Thickness dependence of crystalline structure of Al-doped ZnO thin films deposited by spray pyrolysis

Autores
Garces Pineda, Felipe Andres; Budini, Nicolas; Arce, Roberto Delio; Schmidt, Javier Alejandro
Año de publicación
2015
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
In this work, we have investigated the influence of thickness on crystalline structure of Al-doped ZnO films. Transparent conducting oxide films were grown by the spray pyrolysis technique from precursors prepared via the sol-gel method. We determined the structural properties of the films by performing X-ray diffraction and mosaicity measurements, which evidenced an increase of disorder and inhomogeneity between crystalline domains as the films thickened. This behavior was attributed to plastic deformation of the films as their thickness increased. Disorder is usually caused by internal stress in the crystalline structure of the film, which is due to diverse factors such as lattice and thermal mismatches between substrate and sample, postdeposition heat treatments, film growth parameters, film thickness, etc. Although there are several reports concerning stress-induced optical and electrical fluctuations of ZnO films, due to annealing or deposition processes, different substrates types and doping, the thickness dependence of structural characteristics is scarcely reported.
Fil: Garces Pineda, Felipe Andres. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Física del Litoral; Argentina
Fil: Budini, Nicolas. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Física del Litoral; Argentina
Fil: Arce, Roberto Delio. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Física del Litoral; Argentina. Universidad Nacional del Litoral. Facultad de Ingeniería Química; Argentina
Fil: Schmidt, Javier Alejandro. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Física del Litoral; Argentina. Universidad Nacional del Litoral. Facultad de Ingeniería Química; Argentina
Materia
Mosaicity
Sol Gel
Thin Film
Zinc Oxides
Stress
Electrical Properties
Nivel de accesibilidad
acceso abierto
Condiciones de uso
https://creativecommons.org/licenses/by-nc-nd/2.5/ar/
Repositorio
CONICET Digital (CONICET)
Institución
Consejo Nacional de Investigaciones Científicas y Técnicas
OAI Identificador
oai:ri.conicet.gov.ar:11336/4398
Acceder
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oai_identifier_str oai:ri.conicet.gov.ar:11336/4398
network_acronym_str CONICETDig
repository_id_str 3498
network_name_str CONICET Digital (CONICET)
spelling Thickness dependence of crystalline structure of Al-doped ZnO thin films deposited by spray pyrolysisGarces Pineda, Felipe AndresBudini, NicolasArce, Roberto DelioSchmidt, Javier AlejandroMosaicitySol GelThin FilmZinc OxidesStressElectrical Propertieshttps://purl.org/becyt/ford/1.3https://purl.org/becyt/ford/1In this work, we have investigated the influence of thickness on crystalline structure of Al-doped ZnO films. Transparent conducting oxide films were grown by the spray pyrolysis technique from precursors prepared via the sol-gel method. We determined the structural properties of the films by performing X-ray diffraction and mosaicity measurements, which evidenced an increase of disorder and inhomogeneity between crystalline domains as the films thickened. This behavior was attributed to plastic deformation of the films as their thickness increased. Disorder is usually caused by internal stress in the crystalline structure of the film, which is due to diverse factors such as lattice and thermal mismatches between substrate and sample, postdeposition heat treatments, film growth parameters, film thickness, etc. Although there are several reports concerning stress-induced optical and electrical fluctuations of ZnO films, due to annealing or deposition processes, different substrates types and doping, the thickness dependence of structural characteristics is scarcely reported.Fil: Garces Pineda, Felipe Andres. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Física del Litoral; ArgentinaFil: Budini, Nicolas. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Física del Litoral; ArgentinaFil: Arce, Roberto Delio. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Física del Litoral; Argentina. Universidad Nacional del Litoral. Facultad de Ingeniería Química; ArgentinaFil: Schmidt, Javier Alejandro. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Física del Litoral; Argentina. Universidad Nacional del Litoral. Facultad de Ingeniería Química; ArgentinaElsevier2015-07info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfapplication/pdfapplication/pdfhttp://hdl.handle.net/11336/4398Garces Pineda, Felipe Andres; Budini, Nicolas; Arce, Roberto Delio; Schmidt, Javier Alejandro; Thickness dependence of crystalline structure of Al-doped ZnO thin films deposited by spray pyrolysis; Elsevier; Procedia Materials Science; 9; 7-2015; 221-2292211-8128engInternational Congress of Science and Technology of Metallurgy and Materials, SAM – CONAMET 2014info:eu-repo/semantics/altIdentifier/ark/http://www.sciencedirect.com/science/article/pii/S2211812815000292info:eu-repo/semantics/altIdentifier/doi/10.1016/j.mspro.2015.04.028info:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by-nc-nd/2.5/ar/reponame:CONICET Digital (CONICET)instname:Consejo Nacional de Investigaciones Científicas y Técnicas2025-10-22T11:31:27Zoai:ri.conicet.gov.ar:11336/4398instacron:CONICETInstitucionalhttp://ri.conicet.gov.ar/Organismo científico-tecnológicoNo correspondehttp://ri.conicet.gov.ar/oai/requestdasensio@conicet.gov.ar; lcarlino@conicet.gov.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:34982025-10-22 11:31:27.965CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicasfalse
dc.title.none.fl_str_mv Thickness dependence of crystalline structure of Al-doped ZnO thin films deposited by spray pyrolysis
title Thickness dependence of crystalline structure of Al-doped ZnO thin films deposited by spray pyrolysis
spellingShingle Thickness dependence of crystalline structure of Al-doped ZnO thin films deposited by spray pyrolysis
