metastable states and the behavior of the EEDF in the characterization of the negative glow of a N2-Ar discharge by OES; Institute of Physics Publishing; Journal of Physics: Conference Series; 511; 013; 5-2014; 1-61742-6588CONICET DigitalCONICETenginfo:eu-repo/semantics/altIdentifier/url/http://iopscience.iop.org/article/10.1088/1742-6596/511/1/012013info:eu-repo/semantics/altIdentifier/doi/10.1088/1742-6596/511/1/012013info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-10-22T11:30:06Zoai:ri.conicet.gov.ar:11336/29799instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-10-22 11:30:07.002CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv On the influence of metastable states and the behavior of the EEDF in the characterization of the negative glow of a N2-Ar discharge by OES
title On the influence of metastable states and the behavior of the EEDF in the characterization of the negative glow of a N2-Ar discharge by OES
spellingShingle On the influence of metastable states and the behavior of the EEDF in the characterization of the negative glow of a N2-Ar discharge by OES
Isola, Lucio Manuel
PLASMA
OPTICAL EMISSION SPECTROSCOPY
Ar-N2
NEGATIVE GLOW
title_short On the influence of metastable states and the behavior of the EEDF in the characterization of the negative glow of a N2-Ar discharge by OES
title_full On the influence of metastable states and the behavior of the EEDF in the characterization of the negative glow of a N2-Ar discharge by OES
title_fullStr On the influence of metastable states and the behavior of the EEDF in the characterization of the negative glow of a N2-Ar discharge by OES
title_full_unstemmed On the influence of metastable states and the behavior of the EEDF in the characterization of the negative glow of a N2-Ar discharge by OES
title_sort On the influence of metastable states and the behavior of the EEDF in the characterization of the negative glow of a N2-Ar discharge by OES
dc.creator.none.fl_str_mv Isola, Lucio Manuel
López, Maia Melina
Gomez, Bernardo Jose Armando
Guerra, Vasco
author Isola, Lucio Manuel
author_facet Isola, Lucio Manuel
López, Maia Melina
Gomez, Bernardo Jose Armando
Guerra, Vasco
author_role author
author2 López, Maia Melina
Gomez, Bernardo Jose Armando
Guerra, Vasco
author2_role author
author
author
dc.subject.none.fl_str_mv PLASMA
OPTICAL EMISSION SPECTROSCOPY
Ar-N2
NEGATIVE GLOW
topic PLASMA
OPTICAL EMISSION SPECTROSCOPY
Ar-N2
NEGATIVE GLOW
purl_subject.fl_str_mv https://purl.org/becyt/ford/1.3
https://purl.org/becyt/ford/1
dc.description.none.fl_txt_mv Optical emission spectroscopy (OES) is an essential diagnostic technique in many plasma systems, such as those used for surface treatments or fabrication of thin films. Despite the simplicity of application of OES, its interpretation is not straightforward. In particular, it requires the use of models, which due to the complexity and variety of discharge conditions, have not yet been fully understood [1]–[3]. In addition, Langmuir probes have been widely used to characterize plasmas. They allow the measurement of several parameters of interest, such as the electron density and temperature, as well as the determination of the electron energy distribution function (EEDF) by numerical derivation of the characteristic V − I [4] or by probe-current modulation [5]. In this work, some second positive system bands in the negative glow of an Ar-N2 plasma at a pressure of 2.5 Torr were investigated both by OES and Langmuir probes, for different mixture concentrations. The main purpose of this study was to verify how metastable states and the behavior of the EEDF may influence the interpretation of OES data
Fil: Isola, Lucio Manuel. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
Fil: López, Maia Melina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
Fil: Gomez, Bernardo Jose Armando. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina
Fil: Guerra, Vasco. Instituto Superior Tecnico; Portugal
description Optical emission spectroscopy (OES) is an essential diagnostic technique in many plasma systems, such as those used for surface treatments or fabrication of thin films. Despite the simplicity of application of OES, its interpretation is not straightforward. In particular, it requires the use of models, which due to the complexity and variety of discharge conditions, have not yet been fully understood [1]–[3]. In addition, Langmuir probes have been widely used to characterize plasmas. They allow the measurement of several parameters of interest, such as the electron density and temperature, as well as the determination of the electron energy distribution function (EEDF) by numerical derivation of the characteristic V − I [4] or by probe-current modulation [5]. In this work, some second positive system bands in the negative glow of an Ar-N2 plasma at a pressure of 2.5 Torr were investigated both by OES and Langmuir probes, for different mixture concentrations. The main purpose of this study was to verify how metastable states and the behavior of the EEDF may influence the interpretation of OES data
publishDate 2014
dc.date.none.fl_str_mv 2014-05
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/29799
Isola, Lucio Manuel; López, Maia Melina; Gomez, Bernardo Jose Armando; Guerra, Vasco; On the influence of metastable states and the behavior of the EEDF in the characterization of the negative glow of a N2-Ar discharge by OES; Institute of Physics Publishing; Journal of Physics: Conference Series; 511; 013; 5-2014; 1-6
1742-6588
CONICET Digital
CONICET
url http://hdl.handle.net/11336/29799
identifier_str_mv Isola, Lucio Manuel; López, Maia Melina; Gomez, Bernardo Jose Armando; Guerra, Vasco; On the influence of metastable states and the behavior of the EEDF in the characterization of the negative glow of a N2-Ar discharge by OES; Institute of Physics Publishing; Journal of Physics: Conference Series; 511; 013; 5-2014; 1-6
1742-6588
CONICET Digital
CONICET
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv info:eu-repo/semantics/altIdentifier/url/http://iopscience.iop.org/article/10.1088/1742-6596/511/1/012013
info:eu-repo/semantics/altIdentifier/doi/10.1088/1742-6596/511/1/012013
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-sa/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
application/pdf
dc.publisher.none.fl_str_mv Institute of Physics Publishing
publisher.none.fl_str_mv Institute of Physics Publishing
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
_version_ 1846781891789717504
score 12.982451

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