Garces Pineda, Felipe Andres
Mosaicity
Sol Gel
Thin Film
Zinc Oxides
Stress
Electrical Properties
title_short Thickness dependence of crystalline structure of Al-doped ZnO thin films deposited by spray pyrolysis
title_full Thickness dependence of crystalline structure of Al-doped ZnO thin films deposited by spray pyrolysis
title_fullStr Thickness dependence of crystalline structure of Al-doped ZnO thin films deposited by spray pyrolysis
title_full_unstemmed Thickness dependence of crystalline structure of Al-doped ZnO thin films deposited by spray pyrolysis
title_sort Thickness dependence of crystalline structure of Al-doped ZnO thin films deposited by spray pyrolysis
dc.creator.none.fl_str_mv Garces Pineda, Felipe Andres
Budini, Nicolas
Arce, Roberto Delio
Schmidt, Javier Alejandro
author Garces Pineda, Felipe Andres
author_facet Garces Pineda, Felipe Andres
Budini, Nicolas
Arce, Roberto Delio
Schmidt, Javier Alejandro
author_role author
author2 Budini, Nicolas
Arce, Roberto Delio
Schmidt, Javier Alejandro
author2_role author
author
author
dc.subject.none.fl_str_mv Mosaicity
Sol Gel
Thin Film
Zinc Oxides
Stress
Electrical Properties
topic Mosaicity
Sol Gel
Thin Film
Zinc Oxides
Stress
Electrical Properties
purl_subject.fl_str_mv https://purl.org/becyt/ford/1.3
https://purl.org/becyt/ford/1
dc.description.none.fl_txt_mv In this work, we have investigated the influence of thickness on crystalline structure of Al-doped ZnO films. Transparent conducting oxide films were grown by the spray pyrolysis technique from precursors prepared via the sol-gel method. We determined the structural properties of the films by performing X-ray diffraction and mosaicity measurements, which evidenced an increase of disorder and inhomogeneity between crystalline domains as the films thickened. This behavior was attributed to plastic deformation of the films as their thickness increased. Disorder is usually caused by internal stress in the crystalline structure of the film, which is due to diverse factors such as lattice and thermal mismatches between substrate and sample, postdeposition heat treatments, film growth parameters, film thickness, etc. Although there are several reports concerning stress-induced optical and electrical fluctuations of ZnO films, due to annealing or deposition processes, different substrates types and doping, the thickness dependence of structural characteristics is scarcely reported.
Fil: Garces Pineda, Felipe Andres. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Física del Litoral; Argentina
Fil: Budini, Nicolas. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Física del Litoral; Argentina
Fil: Arce, Roberto Delio. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Física del Litoral; Argentina. Universidad Nacional del Litoral. Facultad de Ingeniería Química; Argentina
Fil: Schmidt, Javier Alejandro. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Santa Fe. Instituto de Física del Litoral; Argentina. Universidad Nacional del Litoral. Facultad de Ingeniería Química; Argentina
description In this work, we have investigated the influence of thickness on crystalline structure of Al-doped ZnO films. Transparent conducting oxide films were grown by the spray pyrolysis technique from precursors prepared via the sol-gel method. We determined the structural properties of the films by performing X-ray diffraction and mosaicity measurements, which evidenced an increase of disorder and inhomogeneity between crystalline domains as the films thickened. This behavior was attributed to plastic deformation of the films as their thickness increased. Disorder is usually caused by internal stress in the crystalline structure of the film, which is due to diverse factors such as lattice and thermal mismatches between substrate and sample, postdeposition heat treatments, film growth parameters, film thickness, etc. Although there are several reports concerning stress-induced optical and electrical fluctuations of ZnO films, due to annealing or deposition processes, different substrates types and doping, the thickness dependence of structural characteristics is scarcely reported.
publishDate 2015
dc.date.none.fl_str_mv 2015-07
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/11336/4398
Garces Pineda, Felipe Andres; Budini, Nicolas; Arce, Roberto Delio; Schmidt, Javier Alejandro; Thickness dependence of crystalline structure of Al-doped ZnO thin films deposited by spray pyrolysis; Elsevier; Procedia Materials Science; 9; 7-2015; 221-229
2211-8128
url http://hdl.handle.net/11336/4398
identifier_str_mv Garces Pineda, Felipe Andres; Budini, Nicolas; Arce, Roberto Delio; Schmidt, Javier Alejandro; Thickness dependence of crystalline structure of Al-doped ZnO thin films deposited by spray pyrolysis; Elsevier; Procedia Materials Science; 9; 7-2015; 221-229
2211-8128
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv International Congress of Science and Technology of Metallurgy and Materials, SAM – CONAMET 2014
info:eu-repo/semantics/altIdentifier/ark/http://www.sciencedirect.com/science/article/pii/S2211812815000292
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.mspro.2015.04.028
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc-nd/2.5/ar/
eu_rights_str_mv openAccess
rights_invalid_str_mv https://creativecommons.org/licenses/by-nc-nd/2.5/ar/
dc.format.none.fl_str_mv application/pdf
application/pdf
application/pdf
application/pdf
dc.publisher.none.fl_str_mv Elsevier
publisher.none.fl_str_mv Elsevier
dc.source.none.fl_str_mv reponame:CONICET Digital (CONICET)
instname:Consejo Nacional de Investigaciones Científicas y Técnicas
reponame_str CONICET Digital (CONICET)
collection CONICET Digital (CONICET)
instname_str Consejo Nacional de Investigaciones Científicas y Técnicas
repository.name.fl_str_mv CONICET Digital (CONICET) - Consejo Nacional de Investigaciones Científicas y Técnicas
repository.mail.fl_str_mv dasensio@conicet.gov.ar; lcarlino@conicet.gov.ar
_version_ 1846781918901698560
score 12.982451

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